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prof. Ing. Miroslav Husák, CSc.

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Gas sensors based on diamond heterostructures for air quality monitoring

  • Authors: Kočí, M., Szabó, O., Izsák, T., Sojková, M., Godzierz, M., Wróbel, P., prof. Ing. Miroslav Husák, CSc., Kromka, A.
  • Publication: NANOCON 2023 Conference Proceedings. Ostrava: TANGER, 2024. p. 203-209. NANOCON Conference Proceedings - International Conference on Nanomaterials. ISSN 2694-930X. ISBN 978-80-88365-15-0.
  • Year: 2024
  • DOI: 10.37904/nanocon.2023.4785
  • Link: https://doi.org/10.37904/nanocon.2023.4785
  • Department: Department of Microelectronics
  • Annotation:
    Currently, great emphasis is placed on air quality and the presence of pollutants, whether on toxic substances (NH3 or CO), substances that reduce the quality of life (CO2) or chemical vapors from industries (acetone or ethanol). Attention is therefore focused on new gas-sensing materials enabling detection even at low (up to room) temperatures with sufficient response and short reaction time.Here, we investigate the suitability of hydrogen-terminated nanocrystalline diamond (H-NCD) films and their heterostructures with molybdenum disulfide (MoS2), graphene oxide (GO), reduced GO (rGO), thiolfunctionalized GO (SH-GO), or gold nanoparticles (Au NPs) for gas sensing applications. Electrical properties are measured for oxidizing gas NO2, reducing gas NH3, and chemical vapor of ethanol (C2H5OH), and at temperatures varied from room temperature to 125 °C. All tested gases were used with a concentration of up to 100 ppm. Synthetic air is used as the flushing gas. The measured parameters of the tested sensors are compared, both with each other and with commercial sensors, and subsequently evaluated. In contrast to the individual forms of employed materials with limited response to the exposed gases, the HNCD heterostructures revealed better sensing properties. In particular, the Au NPs/H-NCD heterostructures revealed a higher response at 125 °C in contrast to H-NCD, MoS2/H-NCD had quite good response even at room temperature and GO/H-NCD revealed high sensitivity to chemical vapor, which further improved for the SH-GO/HNCD.

Enhanced gas sensing capabilities of diamond layers using Au nanoparticles

  • Authors: Kočí, M., Szabó, O., Vanko, G., prof. Ing. Miroslav Husák, CSc., Kromka, A.
  • Publication: Diamond and Related Materials. 2023, 2023(138), 1-9. ISSN 0925-9635.
  • Year: 2023
  • DOI: 10.1016/j.diamond.2023.110218
  • Link: https://doi.org/10.1016/j.diamond.2023.110218
  • Department: Department of Microelectronics
  • Annotation:
    The nanocrystalline diamond (NCD) film reveals a unique combination of physical, chemical, and optoelectronic properties, which makes it a promising material for various sensing applications. To improve a gas sensor's response, selectivity, or reproducibility, its surface is often modified with specific terminations, functional groups or (bio)molecules, thin films, etc. In this work, the NCD surface modification was achieved by a) layer morphology variation using two different types of chemical vapor deposition (CVD) systems, b) top surface termination (H-NCD and O-NCD), and c) Au nanoparticles (Au NPs). The properties of each structure are measured, compared and subsequently evaluated. The electrical properties (resistance changes) are measured for two types of active gas (oxidizing gas NO2 and reducing gas NH3) in a temperature range from 22 °C to 125 °C. Neutral synthetic air (80 % nitrogen and 20 % oxygen) was applied for flushing and resetting the sensors. Thin film fabrication, surface analysis (scanning electron microscopy and Raman spectroscopy), and measurement of electrical properties are described. Surface morphology greatly influences gas response because a large active surface area (higher roughness or 3D-like surface) enhances interaction with gas molecules. While the termination of the NCD with hydrogen is essential for the functionality of the gas sensor, the Au NPs further enhanced the dynamic response of the sensor and magnitude.

Gas Sensor with Different Morphology of PANI Layer

  • DOI: 10.3390/s23031106
  • Link: https://doi.org/10.3390/s23031106
  • Department: Department of Microelectronics
  • Annotation:
    This work presents the design of a polymer-film-based sensor for gas detection. Different types of polyaniline are used as active layers. The advantages of resistive sensors with PANI layers are easy preparation and low production cost. At room temperature, polymer films have a high sensitivity to gas concentrations. The developed sensor works on the idea of electrical resistance shifting with gas concentration. Three different polymerization solutions are employed to synthesize the polyaniline (PANI) active layers (aqueous solution, sulfuric acid solution, and acetic acid solution). Active layers are evaluated in a controlled environment for their ability to detect ammonia, carbon monoxide, nitrogen monoxide, acetone, toluene, and relative humidity in synthetic air. PANI layers polymerized in acetic acid solutions exhibit good sensitivity toward ammonia.

Improved Gas Sensing Capabilities of MoS2/Diamond Heterostructures at Room Temperature

  • Authors: Kočí, M., Izsák, T., Vanko, G., Sojková, M., Hrdá, J., Szabó, O., prof. Ing. Miroslav Husák, CSc., Végsö, K., Varga, M., Kromka, A.
  • Publication: ACS Applied Materials & Interfaces. 2023, 15(28), 34206-34214. ISSN 1944-8252.
  • Year: 2023
  • DOI: 10.1021/acsami.3c04438
  • Link: https://doi.org/10.1021/acsami.3c04438
  • Department: Department of Microelectronics
  • Annotation:
    Molybdenum disulfide (MoS2) and nanocrystalline diamond (NCD) have attracted considerable attention due to their unique electronic structure and extraordinary physical and chemical properties in many applications, including sensor devices in gas sensing applications. Combining MoS2 and H-terminated NCD (H-NCD) in a heterostructure design can improve the sensing performance due to their mutual advantages. In this study, the synthesis of MoS2 and H-NCD thin films using appropriate physical/chemical deposition methods and their analysis in terms of gas sensing properties in their individual and combined forms are demonstrated. The sensitivity and time domain characteristics of the sensors were investigated for three gases: oxidizing NO2, reducing NH3, and neutral synthetic air. It was observed that the MoS2/H-NCD heterostructure-based gas sensor exhibits improved sensitivity to oxidizing NO2 (0.157%·ppm–1) and reducing NH3 (0.188%·ppm–1) gases compared to pure active materials (pure MoS2 achieves responses of 0.018%·ppm–1 for NO2 and −0.0072%·ppm–1 for NH3, respectively, and almost no response for pure H-NCD at room temperature). Different gas interaction model pathways were developed to describe the current flow mechanism through the sensing area with/without the heterostructure. The gas interaction model independently considers the influence of each material (chemisorption for MoS2 and surface doping mechanism for H-NCD) as well as the current flow mechanism through the formed P–N heterojunction.

Room temperature gas sensors based on the diamond molybdenum disulfide and diamond graphene oxide structure

  • Authors: Kočí, M., Izsák, T., Wróbel, P., Godzierz, M., Szabó, O., Vanko, G., Sojková, M., Pusz, S., Potocký, Š., prof. Ing. Miroslav Husák, CSc., Kromka, A.
  • Publication: Proceedings of the International Conference on Advances in Electronicc and Photonic Technologies, held in Tatranská Lomnica, High Tatras, Slovakia, June 12 – 15, 2023. Žilina: EDIS - Publishing Institution of the University of Zilina, 2023. p. 91-94. ISBN 978-80-554-1977-0.
  • Year: 2023
  • Department: Department of Microelectronics
  • Annotation:
    Gas sensors are an integral part of everyday life. New materials and manufacturing processes enable the production of smaller, more accurate, cheaper and more selective sensors. Compared to pure material, heterostructured or hybrid sensors allow the combination of materials’ parameters and show improved response, selectivity and reproducibility. Heterostructures consisting of nanocrystalline diamond (NCD), molybdenum disulfide (MoS2) and graphene oxide (GO) have been investigated as gas sensors that operate at room temperature and have built-in interdigital metal electrode structures to measure conductivity. The fabrication of heterostructures of MoS2/NCD, rGO/NCD or GO-SH/NCD using suitable physical/chemical deposition methods is demonstrated. Furthermore, the measured sensor parameters of the tested materials and their heterostructures, in particular response, response rate, stability and regeneration, are compared and critically evaluated. Contrary to pure sensing material, the heterostructures improved the gas sensing parameters and exhibited a remarkable electrical response to the gases at room temperature.

A chemiresistive sensor array based on polyaniline nanocomposites and machine learning classification

  • DOI: 10.3762/bjnano.13.34
  • Link: https://doi.org/10.3762/bjnano.13.34
  • Department: Department of Microelectronics
  • Annotation:
    The selective detection of ammonia (NH3), nitrogen dioxide (NO2), carbon oxides (CO2 and CO), acetone ((CH3)2CO), and toluene (C6H5CH3) is investigated by means of a gas sensor array based on polyaniline nanocomposites. The array composed by seven different conductive sensors with composite sensing layers are measured and analyzed using machine learning. Statistical tools, such as principal component analysis and linear discriminant analysis, are used as dimensionality reduction methods. Five different classification methods, namely k-nearest neighbors algorithm, support vector machine, random forest, decision tree classifier, and Gaussian process classification (GPC) are compared to evaluate the accuracy of target gas determination. We found the Gaussian process classification model trained on features extracted from the data by principal component analysis to be a highly accurate method reach to 99% of the classification of six different gases.

LoC analyte detection using magnetic particles - III

  • Department: Department of Microelectronics
  • Annotation:
    The article provides information on the technique of detection using magnetic particles, specifically related information on surface-bound tests with magnetic particles for marking and further integration of magnetic control processes.

LoC analyte detection using magnetic particles - III

  • Department: Department of Microelectronics
  • Annotation:
    The article uses the information about Lab-on-Chip (LoC) given in [1−7] and immediately follows, resp. is a continuation of the information given in [8]. Follow-up information on the technique of detection using magnetic particles is given in the article, follow-up information on surface-bound tests with magnetic particles for marking and further integration of magnetic control processes are given specifically.

Micro Power Supply Based on Piezoelectric Effect

  • DOI: 10.1109/ASDAM55965.2022.9966775
  • Link: https://doi.org/10.1109/ASDAM55965.2022.9966775
  • Department: Department of Microelectronics
  • Annotation:
    The paper solves the model of the miniature Power supply based on the piezoelectric cantilever. The aim of the future is to further hybrid integration and use of nanotechnology. Contents of the article belongs to the category of renewable energy sources with environment energy conversion into electrical energy. The work is focused on the use in small temperature differences.

Piezoelectric layers applied in Lab-on-chip - II.

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the phenomena associated with the piezoelectric effect for applications in microfluidics, especially the phenomena of wave-liquid interaction, acoustofluidics with continuous flow and digital solutions, there are considerations about volume and thin-film acoustic wave technologies, the use of ZnO, AlN materials, acoustic wave structures with ZnO and AlN layers.

Piezoelectric layers for continuous flow acoustofluidics

  • Department: Department of Microelectronics
  • Annotation:
    The article describes single-phase acoustofluidics with continuous flow, the arrangement of particles in a microchannel, the principle of standing wave interacting with particles, the formation of a matrix of trapped particles, particle separation, particle manipulation. There are key properties of basic piezoelectric materials, typically ZnO, AlN or PVDF, and a discussion of the use and comparison of ZnO and AlN properties.

Piezoelectric layers for use in Lab-on-chip

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the characteristic wave modes applied for piezoelectric structures designed for microsensors and Lab-on-chip microactuators. Bulk acoustic wave (BAW) and surface acoustic wave (SAW) modes are described.

PtSe2 and MoS2 active layers for gas sensing at room temperature

  • Authors: Kočí, M., Izsák, T., Vanko, G., Sojková, M., prof. Ing. Miroslav Husák, CSc., Kromka, A.
  • Publication: Proceedings of the International Conference on Advances in Electronicc and Photonic Technologies, held in Tatranská Lomnica, High Tatras, Slovakia, June 20th – 24rd, 2022. Žilina: EDIS - Publishing Institution of the University of Zilina, 2022. p. 117-120. ISBN 978-80-554-1884-1.
  • Year: 2022
  • Department: Department of Microelectronics
  • Annotation:
    Gas sensors are nowadays an integral part of everyday life. New materials and fabrication processes allow the production of smaller, more accurate, cheaper, and more selective sensors. Here, gas sensing parameters of PtSe2, MoS2, and their heterostructures with nanocrystalline diamond (NCD) were measured at room temperature for oxidizing (NO2) and reducing (NH3) gases. The PtSe2 and MoS2 were prepared directly on SiO2/Si or NCD/SiO2/Si substrates by a simple selenization and a carbide-free one-zone sulfurization method. Advantageously, prepared heterostructure enhanced the gas sensing parameters and showed a notable electrical response to the examined gas types at room temperature.

Thin film acoustic wave biosensors

  • Department: Department of Microelectronics
  • Annotation:
    The article describes SAW biosensors implemented on various substrates, including flexible ones. Acoustic wave biosensors of the Lamb type, FBAR biosensors realized with different materials (AlN, Si, AlN/SiO2/diamond, ZnO/Si and others) are described here. Furthermore, examples of biosensors realized on polyimide materials, on PET materials and others are shown here.

Use of Thermally Stressed GaN Semiconductor Structures for Electricity Generation

  • DOI: 10.1109/ASDAM55965.2022.9966745
  • Link: https://doi.org/10.1109/ASDAM55965.2022.9966745
  • Department: Department of Microelectronics
  • Annotation:
    The work is focused on the analysis of the thermoelectric generator based on the thermoelectrical effect. The aim idea of the future is to further hybrid integration with semiconductor structures, event. used of nanotechnology. The work is focused on the use of heat of thermally stressed semiconductor structures with subsequent generation of electrical energy, such as GaN semiconductors designed for the automotive industry. The analysis is performed for 4 types of thermoelectric generators (TEG), obtaining energy and storing it in a supercapacitor. The aim was to verify the possibility of using thermoelectric effect, verifying properties using model, determine the essential characteristics, finding the optimum load, output voltage and output power achieved. The operation control of the thermoelectric generator was realized with the circuit LTC3108. We used thermoelectric batteries as a heat energy converter (TEC1- 12707, TEC1-071080, TEG-127020 a TEG-127009).

Development and measurement of gas sensors based on diamond and transition metal dichalcogenide materials

  • Authors: Kočí, M., Izsák, T., Vanko, G., Sojková, M., prof. Ing. Miroslav Husák, CSc., Kromka, A.
  • Publication: Proceedings of the International Conference on Advances in Electronicc and Photonic Technologies, held in Podbanské, High Tatras, Slovakia, September 20th – 23rd, 2021. Žilina: EDIS - Publishing Institution of the University of Zilina, 2021. p. 115-118. ISBN 978-80-554-1806-3.
  • Year: 2021
  • Department: Department of Microelectronics
  • Annotation:
    Gas sensing properties of a nanocrystalline diamond with hydrogen-terminated surface (H-NCD) and a transition metal dichalcogenide (TMD) are investigated as conductivity sensors employing device design with built-in interdigital metal electrode structures. The TMDs were prepared by a carbide-free one-zone sulfurization method directly on the SiO2/Si or NCD/Si substrates. On the individual level, the sensors showed a notable electrical response to the examined gas types, i.e., oxidizing (NO2) and reducing (NH3) gases. For reference, commercially available sensor was used (conductive SnO2 or infra-red type). Advantageously, it was found that the NCD/TMD heterostructure results in enhanced signal stability and gas sensing response at room temperature compared to both bare TMD and H-NCD layers.

Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities

  • DOI: 10.3390/s21165390
  • Link: https://doi.org/10.3390/s21165390
  • Department: Department of Microelectronics
  • Annotation:
    A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commercial sensors, a conductivity sensor with a metal oxide (MOX) active material (resistance change), and an infrared pyroelectric sensor (output voltage change) in this study. The deposited layer structure is characterized and analyzed by Scanning Electron Microscopy (SEM) and Raman spectroscopy. Electrical properties (resistance change for conductivity sensors and output voltage change for the IR pyroelectric sensor) are examined for two types of gases, oxidizing (NO2) and reducing (NH3). The parameters of the tested sensors are compared and critically evaluated. Subsequently, differences in the gas sensing principles of these conductivity sensors, namely H-terminated NCD and SnO2, are described.

Lab-on-chip Microfluidic platforms Part III

  • Department: Department of Microelectronics
  • Annotation:
    The article presents the third part of the overview of microfluidic platforms for Lab-on-Chip (LoC) systems. The article provides information on the platforms segmented microfluidics, centrifugal microfluidics and electrokinetics.

Lab-on-chip Microfluidic platforms Part IV

  • Department: Department of Microelectronics
  • Annotation:
    The article presents the fourth part of the overview of microfluidic platforms for Lab-on-Chip (LoC) systems. The article describes information about the platform with modification of wetting properties of the surface controlled by electric field (electrowetting), the platform with surface acoustic wave and in the conclusion about the systems for parallel analysis of sensor data.

LoC analyte detection using magnetic particles

  • Department: Department of Microelectronics
  • Annotation:
    The article uses the Lab-on-Chip information provided in previous articles. There are informations about the technique of detection using magnetic particles for the mechanisms of biophysical characterization, analyte detection, there are considerations about the possible integration of systems on the chip for the implementation of integrated Lab-on-Chip.

LoC analyte detection using magnetic particles - II

  • Department: Department of Microelectronics
  • Annotation:
    The article uses the information about Lab-on-Chip (LoC) given in the previous literature and immediately follows them. The article provides information on the technique of detection using magnetic particles for the mechanisms of biophysical characterization, information on agglutination tests with magnetic particles, surface-bound tests with magnetic particles for labeling.

Magnetic particles for Lab-on-Chip Part I

  • Department: Department of Microelectronics
  • Annotation:
    The article provides information on the technique of using magnetic microparticles for mechanisms applied in Lab-on-Chip, especially the mixing of fluidics in the modes of flowing and static fluidics (stationary microfluidics). The information focuses on the interconnection and integration of various magnetically controlled test steps in order to implement Lab-on-Chip for the implementation of integrated biosensitive tests, in which all steps of the test process are controlled and optimized by magnetic forces.

Magnetic particles for Lab-on-Chip Part II

  • Department: Department of Microelectronics
  • Annotation:
    The article provides information on the technique of using magnetic microparticles for mechanisms applied in Lab-on-Chip, especially mixing in flowing and static fluidics using magnetic particles.

Characterization of thermal energy harvesters with COB LED chips

  • DOI: 10.1109/ASDAM50306.2020.9393856
  • Link: https://doi.org/10.1109/ASDAM50306.2020.9393856
  • Department: Department of Microelectronics
  • Annotation:
    A large number of IoT nodes creates a danger of extra expenditures when changing the battery. For this reason, the development of supply nodes tends to prefer systems capable of battery-less operation, obtaining energy from other sources. This article deals with an alternative method of electrical energy acquisition form the excessive heat appearing in LED lighting fixtures utilizing large-area LED chips. A Peltier cell was used for the conversion of heat energy to electrical energy, connected as thermo-electric generator into the thermal chain.

Electromechanical IPMC models Part I

  • Department: Department of Microelectronics
  • Annotation:
    The article presents the first part of ionic polymer models. -metal composites (IPMC) in the form of distributed one-dimensional RC transmission lines. The electromechanical relationship between electrical parameters and bending motion is included in the models. The circuit elements of the transmission line have clear physical interpretations, the capacity of the bilayer formed at the boundary of the electrodes.

Electromechanical IPMC models Part II

  • Department: Department of Microelectronics
  • Annotation:
    The paper presents the second part of IPMC models in the form of distributed systems with the solution of nonlinear shunt conductivity caused by electrode reactions, actuators with sensor sensitivities, actuators with S characteristic. The article also addresses nonlinear distributed models of IPMC.

Electromechanical IPMC models Part III

  • Department: Department of Microelectronics
  • Annotation:
    The article presents the third and final part of the distributed IPMC models with the solution of nonlinear shunt conductivity models caused by electrochemical reactions on electrodes, actuators with sensor feedback, actuators with characteristic S . Nonlinear distributed IPMC models are also described in the article.

Energy consumption optimization for thermal energy harvester applications

  • Department: Department of Microelectronics
  • Annotation:
    This paper demonstrates the concept of node consumption reduction for IoT applications. The main emphasis is placed on the autonomy of the whole device, which must be independent of external power supply. That is why energy harvesting based on temperature principle is used for power supply. One of the parameters monitored is the service uptime. The concept of intelligent control of the individual parts of the equipment leads to significant energy savings. This control requires the use of low power components, but only their appropriate connection and mutual monitoring of their operating modes leads to the desired savings. This algorithm can be adapted to the needs of IoT nodes focused on real-time performance applications or the process tracking slow low power applications. This concept will ultimately be adapted to a wireless node for monitoring position and temperature for use in medical applications to monitor the patient's position on the bed or position while moving.

Inkjet Seeded CVD-Grown Hydrogenated Diamond Gas Sensor Under UV-LED Illumination

  • DOI: 10.1109/JSEN.2019.2946947
  • Link: https://doi.org/10.1109/JSEN.2019.2946947
  • Department: Department of Microelectronics
  • Annotation:
    Hydrogen-terminated diamond gas sensors have been prepared by selective deposition of nanodiamond ink using direct inkjet printing on interdigital electrodes, followed by chemical vapor deposition growth of a nanoctrystalline diamond layer. The structure of the deposited layer was characterized and analyzed by scanning electron microscopy and Raman spectroscopy. The effect of ultraviolet light-emitting diode (UV-LED) illumination on the performance of the hydrogen-terminated diamond gas sensor with regard to reducing (NH3) and oxidizing (NO2) gases at various temperatures was studied. UV-LED illumination showed a short response/recovery time to NH3 and NO2 gases, 97 s / 153 s, and 72 s / 186 s, respectively.

IoT applications utilizing excess heat in electrical lighting fixtures

  • Department: Department of Microelectronics
  • Annotation:
    The development of IoT instrumentation will always be strongly influenced by the properties of the power supply system. A large number of IoT nodes creates a danger of extra expenditures when changing the battery. For this reason, the development of supply nodes tends to prefer systems capable of battery-less operation, obtaining energy from other sources. This article deals with an alternative method of electrical energy acquisition form the excessive heat appearing in LED lighting fixtures utilizing large-area LED chips. A Peltier cell was used for the conversion of heat energy to electrical energy, connected as thermo-electric generator into the thermal chain.

IoT monitoring system for farmers

  • DOI: 10.1109/ASDAM50306.2020.9393855
  • Link: https://doi.org/10.1109/ASDAM50306.2020.9393855
  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the concept, design and testing monitoring system for the needs of farmers. The system consists of integrated autonomous BLE beacons, which are located on monitored objects (in our model case, cattle). These beacons transmit their identification data in specified periods together with other additional information, which is then used to perform the precise targeting of the monitored object in the monitored area (meadow, grazing, fence).

IoT monitoring system for farmers

  • Department: Department of Microelectronics
  • Annotation:
    Článek se zabývá návrhem a testováním monitorovacího systému pro potřeby farmářů. Systém sestává z integrovaných autonomních BLE beacon, které jsou umístěny na sledovaných objektech (v našem modelovém případě se jedná o skot). Tyto beacony vysílají v určených periodách svoje identifikační údaje společně s dalšími doplňkovými informacemi, které následně slouží pro provedení přesného zaměření sledovaného objektu ve sledovaném prostoru (louka, pastva, ohradník). This paper discusses the concept, design and testing monitoring system for the needs of farmers. The system consists of integrated autonomous BLE beacons, which are located on monitored objects (in our model case, cattle). These beacons transmit their identification data in specified periods together with other additional information, which is then used to perform the precise targeting of the monitored object in the monitored area (meadow, grazing, fence).

IoT monitoring system for farmers

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the concept, design and testing of a IoT based monitoring system for the needs of farmers. The system consists of integrated autonomous BLE beacons, which are located on the monitored objects (in our model case it is cattle). These beacons transmit their identification data in specified periods together with other additional information, which then serves to perform accurate targeting of the monitored object in the monitored area (meadow, fence). This data is periodically received by a central hub, which brings this information together, eliminates duplications and sends the final datagram containing information about active beacons via the GSM network (or LoRa) to a central server, where the data is subsequently processed. A pilot test experiment is taking place this summer on a private farm in Central Bohemia.

Lab-on-chip introduction

  • Department: Department of Microelectronics
  • Annotation:
    The article presents an introduction to the issues of research and development Lab-on-chip portable diagnostic equipment (laboratory on a chip), abbreviated LoC. The article describes the meaning equipment, here are the basic ideas that led to LoC research and development, three main areas are described application of LoC, the basic structure of LoC is briefly described. The main motivation for introducing this issue is the current one condition of Covid-19 and issues around its diagnostics form testing.

Lab-on-chip Microfluidic platforms Part I

  • Department: Department of Microelectronics
  • Annotation:
    The first part of the overview of microfluidic platforms is presented in the article. Platforms are one of the main components of the Lab-on-Chip (LoC) system. Definitions, functional principles, description of the activities of microfluidic units, examples of applications of each platform are described here.

Lab-on-chip Microfluidic platforms Part II

  • Department: Department of Microelectronics
  • Annotation:
    The article presents the second part of an overview of microfluidic platforms forming one of the main components of the Lab-on-Chip (LoC) system. This article provides information about a linearly controlled device platform, a pressure-controlled laminar flow platform, and a large-scale microfluidic integration (LSI) platform.

Miniature viscometer based on self-mixing interferometer

  • Authors: Martinek, P., prof. Ing. Miroslav Husák, CSc.,
  • Publication: ASDAM 2020 - The 13th International Conference on Advanced Semiconductor Devices and Microsystems. Bratislava: Slovak Academy of Sciences, Institute of Electrical Engineering, 2020. p. 71-74. ISSN 2474-9737. ISBN 978-1-7281-9776-0.
  • Year: 2020
  • DOI: 10.1109/ASDAM50306.2020.9393865
  • Link: https://doi.org/10.1109/ASDAM50306.2020.9393865
  • Department: Department of Microelectronics
  • Annotation:
    This work addresses development of a miniature viscometer. The miniature viscometer is based on a self-mixing interferometer. The viscosity is determined from mechanical resistance that is measured by a vibrating disc immersed in a liquid. Some MEMS viscometers are based on a similar principle. The main innovative advantage of the proposed viscometer is the use of self-mixing interferometer technology for accurate sensing of the position of the vibrating disc. The vibrating disc is mechanically connected to an electromagnetic microactuator. The microactuator excites the vibrating disc by a sinusoidal waveform of constant force. The vibrating disk is immersed in the measured liquid. The mechanical resistance caused by the viscosity of the fluid dampens the amplitude of the disk’s vibrations. Depending on the magnitude of the vibration amplitude, the viscosity value of the measured liquid can be determined.

Piezoelectric Microgenerator

  • DOI: 10.1109/ASDAM50306.2020.9393859
  • Link: https://doi.org/10.1109/ASDAM50306.2020.9393859
  • Department: Department of Microelectronics
  • Annotation:
    The core of the article solves the microsystem model of the electric generator based on the piezoelectric effect. The aim of the future is to further hybrid integration and use of nanotechnology. Contents of the article belongs to the category of renewable energy sources with environment energy conversion into electrical energy. The aim was to verify the possibility of using piezoelectric effect, verifying properties using model, determine the essential characteristics, finding the optimum load, output voltage and output power achieved. Attention is given to the basic principles of activities, electronic circuit connection as well as behaviour of the piezoelectric cantilever.

Special Oscillators

  • Authors: Foit, J., prof. Ing. Miroslav Husák, CSc.,
  • Publication: ASDAM 2020 - The 13th International Conference on Advanced Semiconductor Devices and Microsystems. Bratislava: Slovak Academy of Sciences, Institute of Electrical Engineering, 2020. p. 36-41. ISSN 2474-9737. ISBN 978-1-7281-9776-0.
  • Year: 2020
  • DOI: 10.1109/ASDAM50306.2020.9393848
  • Link: https://doi.org/10.1109/ASDAM50306.2020.9393848
  • Department: Department of Microelectronics
  • Annotation:
    In many practical electronic systems, there appears a requirement to design generators of lowdistortion harmonic oscillations, either with widely variable output frequency, or a highly stable single frequency, with limited influence of load or power supply variations on the generated frequency, a possibility of electronically operated tuning of the generated frequency, low dependence of the circuit on the Q-factor of the frequency-determining device or circuit, and almost any combination of these requirements. Some of the circuits shown in this paper are patented.

Comparison of MOSFET Gate Waffle Patterns Based on Specific On-Resistance

  • DOI: 10.13164/re.2019.0598
  • Link: https://doi.org/10.13164/re.2019.0598
  • Department: Department of Microelectronics
  • Annotation:
    This article describes waffle power MOSFET segmentation and defines its analytic models. Although waffle gate pattern is well-known architecture for effective channel scaling without requirements on process modification, until today no precise model considering segmentation of MOSFETs with waffle gate patterns, due to bulk connections, has been proposed. Two different MOSFET topologies with gate waffle patterns have been investigated and compared with the same on-resistance of a standard MOSFET with finger gate pattern. The first one with diagonal metal interconnections allows reaching more than 40% area reduction. The second MOSFET with the simpler orthogonal metal interconnections allows saving more than 20% area. Moreover, new models defining conditions where segmented power MOSFETs with waffle gate patterns occupy less area than the standard MOSFET with finger gate pattern, have been introduced.

Dielectric elastomers for actuators

  • Department: Department of Microelectronics
  • Annotation:
    General aspects of elastomer deformation, elastic deformation of elastomeric actuator actuated by electric field, nonlinear viscoelasticity of elastomers, tunable properties of dielectric constant of elastomers, dependencies of relative permittivity of different materials on temperature and electric field are described.

Dielectric electroactive polymer actuators

  • Department: Department of Microelectronics
  • Annotation:
    Dielectric elastomer actuators are promising for use in artificial muscles, space robots, mechatronics, micro-air 'vehicles', pneumatic and electrical automation, temperature valves, loudspeakers, tissue engineering, surgical instruments, wind turbine flaps, toys, rotary motors and micro handles in material manipulators. The paper is focused on the application of dielectric electroactive polymers (DEAP) as action mechanisms for various applications. DEAP materials require a very high DC supply voltage of ~ 2.5 kV for use as actuators. The paper analyzes the DEAP actuator for the wind turbine flap and heating valves. Basic DEAP actuator configurations are described.

Elastomer actuator with a mechanical bias for microrobots

  • Department: Department of Microelectronics
  • Annotation:
    The article presents robotic devices made of polymer, especially dielectric elastomer, devices are controlled by standard feedback or forward algorithms. The article is focused on robotic applications in connection of polymer physics and robotic actuators. Attention is paid to dielectric elastomer actuators with mechanical bias as well as actuators with multiple degrees of freedom. The basic operation of the dielectric elastomeric actuator is based on polymer intrinsic deformation (expansion or contraction) in the presence of electrical voltage on the electrodes.

Elastomer actuator without mechanical prestressing

  • Department: Department of Microelectronics
  • Annotation:
    In this paper, attention is paid to dielectric elastomer actuators without mechanical prestressing. Based on the created models are made basic mathematical descriptions. The structures are designed, the response characteristics of the actuator response and the force response to the input voltage excitation are measured. In conclusion, attention is paid to the design and implementation of dielectric elastomeric tactile Braille display.

Ionic polymer-metal composite for actuators

  • Department: Department of Microelectronics
  • Annotation:
    In this paper, attention is paid to perspective actuator materials - ionic polymer-metal composites (IPMC), which can be controlled by a very low voltage. The article explains their operation, shows basic mechanical, electrical and electro-chemical parameters.

Ionic polymer-metal composite, model and application

  • Department: Department of Microelectronics
  • Annotation:
    In this paper, attention is paid to the model of ionic polymer-metal composites (IPMC) controlled by very low voltage. There are briefly mentioned IPMC implementation technologies, metal reduction method and physical deposition technology. The article is supplemented with examples of applications, ie realization of actuator for robotic wings, use of actuator for construction of bipedal robot and snake-like robot. Basic characteristics are briefly presented for each application.

Stabilized-load crystal oscillator

  • Authors: Foit, J., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of IWSSIP 2019. Osijek: FEE, Computer Science and Information Technology, Osijek, 2019. p. 35-38. ISSN 2157-8672. ISBN 978-1-7281-3227-3.
  • Year: 2019
  • Department: Department of Microelectronics
  • Annotation:
    The presence and concentration of some gases can be sensed by quartz crystal resonators covered by a thin layer of gas-absorbing material. The absorbed gas increases the inertial mass of the layer, and as a result the resonating frequency of the crystal is changed. However, a disadvantage of this method lies in the fact that the absorbed mass increases internal friction in the sensing layer, leading to increased damping, in other words dropping the Q-factor of the resonator. If the resonating frequency is to be measured by using the resonator as the frequency-determining device of an autonomous oscillator, accuracy problems appear due to the wide variations of the resonator Q-factor. The following article shows effective patented methods diminishing this problem.

A True Random Number Generator with Time Multiplexed Sources of Randomness

  • DOI: 10.13164/re.2018.0796
  • Link: https://doi.org/10.13164/re.2018.0796
  • Department: Department of Microelectronics
  • Annotation:
    A true random number generator (TRNG) with time multiplexed metastability-based sources of randomness, presented in this paper, is capable of generating random bit sequences formed from noise present in the electronic circuit. An incorporated time multiplexer interleaves digitized random signals coming from sources of randomness and increases output data rate. The proposed TRNGwas fabricated in a STMicroelectronics 130 nm bulk CMOS technology on an area of 0.029mm2. The quality of all random bit sequences has been verified by the FIPS and NIST statistical test suites. The fabricated TRNG generates random bit sequences up to the data rate of 20 Mb/s without any corrective mechanisms at power consumption of 72.48 uW. The changing environmental conditions do not influence the quality of random bit sequences.

Active polymers for robotic applications I.

  • Department: Department of Microelectronics
  • Annotation:
    In the article there is an overview of active non-electrically controlled polymers used as actuators for robotic applications or for the design and realization of artificial muscles, etc. There are mentioned chemically controlled active polymers, shape memory polymers, gas-controlled polymer structures, optically activated polymers, magnetically controlled active polymers, thermally activated polymer gels.

Active polymers for robotic applications II.

  • Department: Department of Microelectronics
  • Annotation:
    The article contains a continuation of the review of active non-electrically controlled polymers used as robotic actuators or for the design and realization of artificial muscles. Optical radiation-activated polymers, magnetically controlled active polymers, and thermally activated polymer gels are disclosed herein.

Advanced frequency equalizers

  • Authors: Foit, J., prof. Ing. Miroslav Husák, CSc.,
  • Publication: ASDAM 2018. Košice: Slovak Academy of Science, 2018. p. 31-34. ISBN 978-1-5386-7488-8.
  • Year: 2018
  • DOI: 10.1109/ASDAM.2018.8544669
  • Link: https://doi.org/10.1109/ASDAM.2018.8544669
  • Department: Department of Microelectronics
  • Annotation:
    A considerable proportion of data processed in contemporary electronic systems originate in analogue sensors and have to be pre-processed prior to digitization. Pre-processing usually means voltage amplification and some degree (sometimes rather considerable) of frequency response equalization. In many cases, like image processing and similar tasks, the sensor physical dimensions constitute a strict limitation to its ability to discern small details of the observed physical quantity. In order to keep the system overall resolution power as close to the physical limits of the particular sensor in question, efficient equalization of its spatial frequency response is required. As a difference from the simple common electronic circuits, the high-end frequency response of a sensor with non-zero effective aperture does not follow the minimum-phase behaviour. Attempts to equalize the high frequency limitations in such systems by common minimum-phase high-boost circuits lead to crude errors in response to transient phenomena in the sensed physical quantity, with detrimental effects to the accuracy of such a system. This paper shows several examples of relatively easy solutions of non-minimum-phase electronic equalizer circuits (some already patented, other patents pending) avoiding this problem. As an additional benefit, some of these new designs permit to create essentially flat phase response in the central frequency range of selective circuits, as well as other interesting zero-phase frequency dependent amplitude responses.

Automated pre-placement phase as a part of robust analog-mixed signal physical design flow

  • DOI: 10.1016/j.vlsi.2018.04.018
  • Link: https://doi.org/10.1016/j.vlsi.2018.04.018
  • Department: Department of Microelectronics
  • Annotation:
    A new pre-placement phase of integrated circuits (IC) analog-mixed-signal (AMS) physical design flow, introduced in this paper, automatically sorts electrical devices used in planar IC technologies according to their topological, structural and electrical properties. The presented design phase replaces human labour and allows to save design time and prevent human mistakes. Software implementation of the proposed method works with virtual objects of layout instances which are moved only once at the end of the script when creating the final pre-placement matrix. Algorithm complexity is decreased by a new way of virtual objects matrix indexing. The automatic pre-placement phase has been used during design of AMS circuits in 160 nm BCD8sP and SOIBCD8S technologies from STMicroelectronics and has been faster in the range of 3164 to 20099 times compared to manual sorting. The estimation of ratio between manual sorting time and automatic pre-placement time shows a growing time saving with increasing circuit complexity compared to standard layout flow. The introduced enhanced layout flow is able to prevent a creation of hardly detectable errors occurring at the beginning of AMS physical design, especially the wrong bulk connection errors of semiconductor devices. The automatic pre-placement phase saves hours of reworks and speeds up the entire design process.

Effective Component Selection Method

  • DOI: 10.1109/ASDAM.2018.8544649
  • Link: https://doi.org/10.1109/ASDAM.2018.8544649
  • Department: Department of Microelectronics
  • Annotation:
    This article deals with minimizing errors caused by selection of passive components from production preferred values. For example, the E24 series of passive components only has 24 values per a decade, so the exact calculated value of the components must be rounded to the nearest value in the series. This rounding to an inaccurate value creates the error. The article describes several methods of minimizing this error and introduces a new method called “Effective Component Selection Method” that eliminates disadvantages of the previous methods. The principle is to select the components in such a way that the errors caused by the rounding of the individual circuit components cancel each other out in the resulting function of the circuit. This is achieved by optimization and by using the circuit’s degrees of freedom that are independent on its required function.

Electroactive Polymers for Robotic Applications III.

  • Department: Department of Microelectronics
  • Annotation:
    In the article there is an overview of active electrically controlled polymers used as actuators for robotic applications or for the design and realization of artificial muscles, etc. Information on ferroelectric polymers, dielectric and ferroelectric graft elastomers, electrostrictive actuators, electro-viscoelastic elastomers and electro-rheological materials , liquid crystal elastomers.

Electroactive Polymers for Robotic Applications IV.

  • Department: Department of Microelectronics
  • Annotation:
    In the article there is an overview of other active electrically controlled polymers used for the implementation of actuators in robotic applications or in the design and realization of artificial muscles, etc. The principles of ion polymer polymer, ionic polymer-metal composites, conductive polymers and carbon nanotube actuators are described here.

Model of the Thermoelectric Generator

  • Authors: prof. Ing. Miroslav Husák, CSc., Martinek, P., Kazák, D.
  • Publication: ASDAM 2018. Košice: Slovak Academy of Science, 2018. p. 183-186. ISBN 978-1-5386-7488-8.
  • Year: 2018
  • DOI: 10.1109/ASDAM.2018.8544537
  • Link: https://doi.org/10.1109/ASDAM.2018.8544537
  • Department: Department of Microelectronics
  • Annotation:
    The core of the article solves the microsystem model of the electric generator based on the thermoelectric effect. The aim of the future is to further integration and use of nanotechnology. Contents of the article belongs to the category of renewable energy sources with environment energy conversion into electrical energy. The information contained in the article are based on known principles of the thermoelectric phenomenon. This is the first work with the output results. The aim was to verify the possibility of using thermoelectric phenomenon, verifying properties using model, determine the essential characteristics, finding the optimum load, output voltage and output power achieved. The operation control of the thermoelectric generator was realized with the circuit BQ25570. The circuit is designed to get maximum power from the thermoelectric generator, it has a very low quiescent current (488 nA). We used the Micropelt TGP-651 thermoelectric battery as a heat energy converter.

Performance Evaluation of Low-Cost Flexible Gas Sensor Array with Nanocomposite Polyaniline Films

  • DOI: 10.1109/JSEN.2018.2811461
  • Link: https://doi.org/10.1109/JSEN.2018.2811461
  • Department: Department of Microelectronics
  • Annotation:
    The aim of this paper is to present the design of a sensor array based on a single substrate with various composite polymer films as active layers for gas detection. A low power, four element flexible sensor platform with heater and temperature sensor was designed. The advantages of resistive sensors are easy fabrication, simple operation and low production cost. Composite polymer films exhibit good sensitivity to low gas concentrations at room temperatures. The principle of the designed sensor array is a change of electrical resistance in dependence of gas concentration. PANI, PANI/CNT, PANI/SnO2 and PANI/TiO2 composites were used as active layers. Gas sensing properties of active layers for NH3, CO2, NO2, O2, acetone, toluene and relative humidity were studied. PANI composites, unlike pristine PANI, exhibit good reversibility and lower temperature dependence.

Perspective materials and structures for new RF to UHF components

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: XXVIII. konference Radiokomunikace - Sborník přednášek. Pardubice: Unit s.r.o., 2018. p. 275-285. ISBN 978-80-87942-45-1.
  • Year: 2018
  • Department: Department of Microelectronics
  • Annotation:
    This article introduces the current state of new prospective materials and their use in component structures, sensors and actuators with use for a wide range of RF applications including IoT. At the beginning is a section devoted to the current state of graphen development, transistor structures and other types of components made of graphene. Attention is paid to improving parameters. Attention is paid to hardware components for IoT, in particular to sensors and actuators and their control, advanced microsystem solutions of components used in radiotechnics and communications.

Polymer actuators for artificial muscles - I.

  • Department: Department of Microelectronics
  • Annotation:
    Different types of natural muscles are made from material structures that allow for large deformations based on the repetitive movement of molecules. The technology of designing and realizing polymer artificial muscles is based on the creation of mechanical mechanical stress, the use of higher mechanical stresses created by electrostatic forces, electrostriction, ion insertion and changes in molecular adaptation. Materials used include elastomers, conductive polymers, ion-conducting polymers and carbon nanotubes.

Polymer actuators for artificial muscles - II.

  • Department: Department of Microelectronics
  • Annotation:
    The paper describes the principles and properties of carbon nanotube (CNT) actuators with single wall (SWNT) and multi-wall CNT (MWNT), where the action is generally generated in layers or spun fibers. The energy density that can be considered as achievable for individual nanotube actuators is unrivaled compared to other actuator technologies, can reach 108 J.m-3. High work density combined with good thermal stability enables CNT to be used in low-weight and high temperature applications. In addition, conductive polymers, typically semi-conductive, donated or acceptor ions are useful in artificial muscle applications. The advantage of conductive polymers over electronic EAP is their low operating voltage, higher mechanical strain and lower cost compared to CNT. Ion-polymer-metal composites (IPMC), as another type of electrochemical artificial muscle, uses the polyelectrolyte as an ion-conducting layer. Molecular mechanisms are briefly described for molecular actuator designs.

Gas sensors: semiconductor structures and SAW

  • Department: Department of Microelectronics
  • Annotation:
    The article presents an overview of basic technologies and principles of operation of the most frequently used gas sensors. The focus is mainly on the catalytic and electrochemical sensors. It describes the operation of a pelistor, a pelister as a MEMS structure, a thermoelectric cell sensor, a thermal conductivity sensor, an amperometric and a potentiometric sensor. The advantages and disadvantages of individual types of sensors are presented.

Hydrogen sensors with nanowire ZnO nanostructures

  • Department: Department of Microelectronics
  • Annotation:
    In the paper, attention is paid to both single SMO 1D nanostructures and multiple SMO nanostructures as well as to H2 sensors with nanowire ZnO structures applied to intelligent textiles and ways to increase the sensitivity and selectivity of H2 sensors at room temperatures.

Hydrogen sensors with semiconductor oxide nanostructures

  • Department: Department of Microelectronics
  • Annotation:
    In recent years, research and development have been devoted to the research on the development of semiconductor oxide (SMO) nanostructures on thin films and 1-D nanostructures, particularly in the function of hydrogen sensors. Attention is focused on investigating the response of SMO thin layers and nanostructures 1D to the grain size of structures and crystal orientation, as well as to the hydrogen sensor architecture, including the size of the electrode and nanopowders. Thoughts are made for future applications of SMO nanostructured hydrogen sensors.

Ion polymer actuators with sensor feedback

  • Department: Department of Microelectronics
  • Annotation:
    Ion electromechanically active polymers (IEAPs) are laminar composites that can be considered attractive materials for "soft" actuators. They have exceptional features such as low operating voltage, easy miniaturization and noiseless operation, but on the other hand, there are problems in the reproducibility of production and operation. It turns out that significant improvements can be achieved by introducing controlled feedback for IEAP actuators. Because IEAP also act as mechanical-electrical sensors, it is advantageous to connect actuator and sensor functions to create an element that can be called a feedback sensor. The IEAP, which are the subject of this article, are conductive polymer actuators (CPA), polymer-metal ion-composites (IPMC) and carbon polymer structures.

Magnetically Levitated and Guided Systems

  • Authors: Puci, F., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Advances in Science, Technology and Engineering Systems Journal. 2017, 2(3), 241-244. ISSN 2415-6698.
  • Year: 2017
  • DOI: 10.25046/aj020333
  • Link: https://doi.org/10.25046/aj020333
  • Department: Department of Microelectronics
  • Annotation:
    The paper starts with a general information regarding the magnetic levitation followed by a background of this technology, including its applications, several comparisons with other types of technologies, the real stage of its development, etc. Further, the two main types of magnetically levitated systems are compared within their subgroups, on characteristics and specifications basis. A microactuator with moving magnets was designed and constructed and the accomplished parameters are presented here. A comparison between the AC and DC power supplies for these systems, including the pros and cons of each type, is also provided in the paper.

Sensors with electroactive polymers

  • Department: Department of Microelectronics
  • Annotation:
    Electromechanical coupling in electroactive polymers (EAPs) has been widely applied for actuation and is also being increasingly investigated for sensing chemical and mechanical stimuli. EAPs are a unique class of materials, with low-moduli high-strain capabilities and the ability to conform to surfaces of different shapes. These features make them attractive for applications such as wearable sensors and interfacing with soft tissues. Here, we review the major types of EAPs and their sensing mechanisms. These are divided into two classes depending on the main type of charge carrier: ionic EAPs (such as conducting polymers and ionic polymer–metal composites) and electronic EAPs (such as dielectric elastomers, liquid-crystal polymers and piezoelectric polymers). This review is intended to serve as an introduction to the mechanisms of these materials and as a first step in material selection for both researchers and designers of flexible/bendable devices, biocompatible sensors or even robotic tactile sensing units.

Sensors with electroactive polymers II

  • Department: Department of Microelectronics
  • Annotation:
    Electroactive Polymers (EAP) enable use not only for sensors of chemical and mechanical quantities but also for actuators. Materials used for EAP are ductile and therefore have the ability to adapt to different geometric shapes. This article introduces the main types of EAP and their mechanisms for capturing information. EAP are divided into two classes depending on the main type of charge carrier: ionic EAP (such as conductive polymers, ionic polymer-metal composites) and electronic EAPs (such as dielectric elastomers, liquid crystal polymers and piezoelectric polymers) of this article.

Acoustic Method for Respiratory Monitoring

  • DOI: 10.1109/ASDAM.2016.7805909
  • Link: https://doi.org/10.1109/ASDAM.2016.7805909
  • Department: Department of Microelectronics
  • Annotation:
    This paper describes a method of the respiration monitoring based on the sensing of acoustic signals in trachea. Further, the article describes method for signal processing of the acoustic signals. The respiration belongs among basic vital functions and the knowledge of their parameters and quality is necessary in medicine. The research is leading to the methods, which are inconvenienced patients. Monitoring of respiration is important for monitoring respiration towards observation quality sleeping or The Sudden Infant Death Syndrome (SIDS).

Analyzer of Liquid Chemical Substances

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the principles of analysis of pollutants in water by molecular absorption spectrometry. The spectrometer is used for analysis. Design and implementation of software for the evaluation of water analysis is part of the work. The software is designed with ease of use and retrieval of data. Analysis of water is mainly focused on nitrates. The detection is focused on determining levels of particular components, suitable algorithm recognizes the substance.

Biosensors with Schottky contact and piezotronic

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the the properties of biosensors realized with Schottky nanowire structure using piezotronického phenomenon. The article deals with the structure and characteristics of the pH biosensor, the biosensor for measuring glucose concentration and protein concentration. It is shown that increase in sensitivity and selectivity can be achieved by applying piezotronic phenomenon on ZnO nanowires.

Current status in the development of electrical energy microgenerators type of energy harvesting

  • Department: Department of Microelectronics
  • Annotation:
    The article introduces the basic physical principles exploited for the design and implementation of electric micro-generators. Attention is focused on the most commonly used principles of electromagnetic, piezoelectric and thermal. In the article are mentioned generator technology, including nanotechnology, there are given examples of commercially implemented systems in the paper. Electric power supply micro-generators using renewable energy sources are already applied in many fields, typically intelligent buildings, biomedicine, wearable electronics, the Internet of things (IoT), sensor networks, etc . It is expected for the future the great development supported by the development of microelectronic technologies. electric

Gas Analyzer for Quick Indicative Measurements

  • DOI: 10.1109/ASDAM.2016.7805908
  • Link: https://doi.org/10.1109/ASDAM.2016.7805908
  • Department: Department of Microelectronics
  • Annotation:
    The article describes the design and realization of the gas analyzer using 4 types of gas sensors – catalytic, electrochemical, semiconductor and infrared sensor. The analyzer is intended for quick orientation measuring the presence of gas. The analyzer includes basic parts - the sensor part, the evaluation and control part, the display and the output actuator part. The analyzer is designed for easy modification of its connection to different types of chemical sensors. The sensor part includes a chemical sensor, an EEPROM and a temperature sensor. The type of the used sensor sets the operation mode of the both part - evaluation and control part. Actuators on the output are ready to control the security elements (ventilation, alarm, etc.). The display shows the basic information - gas concentration, temperature, and more. Evaluation and control part includes microprocessor, memory for long-term data, signaling LEDs, push buttons.

Gas sensors - Part 1 Catalytic and electrochemical sensors

  • Department: Department of Microelectronics
  • Annotation:
    The article provides an overview of basic technologies of the basic gas sensors. Attention is focused to the catalytic and electrochemical sensors. there are described the principle of pellistor, pellistor as MEMS, the sensor with a thermocouple, a sensor with a measuring thermal conductivity, amperometric and potentiometric sensors in the paper. Advantages and disadvantages of different types of sensors.

Incremental Control Techniques for Layout Modification

  • Authors: Vacula, P., Kotě, V., KUBAČÁK, A, LŽÍČAŘ, M, ZELENÝ, R, prof. Ing. Miroslav Husák, CSc., prof. Ing. Jiří Jakovenko, Ph.D.,
  • Publication: ASDAM 2016 Conference Proceedings - The 11th International Conference on Advanced Semiconductor and Microsystems. Bratislava: Slovenská akademie věd, 2016. p. 239-242. Proceedings. ISSN 2475-2916. ISBN 978-1-5090-3083-5.
  • Year: 2016
  • DOI: 10.1109/ASDAM.2016.7805939
  • Link: https://doi.org/10.1109/ASDAM.2016.7805939
  • Department: Department of Microelectronics
  • Annotation:
    During creation of analog layout in IC CAD environment layout engineers spend a lot of time by modifying objects in a database. By applying new control concept and targeting modern control approaches our solution unifies and simplifies control of any layout object to speed-up work. Discussed new control techniques are compatible with IC CAD environment and both current control devices as keyboard/mouse and new gesture tracking devices. New control concept is very intuitive and improves productivity of analog layout.

MAGNETICALLY LEVITATED AND GUIDED SYSTEMS

  • Authors: Puci, F., prof. Ing. Miroslav Husák, CSc.,
  • Publication: 2nd Flash Conference 2016, Book of Abstracts. Brno: CEITEC - Central European Institute of Technology, 2016. p. 70-71. ISBN 978-80-214-5416-3.
  • Year: 2016
  • Department: Department of Microelectronics
  • Annotation:
    The article describes the two main types of magnetically levitated systems on general and detailed characteristic basis. A comparison between the AC and DC power supplies for these systems, including the pros and cons of each type, is also provided in the paper. Further, the constructed magnetically levitated planar actuator with moving magnets, the translator and stator design are explained.

Model of the Triboelectric Generator

  • Authors: prof. Ing. Miroslav Husák, CSc., Bílý, A.
  • Publication: ASDAM 2016 Conference Proceedings - The 11th International Conference on Advanced Semiconductor and Microsystems. Bratislava: Slovenská akademie věd, 2016. p. 109-112. Proceedings. ISSN 2475-2916. ISBN 978-1-5090-3083-5.
  • Year: 2016
  • DOI: 10.1109/ASDAM.2016.7805907
  • Link: https://doi.org/10.1109/ASDAM.2016.7805907
  • Department: Department of Microelectronics
  • Annotation:
    The core of the article solves the microsystem model of the electric generator based on the triboelectric effect. The aim was to verify the possibility of using triboelectric effect, verifying properties using macromodel, determine the essential characteristics, finding the optimum load, output voltage and output power achieved. Attention is given to the three basic principles of activities - the vertical sliding, the lateral sliding, the shift of one electrode with the free triboelectric layer. The attention is focused on information about the structure design, information of the measured parameters with free triboelectric layer, where have been achieved the best results. Different structures have been designed, realized and measured, the example of structure with the free triboelectric layer was realized by mechanical machining of the cardboard paper, aluminum foil and teflon (PTFE). The output voltage reached amplitude of 40 V at the load 1 MΩ.

Modern Control Techniques for Layout Creation

  • Department: Department of Microelectronics
  • Annotation:
    During creation of analog layout in Cadence CAD environment layout engineers spend a lot of time by modifying objects in a database. By applying new control concept and targeting modern control approaches our solution unifies and simplifies control of any layout object to speed-up work. Discussed new control techniques are compatible with Cadence CAD environment and both current control devices as keyboard/mouse and new gesture tracking devices. Layout engineers experienced with new control concept prefer this flow to the classic one as object modification has been simplified. New control concept is very intuitive and improves productivity of analog layout.

Nanosensors with Schottky contact

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the use of Schottky structured nanowire sensors using piezotronic phenomenon. Schottky contact allows achieving very high sensitivity and fast response in dependence on the height of the barrier metal-semiconductor interface. Piezotronic phenomenon is applied for controlling the charge transport through the interface to the metal-semiconductor Schottky barrier height modulation. Piezotronic phenomenon provides an improvement in sensitivity, resolution, and response time. The structure can be used for biochemical sensors, gas sensors, humidity sensors, temperature and others.

Non-minimum Phase Analog Equalizers

  • Authors: Foit, J., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of ADEPT. Bratislava: STU Bratislava, 2016. pp. 257-260. ISBN 978-80-554-1226-9.
  • Year: 2016
  • Department: Department of Microelectronics
  • Annotation:
    Common equalizers create phase errors depending on frequency, The paper describes a new design of equalizers with constant phase.

Piezotronic gas sensors, temperature and humidity sensor with Schottky contact

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the properties of sensors with Schottky nanowire structure when exposed piezotronic phenomenon. The attention is devoted to the principles of activity and achievements of Schottky contact sensors (chemical sensors, humidity and temperature) using a piezotronic phenomenon. Increasing sensitivity and selectivity can be achieved by applying piezotronic effect to the ZnO nanowires or layers. Piezotronic phenomenon provides an effective approach for improving the sensitivity, the resolution, the response time of nanowire biosensors.

Piezotronic nanodevices and nanosystems

  • Department: Department of Microelectronics
  • Annotation:
    Due to the polarization of ions in the crystal of a piezoelectric semiconductor such as e.g. ZnO, GaN or InN piezoelectric polarization charges are formed in the interface under the action of mechanical stress, creating potential in the crystal. Piezotronic components used for its activity as a control (gate) voltage, mechanical stress is used to control generation of charge transport and separation or recombination of charge carriers for improvement of optoelectronic devices such as solar cells and LEDs. Piezotronic components and integrated systems represent a significant milestone in nanotechnology, that are one of the promising directions of nanoelectronics.

Piezotronics

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the piezotronic structure as a converter of mechanical stress to the piezoelectric potential. Attention is paid to the structure of the metal-semiconductor, i.e. a MOS transistor, where the gate is replaced by piezotronic material ZnO structure p-n junction with the Schottky contact, fototronic structures such as photodetectors, solar cells and LEDs. In conclusion, an evaluation of the use of the phenomenon in the electronics of tomorrow.

Quartz Crystal Microbalance Gas Sensor with Ink-Jet Printed Nanodiamond Sensitive Layer

  • DOI: 10.1515/jee-2016-0009
  • Link: https://doi.org/10.1515/jee-2016-0009
  • Department: Department of Microelectronics
  • Annotation:
    The paper presents fabrication and characteri-zation of a Quartz Crystal Microbalance based gas sensor with a diamond powder sensitive layer deposited using the ink-jet printing technique. The sensor was exposed to a low concentration of ammonia, acetone vapors and different levels of humidity. Impedance characteristics close to the natural resonant frequency of 10 MHz were examined. The sensor exhibits significant shifts in serial resonant frequency under different gas environments.

WIRELESS TRANSFER OF THE SENSOR DATA

  • Authors: Puci, F., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Advances in Electronic and Photonic Technologies. Žilina: University of Žilina, 2016. pp. 211-214. ISBN 978-80-554-1226-9.
  • Year: 2016
  • Department: Department of Microelectronics
  • Annotation:
    The paper describes the design of an actuator used for temperature measurement and wireless transfer of the sensor data. An analog temperature sensor is used thus the output data of the sensor will be the measured values of temperature. The main element is an 8-bit microcontroller used for data processing. A Bluetooth module is used for data transferring. Because the output data of the sensor are analog data and the Bluetooth module requires digital data at its input, an AD converter within the microcontroller is used for data conversion. The data are received from a computer, where the last stage, data evaluation, is completed. The system fulfils all the design requirements and its functionality was verified in the laboratory.

WIRELESSLY POWERED HIGH-TEMPERATURE STRAIN MEASURING PROBE BASED ON PIEZORESISTIVE NANOCRYSTALLINE DIAMOND LAYERS

  • DOI: 10.1515/mms-2016-0036
  • Link: https://doi.org/10.1515/mms-2016-0036
  • Department: Department of Microelectronics
  • Annotation:
    A high-temperature piezo-resistive nano-crystalline diamond strain sensor and wireless powering are presented in this paper. High-temperature sensors and electronic devices are required in harsh environments where the use of conventional electronic circuits is impractical or impossible. Piezo-resistive sensors based on nano-crystalline diamond layers were successfully designed, fabricated and tested. The fabricated sensors are able to operate at temperatures of up to 250°C with a reasonable sensitivity. The basic principles and applicability of wireless powering using the near magnetic field are also presented. The system is intended mainly for circuits demanding energy consumption, such as resistive sensors or devices that consist of discrete components. The paper is focused on the practical aspect and implementation of the wireless powering. The presented equations enable to fit the frequency to the optimal range and to maximize the energy and voltage transfer with respect to the coils’ properties, expected load and given geometry. The developed system uses both high-temperature active devices based on CMOS-SOI technology and strain sensors which can be wirelessly powered from a distance of up to several centimetres with the power consumption reaching hundreds of milliwatts at 200°C. The theoretical calculations are based on the general circuit theory and were performed in the software package Maple. The results were simulated in the Spice software and verified on a real sample of the measuring probe.

Gas Sensor Array with Composite Polymer Films

  • Department: Department of Microelectronics
  • Annotation:
    The aim of this paper is to present design of sensor array with composite polymer films as active layers for gas detection. Low power, four element flexible sensor platform with heater and temperature sensor was designed. The advantages of resistive sensors are easy fabrication, simple operation and low production cost. Composite polymer films exhibits good sensitivity to low concentrations of ammonia at room temperatures. Sensing of toxic gases is very important in many applications as automotive, defense, aerospace, agriculture, chemical industry, medicine, environmental, food and drink.

Power Structures for Radioelectronic Circuits

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: XXV. konference Radiokomunikace - Sborník přednášek. Pardubice: UNIT, 2015. pp. 219-234. ISBN 978-80-905345-6-8.
  • Year: 2015
  • Department: Department of Microelectronics
  • Annotation:
    Requirements for electronic applications from all directions in our lives lead to increasing demands on the properties of the electronic structure, especially marginal frequencies, increasing the electric power load improve heat dissipation, and thus related activity at higher temperatures. It turns out that the silicon structures after various adjustments are on the top its capabilities and in connection with the development of both new and previously known materials, working on the development of new electronic structures that would meet especially the above requirements. These requirements can be incorporated more demands on the geometric volume of these structures is the tendency of being reduced while maintaining or improving power transfer and operate at higher temperatures.

Pyroelectric nanogenerators

  • Department: Department of Microelectronics
  • Annotation:
    Pyroelectric nanogenerátor is a system capable of converting thermal energy into electricity using a pyroelectric nanostructured material. Typically, thermal EH systems utilizes thermoelectric principle, one is based on the Seebeck effect, the physical mechanisms leads to diffusion of charge carriers between the both ends of conductors, where is the temperature difference. The first pyroelectric nanogenerator was presented in 2012. It was designed and implemented as pyroelectric ZnO nanowire array as a core of nanogenerator for transforming dynamic thermal energy into electricity.

Quartz crystal microbalance gas sensor with nanocrystalline diamond sensitive layer

  • DOI: 10.1002/pssb.201552229
  • Link: https://doi.org/10.1002/pssb.201552229
  • Department: Department of Microelectronics
  • Annotation:
    Gas sensors based on a quartz crystal microbalance (QCM) coated with nanocrystalline diamond (NCD) were developed and tested on NH3, CO2, and humidity detection at room temperature and compared with the bare (uncoated) QCM. NCD films were directly grown on the QCM by a large-area pulsed linear-antenna microwave plasma CVD process from the CH4/CO2/H2 gas mixture at temperatures below 400 °C. The as-grown NCD films on QCM and reference Si substrates were characterized by scanning electron and atomic force microscopies as well as Raman and optical spectroscopies. The NCD-coated QCM gas sensors showed a reasonable performance with a stable repeatability to the tested gases. The response time of the tested diamond-coated sensor was fast (~5s). Moreover, we also observed higher sensitivity and better stability for NCD-coated QCM than for the bare QCM.

Spectrometer for Toxic Gases Detection with Pyroelectric Multispectral Detector

  • Department: Department of Microelectronics
  • Annotation:
    The aim of the paper is to present results of design spectrometer for toxic gases detection with pyroelectric multispectral detector. Sensing of toxic gases is very important in many applications. Automotive, defense, aerospace, agriculture, chemical industry, medicine, environmental, food and drink are many important markets for chemical and biological sensors. Principle of designed spectrometers is the interaction of the infrared radiation with studied gases. In the case of photon absorption, we are talking about infrared absorption spectroscopy. In our case, near-infrared spectrum is used.

Triboelectric logic circuits

  • Department: Department of Microelectronics
  • Annotation:
    The article deals with the use of triboelectric phenomenon in logical structures, where the electrical signal is not a control signal, the control signal is a non electric variable, typically force. The paper describes the working principle of triboelectric structure with the transfer of power to an electrical signal and the principle of creating a variety of logic circuits are compatible with CMOS logic circuits.

Triboelectric nanogenerators I

  • Department: Department of Microelectronics
  • Annotation:
    Triboelectric effect occurs when the mutual friction of different materials, electric charges are generated. The size and polarity of the charge depends on the materials used, their surface temperature, pressure and other parameters. Triboelectric effect can be applied when designing triboelectric nanogenerator. The paper describes four basic operating modes: a) vertical, b) horizontal sliding mode c) mode with one electrode, d) mode with free electrode.

Triboelectric nanogenerators wit lateral movement - II

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the triboelectric effect in the structures with a different mode of operation - lateral displacement with different layers (dielectric / dielectric, metal / dielectric). The article described structures, that utilize electrodes with dielectric and metal layers. The electric charge on the surface is formed with a contact parallel displacement. Regular alternating movement or rotational movement generates an AC output voltage and current to the load. The feed rate may be planar, cylindrical or rotary. There are two basic processes of friction, normal and lateral sliding contact.

Triboelectric nanogenerators: Applications - III

  • Department: Department of Microelectronics
  • Annotation:
    The article deals with the use of triboelectric phenomena in the structures with one electrode in lateral movement as well as contact separation modes. In the core of the paper are described the examples of the structures, that generates an electric charge on the surface when the contact separation or parallel displacement. The article also describes basic applications of triboelectric nanogenerator by the pressure monitoring, implementation of multi-touch pads, or chemical sensors.

ZnO nanogenerators

  • Department: Department of Microelectronics
  • Annotation:
    The article deals with the use of piezoelectricity in a nanotechnological realizations in nano-generators and self-powered nanosensors with a "Energy harvesting". In research and development we have been carried piezoelectric nano-generators, which can serve as a self-powered sources for micro / nanosystems. Nano-generator uses piezo-potential generated by the dynamic stress of piezoelectric nanofibers. Small mechanical stress can generate an output voltage of 20 V to 40 V in the integrated nano-generator. Electronics based on the basis of this mechanism is referred to as piezotronika. The article described lateral and vertical nano-wire integrated nanostructure with plenty of nanowires.

Characterization of Gas Sensor with Polyaniline Film

  • DOI: 10.1109/ASDAM.2014.6998678
  • Link: https://doi.org/10.1109/ASDAM.2014.6998678
  • Department: Department of Microelectronics
  • Annotation:
    The aim of the paper is to present results of design gas sensor with different form of polyaniline active layer for toxic gases detection. . Sensing of toxic gases is very important in many applications. Automotive, defence, aerospace, agriculture, chemical industry, medicine, environmental, food and drink are many important markets for chemical and biological sensors. The advantages of resistive sensors are easy fabrication, simple operation and low production cost. Using of polymer film causes that this sensor is not required heating of active layer. This leads to reduce power consumption. Active layer is operated at room temperature.

Comparison of Waffle and standard gate pattern base on specific onresistance

  • Authors: Vacula, P., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Electronic Devices and Systems IMAPS CS International Conference 2014. Brno: VUT v Brně, Fakulta elektrotechniky a komunikačních technologií, 2014. pp. 1226-1231. ISBN 978-80-214-4985-5.
  • Year: 2014
  • Department: Department of Microelectronics
  • Annotation:
    The main goal of this work is to compare the different Waffle MOS structures as function between main dimensions and channel resistance (specific on-resistance). Even if Waffle MOS structure is so general that it is independent on dedicated CMOS process in fact constrains coming from specific CMOS process design rules has main influence on final Waffle MOS shape and final required area. Comparison describing how dimensions of Waffle MOS have influence on channel resistance would be proposed. Due to non-conventional gate geometry of the Waffle MOS transistor compare to the fingers structure, the channel W/L ratio calculation is not trivial and conformal Schwarz-Christoffel Transformation mapping was used.

Determination of elastic properties of surface layers and coatings

  • Authors: Ševčík, M., prof. Ing. Miroslav Husák, CSc.,
  • Publication: 10th International Conference on Advanced Semiconductor Devices and Microsystems ASDAM 2014 Conference Proceedings. Bratislava: Slovak University of Technology in Bratislava, 2014. p. 69-72. ISSN 2475-2916. ISBN 978-1-4799-5475-9.
  • Year: 2014
  • DOI: 10.1109/ASDAM.2014.6998648
  • Link: https://doi.org/10.1109/ASDAM.2014.6998648
  • Department: Department of Microelectronics
  • Annotation:
    This paper shows determination of elastic constants of thin layers deposited on substrates. Resonant ultrasound spectroscopy is used to measure resonant spectras before and after layer deposition. These two spectra are compared and changes in the position of the resonant peaks are associated with layer properties. For thin layers either the elastic moduli or the surface mass density can be determined, providing the complementary information.

Fabrication of diamond based quartz crystal microbalance gas sensor

  • DOI: 10.4028/www.scientific.net/KEM.605.589
  • Link: https://doi.org/10.4028/www.scientific.net/KEM.605.589
  • Department: Department of Microelectronics
  • Annotation:
    Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications (sensors, heat sink, optical mirrors, cold cathode, tissue engineering, etc.). Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures (800-900 °C), what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a nanocrystalline diamond (NCD) growth from the H2/CH4/CO2 gas mixture at low temperature (400 °C) by pulsed linear antenna microwave plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia (NH3) at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor.

FEM Simulation of Beam Structures for Piezoelectric Microgenerators

  • Department: Department of Microelectronics
  • Annotation:
    The paper presents the simulation of beam structures for piezoelectric microgenerators. Beam structures have various applications in MEMS, including bi-stable switch design and also residual stress measurement. Such structure has two stable states switchable by appropriate level of force or acceleration. The main advantage of using the bi-stable structures for constructing the piezoelectric power microgenerator lies in broad band frequency operation (the structure can switch to the other stable state at arbitrary frequency when appropriate level of actuating force or acceleration is applied) and generated voltage is higher due to higher stresses in the beam during switching. The paper is aimed to make precise models of multifrequency and bi-stable microstructures. Piezoelectric energy harvesters exploiting strong mechanical nonlinearities exhibit intrinsic suitability for one of several modern challenges in vibratory energy harvesting: consistent kinetic performance in the presence of broadband environmental excitation. Design of such structures in terms of potential well shaping, dimensions and optimal electromechanical coupling is very complex and highly non-linear problem with lack of analytical solutions. Utilizing the software packages of CoventorWare enable creation of precise 3D models and help with simulation of non-linear behavior of resonant multifrequency and bi-stable structures.

FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications

  • DOI: 10.4028/www.scientific.net/KEM.605.569
  • Link: https://doi.org/10.4028/www.scientific.net/KEM.605.569
  • Department: Department of Microelectronics
  • Annotation:
    The objective of this paper is to present simulation results of the Thickness Shear Mode (TSM) resonator based on quartz using finite element simulation method. 3D model of quartz resonator and simulations were completed using finite element method in CoventorWare software suite for design and simulation of MEMS devices. Different techniques for simulation of adsorption effect on selective layer were studied: influence of change in mass of the sensitive layer and influence of change in density of the sensitive layer. Analyses of resonant modes were performed for both cases and displacement profiles in selected modes were determined for the resonator under study. Impedance and phase characteristics were calculated and measured for clean sample and sample with selective layer coated. The adsorption model calculates the frequency shift in basic resonant frequency with adsorbed amount of sensed gas. The simulation results were used in design of gas sensors for dangerous substances detection.

Micro-generators of electrical energy with thermoelectric principle

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the principles and applications of the thermoelectric effect, use for Energy harvesting power supply systems. There are described examples of different applications, the development and construction of the nanogenerators, examples of commercial products are shown.

Micro-generators with using RF energy

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the principles and applications of the RF energy, use for Energy harvesting power supply systems. There are described examples of different applications, integrated circuits and construction of the power supply, examples of commercial products are shown.

New electronic structures and materials

  • Department: Department of Microelectronics
  • Annotation:
    The article solves the development of electronic structures, increasing the achievable power loads and max frequencies, increasing energy efficiency, operating temperature, reducing supply voltages. The article describes novel methods for power supply suitable not only in connection with the sensor networks, wireless power supply using ambient energy, including RF energy. These options are related to the development of new electronic structures and circuits with reduced power supply voltage and power, application of the dimension reducing of electronic components. Interdisciplinary integration brings great importance.

Piezoelectric micro and nanogenerators

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the principles and applications of the piezoelectric systems, use for Energy harvesting power supply systems. There are described examples of applications in medicine, the development and construction of the nanogenerators, briefly mention of triboelectrical generators.

Power supply management of piezoelectric micro-generators

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the principles and applications of the piezoelectric effect, micro-power supply management, circuit connections. There are described examples of different applications, the development and construction of the micro-power supply, examples of commercial products are shown.

Power supply management of thermoelectric micro-generators II

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the principles and other applications of the thermoelectric effect, micro-power supply management, circuit connections. There are described examples of different applications, the development and construction of the micro-power supply, examples of commercial products are shown.

Power supply management of thermopelectric micro-generators

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the principles and applications of the thermoelectric effect, micro-power supply management, circuit connections. There are described examples of different applications, the development and construction of the micro-power supply, examples of commercial products are shown.

Quality Water Analyzer

  • Authors: prof. Ing. Miroslav Husák, CSc., Ing. Pavel Kulha, Ph.D., Nepras, S.
  • Publication: 10th International Conference on Advanced Semiconductor Devices and Microsystems ASDAM 2014 Conference Proceedings. Bratislava: Slovak University of Technology in Bratislava, 2014. p. 209-212. ISSN 2475-2916. ISBN 978-1-4799-5475-9.
  • Year: 2014
  • DOI: 10.1109/ASDAM.2014.6998680
  • Link: https://doi.org/10.1109/ASDAM.2014.6998680
  • Department: Department of Microelectronics
  • Annotation:
    The core of the article deals with the principles of analysis of pollutants in water by molecular absorption spectrometry. The spectrometer is used for analysis. Design and implementation of software for the evaluation of water analysis is part of the work. The software is designed with ease of use and retrieval of data. Analysis of water is mainly focused on nitrates. The detection is focused on determining levels of particular components, suitable algorithm recognizes the substance. The method with the exchange of energy between radiation and the material under investigation (the spectrometric method) is used in the work. The energy exchange is the absorption or emission of radiation.

SPECIAL PURPOSE OSCILLATORS

  • Authors: Foit, J., prof. Ing. Miroslav Husák, CSc.,
  • Publication: 10th International Conference on Advanced Semiconductor Devices and Microsystems ASDAM 2014 Conference Proceedings. Bratislava: Slovak University of Technology in Bratislava, 2014. p. 177-180. ISSN 2475-2916. ISBN 978-1-4799-5475-9.
  • Year: 2014
  • DOI: 10.1109/ASDAM.2014.6998673
  • Link: https://doi.org/10.1109/ASDAM.2014.6998673
  • Department: Department of Microelectronics
  • Annotation:
    In many sensor applications, the frequency variations of signals generated as sustained oscillations are used as a measure of the tracked non-electrical quantity. The variations of oscillation frequency are usually obtained by some mechanism influencing the imaginary parts of impedances constituting a resonant circuit, electrical or some electro-mechanical equivalent. Unfortunately, in all these cases, real parts of the resonant circuit are varied as well, frequently to a quite considerable degree, meaning that in real operation the dynamic impedance of the resonator varies notably. As a result, it is rather difficult to keep the oscillations-generating circuit (i.e., oscillator) operating in optimum mode. In this connection, the optimum operating mode is defined as the state in which the condition for sustained self-oscillation is just fulfilled, without overdriving any of the active and passive devices involved. This paper discusses methods for solving this problem.

Spectrometer for Toxic Gases Detection with MEMS Detector

  • Department: Department of Microelectronics
  • Annotation:
    The aim of the paper is to present results of design spectrometer for toxic gases detection with MEMS sensor. Automotive, defense, aerospace, agriculture, chemical industry, medicine, environmental, food and drink are many important markets for chemical and biological sensors. Sensing of toxic gases is very important in many applications. Principle of designed spectrometers is the interaction of the infrared radiation with studied gases. In the case of photon absorption, we are taking about infrared absorption spectroscopy. In our case, near-infrared spectrum is used.

Translator with Magnetic Levitation

  • Authors: Puci, F., prof. Ing. Miroslav Husák, CSc.,
  • Publication: 10th International Conference on Advanced Semiconductor Devices and Microsystems ASDAM 2014 Conference Proceedings. Bratislava: Slovak University of Technology in Bratislava, 2014. p. 213-216. ISSN 2475-2916. ISBN 978-1-4799-5475-9.
  • Year: 2014
  • DOI: 10.1109/ASDAM.2014.6998681
  • Link: https://doi.org/10.1109/ASDAM.2014.6998681
  • Department: Department of Microelectronics
  • Annotation:
    The paper describes magnetically levitated planar actuator with moving magnets. The translator part is represented by a disc permanent magnet or a uniform shaped object fulfilling specific requirements, so that it can provide sufficient control force against the lateral forces and the gravity force of the carrier. The stator platform is represented by 16 identical coils and a microcontroller board for precise coordination of the translator. The coil currents are controlled by PWM signals, in such a way, so together would form a homogenous magnetic field slightly above the planar surface of the coil array. As only the coils can produce significant force and torque, the current through them is switched during the movements of the translator. The system fulfils all the design requirements and its functionality was verified in the laboratory.

3D Energy Harvester Evaluation

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the characterization and evaluation of an MEMS based electrostatic generator, a part of the power supply unit of the self-powered microsystem. The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor. The structure is designed and modeled as three-dimensional silicon based MEMS. With innovative approach we reached a very low resonant frequency f the structure (about 100Hz.) The modified long cantilever spring design with minimum area of the chip, its ability to work in 3D mode, and the ability to be tuned to reach desired parameters, proves promising directions of possible further development.

Autonomous micropower supply with piezo principle

  • Department: Department of Microelectronics
  • Annotation:
    The piezoelectric principle is very frequently used physical phenomenon for implementation of sensors, actuators or for generating electric energy in the form of autonomous mikrozdrojů type Energy harvesting (EH) . The phenomenon of conversion of mechanical stresses using a suitable type and shape of the piezoelectric material to electrical energy. The applied mechanical energy can be triggered by vibration, pressure , tension, bending , respectively . other mechanisms . During mechanical deformation of materials generated on the surface electric charge which is then " stored " , and uses the power of the relevant integrated circuits . Piezoelectricity is in terms of use in EH very promising and therefore constantly developing new designs and applications of these EH generators. This fact also contributes to the fact that the currently available number of piezoelectric materials used for the construction of sensors and actuators. Apart from naturally occurring materials ( crystalline silica ) is used as the polycrystalline ceramic more generally available piezoelectric material . Very frequently used material based on solid solutions of lead oxide , zirconium and titanium , i.e. lead zirconate titanate (PZT ) . The material has a high conversion efficiency of mechanical to electrical energy. For anisotropic properties , the conversion of the energy of piezoelectric materials varies depending on the direction of the force and orientation of the polarization of the electrodes

Autonomous micropower supply with piezo principle II

  • Department: Department of Microelectronics
  • Annotation:
    This article briefly describes the basic principle of the piezoelectric generator, the basic constants defined, materials and structures used in the first two piezoelectric micro-generator of electric energy (piezoelectric generators using impact energy and piezoelectric generators with composite structures). The article mentions other types of structures used for piezoelectric generators, a brief assessment of their properties and introduces examples of commercially available structures.

Autonomous power supply with electromagnetic principle

  • Department: Department of Microelectronics
  • Annotation:
    Electromagnetic principle is another physical phenomenon utilized in generating electricity. It is a conversion of mechanical vibrations into electrical energy using damping energy and magnetic field. Electromagnetic systems for generating electrical energy from the environment using a seismic vibrating mass connected to microcoil moving in a magnetic field of the permanent magnet. The advantage of electromagnetic generators is that they are closed and they can be protected from the external environment, are reliable, have low mechanical damping. The disadvantage of the electromagnetic generator is a relatively large volume, very difficult to integrate with MEMS technology and a very small voltage obtained.

Design methodologies for reliability of SSL LED boards

  • DOI: 10.1016/j.microrel.2013.02.017
  • Link: https://doi.org/10.1016/j.microrel.2013.02.017
  • Department: Department of Microelectronics
  • Annotation:
    This work presents a comparison of various LED board technologies from thermal, mechanical and reliability point of view provided by an accurate 3-D modelling. LED boards are proposed as a possible technology replacement of FR4 LED boards used in 400 lumen retrofit SSL lamps. Presented design methodology can be used for other high power SSL lamp designs. The performance of new LED board designs were evaluated by numerical modeling. Modeling methodology was proven by measurement on reference FR4 LED board. Thermal performance was compared by extracting of LED boards thermal resistances and thermal stress has been inspected considering the widest temperature operating range according to standards (-40 to +125 °C). Thermo-mechanical and reliability analysis have been performed to study parameters of each LED board technology, using thermal boundary conditions extracted from the thermal simulation of a whole LED lamp. Elastic-plastic analysis with temperature dependent stress-strain material properties has been performed. The objective of the work is to optimize not only the thermal management by thermal simulation of LED boards, but also to find potential problems from mechanical failure point of view and to present a methodology to design SSL LED boards for reliability

Designing the 3D Electrostatic Microgenerator

  • DOI: 10.1016/j.elstat.2012.11.032
  • Link: https://doi.org/10.1016/j.elstat.2012.11.032
  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the design and simulation of a 3D electrostatic generator, one part of power supply component of the self-powered microsystem [1], which is able to provide enough energy to power up smart sensor chains. In this case the most suitable method to gather enough electrical energy is so-called energy harvesting principle [2] and [3]. The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor [4]. The structure is designed and modeled as three-dimensional silicon based MEMS. Innovative approach involving the achievement of very low resonant frequency of the structure (around 100 Hz) using the modified long cantilever design, minimal area of the chip, the ability to work in all 3 axes of coordinate system and the ability to be tuned to reach desired parameters shows further development.

Evaluating the 3D Energy Harvester

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the characterization and evaluation of an MEMS based electrostatic generator, a part of the power supply unit of the self-powered microsystem. The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor. The structure is designed and modeled as three-dimensional silicon based MEMS. With innovative approach we reached a very low resonant frequency of the structure (about 100Hz.) The modified long cantilever spring design with minimum area of the chip, its ability to work in 3D mode, and the ability to be tuned to reach desired parameters, proves promising directions of possible further development.

Microelectronic power supplies from environment energy - Energy harvesting

  • Department: Department of Microelectronics
  • Annotation:
    Getting supply energy for various microsystems and smart sensor systems is currently paid a lot of attention in research . Modern microelectronic devices enable a significant reduction in power consumption and supply voltage , this leads to the fact that in many cases , the devices may be battery powered , and certainly not from the network. There are currently used in practice various technologies for obtaining electric energy from the wind , wave , piezoelectric principle , the thermoelectric principle , mechanical movement , etc. For some time thus obtained power is used to power wireless sensor nodes designed for autonomous monitoring oceanographic applications waves. In addition to the best-known sources of energy working on the principle of photovoltaic cells for small power requirements , there are also other principles surrounding the conversion of physical energy into electrical energy . For these systems has become common labeling " Energy harvesting " , literally translated as " energy harvesting " . Physical environment (wind , ocean waves , solar radiation , magnetism, mechanical movement , etc. ) is basically a reservoir of energy .

Power Supply Technology of Sensor Nodes

  • Department: Department of Microelectronics
  • Annotation:
    Wireless sensor networks are currently a very important technology already used in many areas. It turns out that the weak link in these systems is the supply of electricity with the requirements of the nature of wireless networks. On the market there are several wireless platforms with low power consumption . Almost all of these platforms are designed for battery operation , but where batteries have a limited life span and it is not always possible to replace them . To improve efficiency of wireless sensor networks require batteries used in addition to alternative energy sources . By using suitable types can in many cases significantly extend the operation of systems , theoretically infinitely long , really much compared to the battery life.

Room temperature gas sensor with polymer film

  • Department: Department of Microelectronics
  • Annotation:
    The aim of the paper is to present results of design ammonia sensor. Automotive, defense, aerospace, agriculture, chemical industry, medicine, environmental, food and drink are many important markets for chemical and biological sensors. The advantages of resistive sensors are easy fabrication, simple operation and low production cost. Ammonia is used in many technical applications, therefore it is widely used hazardous chemical. Sensing of gaseous ammonia is very important in many applications. Using of polymer film causes that this sensor is not required high heating of active layer.

Use of electrostatic principle for autonomous power supply - Energy harvesting

  • Department: Department of Microelectronics
  • Annotation:
    Electrostatic principles conversion uses a variable capacitance achieved by changing the geometry of the electrodes due to mechanical shocks. The advantage of this conversion is compatible with the technology of production of integrated circuits and very low loss MEMS capacitors. The complexity of the conversion process, however, is small, the density of the energy generated is relatively small, the obtained voltage is relatively large in comparison with the electromagnetic and piezoelectric principle, the geometrical dimensions of the system are very small, and therefore this principle is suitable for integration into MEMS systems.

Waffle MOS channel aspect ratio calculation with Schwarz-Christoffel transformation

  • Department: Department of Microelectronics
  • Annotation:
    The main goal of this work is to describe alternative way of effective channel width to length (W/L) ratio calculation for Waffle MOS structure. Due to non-conventional gate geometry of the Waffle MOS transistor compare to the fingers structure, the channel W/L ratio calculation is not trivial and conformal mapping can be used. In terms of mapping the Schwarz-Christoffel (SC) Transformation is proposed. The optimal element shape of the Waffle MOS is proposed, to be easy solved by SC conformal mapping. Because result of the conformal mapping for the Waffle MOS element is rectangle shape in transformed domain, the solving of the effective channel W/L ratio of the element is become very easy because it is aspect ratio of rectangle in transformed domain.

WAFFLE MOS CHANNEL W/L CALCULATION WITH SCHWARZ-CHRISTOFFEL TRANSFORMATION

  • Authors: Vacula, P., Michal, V., Thomas, M., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings - Electronic Devices and Systems - EDS '13. Brno: VUT v Brně, Fakulta elektrotechniky a komunikačních technologií, 2013. ISBN 9788021447547.
  • Year: 2013
  • Department: Department of Microelectronics
  • Annotation:
    The main goal of this work is to describe alternative way of effective channel width to length (W/L) ratio calculation for Waffle MOS structure. Due to non-conventional gate geometry of the Waffle MOS transistor compare to the fingers structure, the channel W/L ratio calculation is not trivial and conformal mapping can be used. In terms of mapping the Schwarz-Christoffel Transformation is proposed. The optimal element shape of the Waffle MOS is proposed, to be easy solved by SC conformal mapping. Because result of the conformal mapping for the Waffle MOS element is rectangle shape in transformed domain, the solving of the effective channel W/L ratio of the element is become very easy because it is aspect ratio of rectangle in transformed domain.

3D electrostatic energy harvester

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the design of an electrostatic generator, power supply component of the self-powered microsystem, which is able to provide enough energy to power smart sensor chains or if necessary also other electronic monitoring devices. One of the requirements for mis analyzer is the mobility, so designing the power supply expects use of an alternative way of getting electricity to power the device, rather than rely on periodic supply of external energy in the form of charging batteries, etc. In this case the most suitable method to use is so-called energy harvesting - a way how to gather energy. This uses the principle of non-electric conversion of energy into electrical energy in the form of converters. The present study describes the topology design of such structures of electrostatic generator. Structure is designed and modeled as a three-dimensional silicon based MEMS. Innovative approach involving the achievement of very low resonant frequency of the structure, while the minimum area of the chip, the ability to work in all 3 axes of coordinate system and ability to be tuned to reach desired parameters proves promising directions of possible further development of this issue. The work includes simulation of electro-mechanical and electrical properties of the structure, description of its behavior in different operating modes and phases of activity. Simulation results were compared with measured values of the produced prototype chip. These results can suggest possible modifications to the proposed structure for further optimization and application environment adaptation.

3D Electrostatic Microgenerator

  • DOI: 10.1109/ESimE.2012.6191734
  • Link: https://doi.org/10.1109/ESimE.2012.6191734
  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the design of an electrostatic generator, power supply component of the self-powered microsystem, which is able to provide enough energy to power smart sensor chains or if necessary also other electronic monitoring devices. One of the requirements for this analyzer is the mobility, so designing the power supply expects use of an alternative way of getting electricity to power the device, rather than rely on periodic supply of external energy in the form of charging batteries, etc. In this case the most suitable method to use is so-called energy harvesting - a way how to gather energy. This uses the principle of non-electric conversion of energy into electrical energy in the form of converters.

Access Control Systems (1)

  • Department: Department of Microelectronics
  • Annotation:
    This is a relatively large area of security systems with the task of monitoring the movement of people and goods, event. and other entities, such as mobile technology. The systems are designed to protect against penetration by unauthorized entities, control of movement within the system and, of course, protection against information leakage and data.

Access Control Systems (2)

  • Department: Department of Microelectronics
  • Annotation:
    Is a relatively new method of identification of RFID in the UHF band. It is used mainly in industrial applications, logistics, warehouse management, building management, etc. In general, wherever there is a need for a large distance, typically drive up to tens of meters, identify objects. Sensors for UHF RFID work in the bands 865-956 MHz (exceptionally 2.4 GHz), and some allow you to connect external antennas (dual polarization) and have a wide range of communication interface (Wiegand, RS-485 232, Ethernet).

Access Control Systems (3)

  • Department: Department of Microelectronics
  • Annotation:
    It is a concept used in larger systems, is composed of large number of access points, controllers, and control workstation (PC). The most commonly used bus or star topology, with a central element in the form of exchange (main control unit) or PC, which is used for the verification of access rights, time filter, etc. In the case of bus topology, all access points connected by bus (most RS-485) and connected to the control panel or via the access system bus interface directly to a PC. Star topology represents the interconnection of access points wired Ethernet network.

Access Control Systems (4)

  • Department: Department of Microelectronics
  • Annotation:
    Electromechanical and electromotive locks and openers may be the state in which they are in the voltage, divided into two versions. Common (called fail-safe, energized are released after disconnecting power supply is blocked). Reverse (so-called fail-safe, energized blocked, disconnecting power is released)

Acoustic Wave Sensor System Design Consideration

  • DOI: 10.1109/ASDAM.2012.6418534
  • Link: https://doi.org/10.1109/ASDAM.2012.6418534
  • Department: Department of Microelectronics
  • Annotation:
    We present the development and considerations of simple acoustic wave chemical sensors. These sensors can be used for identifying environmental contaminants in large applications scale. Various finite element models of a Acoustic Wave sensors are developed using CoventorWare and 3D analysis is performed on the devices to study the acoustic wave propagation and characterize the device. The effects of the various interdigital transducers (IDT) design; intermediate layer on the propagation characteristics is also investigated.

Architecture and platform of sensor nodes

  • Department: Department of Microelectronics
  • Annotation:
    The project was established at UC Berkeley in 1997. The project should take advantage of advances in microelectronics and wireless communications. Low power computer with a capacity of about 1 mm3 is used in the project. The cubic millimeter ot the Mote contains batteries, two-way communication, digital logic circuits and sensors. The project was called Smart Dust.

Biomedical sensors for monitoring of breathing

  • Department: Department of Microelectronics
  • Annotation:
    The respiration belongs among basic vital functions and the knowledge of their parameters and quality is necessary in medicine. The research is leading to the methods, which are inconvenienced patients. These methods are important for monitoring respiration towards observation quality sleeping or The Sudden Infant Death Syndrome (SIDS). This paper contains an overview of the methods for the respiration monitoring used not only in practice of medicine but till now developed.

Bistable system for energy harvesting

  • Authors: Majer, M., prof. Ing. Miroslav Husák, CSc.,
  • Publication: ASDAM 2012. Bratislava: STU v Bratislave, FEI, 2012. p. 311-314. ISBN 978-1-4673-1195-3.
  • Year: 2012
  • DOI: 10.1109/ASDAM.2012.6418535
  • Link: https://doi.org/10.1109/ASDAM.2012.6418535
  • Department: Department of Microelectronics
  • Annotation:
    Bistable piezoelectric model of energy harvesting structure. This system can generate higher power in wide frequency band in contrast to resonant monostable structures. The paper presents measuring of transition, and monostable and bistable behavior of loaded buckled beam. Measured generator was created from commercially available components. The measurement compares the monostable and bistable behavior.

Communication and Powering Scheme for Wireless and Battery-Less Measurement

  • Department: Department of Microelectronics
  • Annotation:
    The paper presents solution for wireless and battery-less measurement in the enclosed areas. The principle is based on passive RFID; nevertheless this paper is focused on high power-demanding applications such as MEMS accelerometers, gas sensors, piezoresistive strain gauges, etc. Standard RFID communication scheme (sensing the input current change on the primary side) cannot be used in this case, because the communication channel is overloaded by the high power load. Paper presents possible solution which is based on the dual frequency scheme - one frequency for powering and other for the communication. This is ensuring capability for measurement up to several centimeters on the frequency bands 125 kHz and 375 kHz. It can be suitable for continual measurement in isolated systems such as the rotating objects, concrete walls, enclosed plastic barrels, high temperature chambers etc.

Compatibility between the LED systems and dimming devices

  • Department: Department of Microelectronics
  • Annotation:
    The paper summarizes basic problems of dimming compatibility of modern LED lamps with the legacy dimming infrastructure. In 2016 the legacy incandescent bulbs are going to be forbidden on the European market and thus it must be replaced by modern and energy efficient solid state lighting. The problems with dimming compatibility appeared. Standards phase-cutting dimmers are widely used in the households and consumers expect the modern lighting to have the same properties as the incandescent bulbs. The legacy dimmers are designed for some minimal load (usually 40 - 60 W) while the modern LED lamps replacements have only about 12 W keeping the 60 W incandescent bulb luminous flux (800 lm). Several different problems must be solved in order to keep the dimming ability, avoid the light flickering and keep the dimmer in the safe operation region. There are two basic dimmer types. The leading edge dimmers that are usually based on triac switch and trailing edge dimmers that use MOSFET switches and electronic control. Both types have its specific demands and need different approach for ensuring the dimming compatibility. New LED driver must be developed in order to be compatible with the legacy dimmers.

Design and Fabrication of 3D Electrostatic Energy Harvester

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the design of an electrostatic generator, power supply component of the self-powered microsystem, which is able to provide enough energy to power smart sensor chains or if necessary also other electronic monitoring devices. One of the requirements for this analyzer is the mobility, so designing the power supply expects use of an alternative way of getting electricity to power the device, rather than rely on periodic supply of external energy in the form of charging batteries, etc. In this case the most suitable method to use is so-called energy harvesting - a way how to gather energy. This uses the principle of non-electric conversion of energy into electrical energy in the form of converters. The present study describes the topology design of such structures of electrostatic generator. Structure is designed and modeled as a three-dimensional silicon based MEMS. Innovative approach involving the achievement of very low resonant frequency of the structure, while the minimum area of the chip, the ability to work in all 3 axes of coordinate system and ability to be tuned to reach desired parameters proves promising directions of possible further development of this issue. The work includes simulation of electro-mechanical and electrical properties of the structure, description of its behavior in different operating modes and phases of activity. Simulation results were compared with measured values of the produced prototype chip. These results can suggest possible modifications to the proposed structure for further optimization and application environment adaptation.

Design and Fabrication of Piezoelectric Generator with Thin ZNO Layer

  • Department: Department of Microelectronics
  • Annotation:
    The paper presents design methodology and fabrication process of piezoelectric generator with thin-film Zinc Oxide (ZnO) layer. The design methodology utilizing FEM simulations is presented. Modeling and simulation of mechanical stresses, resonant frequencies, vibration modes and magnitude of generated voltage is virtually essential for any design of MEMS energy harvesting structures. CoventorWare software package was used as a very strong tool in the structure design. Simulation results opens the possibility for optimization of shape and position of the piezoelectric elements on the deformation transducer to achieve the maximum sensitivity and performance.

Design And Fabrication Of Piezoresistive Strain Gauges Based On Nanocrystalline Diamond Layers

  • DOI: 10.1016/j.vacuum.2011.07.022
  • Link: https://doi.org/10.1016/j.vacuum.2011.07.022
  • Department: Department of Microelectronics
  • Annotation:
    The paper reports on design, fabrication and characterization of piezoresistive sensors based on boron doped nanocrystalline diamond (NCD) layers. The shape and position of the piezoresistive element was optimized using finite element 3D modeling. Mechanical and piezoresistive simulations were performed. The piezoresistive sensing boron doped diamond thin films were realized on SiO2/Si3N4/Si substrates by microwave plasma enhanced chemical vapor deposition (CVD) and the piezoresistive structures were formed by reactive ion etching. The extensive study of sensor parameters e.g. deformation sensitivity, edge and contact resistances, temperature dependences gauge factor, temperature coefficient of resistance and bridge output voltage was performed.

Design and life time evaluation of various LED boards for SSL lamp

  • Authors: prof. Ing. Jiří Jakovenko, Ph.D., Formánek, J., Werkhoven, R., Kunen, J., Bancken, P., Bolt, P. J., Molata, V., Kotě, V., Nápravník, T., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of Electronic Devices and Systems EDS 2012. Brno: VUT v Brně, FEKT, 2012. pp. 161-166. ISBN 978-80-214-4539-0.
  • Year: 2012
  • Department: Department of Microelectronics
  • Annotation:
    Main role of each LED board is to transport heat from LED die to heat sink and keep the thermal stresses in all layers as low as possible. Thermal stress has been studied for wide temperature range that can affect the LED boards (-40 to +125oC). Thermal stress cycles that can lead to the LED board failure have been calculated. Simulations have been completed with ANSYS structural analysis where temperature dependent stress-strain material properties have been taken into account.

Dimming Compatibility of 60W Replacement LED Lamps with Legacy Dimming Infrastructure

  • Department: Department of Microelectronics
  • Annotation:
    The paper summarizes basic problems of dimming compatibility of modern LED lamps with the legacy dimming infrastructure. In 2016 the legacy incandescent bulbs are going to be forbidden on the European market and thus it must be replaced by modern and energy efficient solid state lighting. The problems with dimming compatibility appeared. Standards phase-cutting dimmers are widely used in the households and consumers expect the modern lighting to have the same properties as the incandescent bulbs. The legacy dimmers are designed for some minimal load (usually 40 - 60 W) while the modern LED lamps replacements have only about 12 W keeping the 60 W incandescent bulb luminous flux (800 lm). Several different problems must be solved in order to keep the dimming ability, avoid the light flickering and keep the dimmer in the safe operation region. There are two basic dimmer types. The leading edge dimmers that are usually based on triac switch and trailing edge dimmers that use MOSFET switches and electronic control. Both types have its specific demands and need different approach for ensuring the dimming compatibility. New LED driver must be developed in order to be compatible with the legacy dimmers.

Dimming Compatibility of 60W Replacement LED Lamps with Legacy Dimming Infrastructure

  • Department: Department of Microelectronics
  • Annotation:
    The paper summarizes basic problems of dimming compatibility of modern LED lamps with the legacy dimming infrastructure. In 2016 the legacy incandescent bulbs are going to be forbidden on the European market and thus it must be replaced by modern and energy efficient solid state lighting. The problems with dimming compatibility appeared. Standards phase-cutting dimmers are widely used in the households and consumers expect the modern lighting to have the same properties as the incandescent bulbs. The legacy dimmers are designed for some minimal load (usually 40 - 60 W) while the modern LED lamps replacements have only about 12 W keeping the 60 W incandescent bulb luminous flux (800 lm). Several different problems must be solved in order to keep the dimming ability, avoid the light flickering and keep the dimmer in the safe operation region. There are two basic dimmer types. The leading edge dimmers that are usually based on triac switch and trailing edge dimmers that use MOSFET switches and electronic control. Both types have its specific demands and need different approach for ensuring the dimming compatibility. New LED driver must be developed in order to be compatible with the legacy dimmers.

Dimming Compatibility of LED lamps with legacy dimmers

  • Department: Department of Microelectronics
  • Annotation:
    The paper summarizes basic problems with dimming compatibility of modern LED lamps using the legacy dimming infrastructure. Standards phase-cutting dimmers are widely used in the households and consumers expect the modern lightning to have the same properties as the incandescent bulbs. Presented work was made within the project CSSL (Consumerizing Solid State Lighting) which is aimed on development of a new affordable LED lightning to be equivalent to the 60 W incandescent bulbs.

Energy Harvester Working in 3D Mode

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the design (Fig. 1) and simulation of an electrostatic generator, one part of power supply component of the self-powered microsystem, which is able to provide enough energy to power up smart sensor chains. In this case the most suitable method to gather enough electrical energy is so-called energy harvesting principle [1,2]. The designed generator is based on electrostatic converter and uses the principle of conversion of nonelectric energy into electrical energy by periodical modification of gap between electrodes of a capacitor [3]. The structure is designed and modeled as three-dimensional silicon based MEMS. Innovative approach involving the achievement of very low resonant frequency of the structure (about 100Hz) by usage of modified long cantilever spring design, while keeping the minimum area of the chip, the ability to work in all 3 axes of coordinate system and ability to be tuned to reach desired parameters proves promising directions of possible further development of this issue. The paper includes several layout modification descriptions, which leads to optimization of the desired parameters, simulation of electro-mechanical and electrical properties of the structure (Fig. 2), modeling of modal frequencies modes, description of its behavior in different operating modes and phases of activity. The designed structure is able to work in all three axis using first three modal resonant modes, which brings more efficiency into energy harvesting process. A simple mechanical in-build security stoppers protects the moving structure against the damage. The developed MEMS chip has been produced (Fig. 3) by TRONICS H.A.R.M. Process and the active area occupies only 16 mm2. The calculated output energy is about 0.5 μW. Simulation results were compared with measured values of the produced prototype chip.

Gas sensor with SAW structures

  • Department: Department of Microelectronics
  • Annotation:
    This work describes basic concept of chemical sensors based on surface acoustic wave (SAW). The aim is to depict basic physical concept and simulation rough draft for mis type of sensors. By integrating a SAW measurement platform with a selective sensing layer, a desired chemical microsensor is constructed, which provides some of the functionality of an analytical instrument, but with extraordinary reduced cost, size, and power consumption. The objective of this paper is presents gas sensors based on one-port and two-port interdigitated metal structures. The impulse response model is used for determination of IDT parameters and first order investigation, the transient analysis is performed on the devices to study the acoustic wave propagation and characterize the device in time and frequency domain. The effects of the various interdigital transducer (IDT) design, intermediate layer thickness and chemical sensitivity structure on the propagation characteristics is also investigated. Also, we present some results obtained from the device using automated measurement system for SAW oscillator frequency measurement.

High Power Solid State Retrofit Lamp Thermal Characterization and Modelling

  • Department: Department of Microelectronics
  • Annotation:
    Thermal and thermo-mechanical modelling and characterization of solid state lightening (SSL) retrofit LED Lamp are presented in this paper. Paramount importance is to design SSL lamps for reliability, in which thermal and thermo-mechanical aspects are key points. The main goal is to get a precise 3D thermal lamp model for further thermal optimization. Simulations are performed with ANSYS and CoventorWare software tools to compere different simulation approaches. Modelled thermal distribution has been validated with thermal measurement on a commercial 8W LED lamp. Materials parametric study has been carried out to discover problematic parts for heat transfer from power LEDs to ambient and future solutions are proposed. The objectives are to predict the thermal management by modelling of LED lamp, get more understanding in the effect of lamp shape and used materials in order to design more effective LED lamps and predict light quality, life time and reliability

Keys Replacing Iris and Wireless Technology

  • Department: Department of Microelectronics
  • Annotation:
    Walking into a door, and you forgot your keys and you know the formula "Sesame Street"? Never mind. On arrival to the door you are recognized by a camera system using basic facial lines compared with the model stored in memory or by reading the iris of the eye, and the doors open by themselves, without the keys.

Microelectronics head towards nanoelectronics - Grafen integrated circuits, capacitors, batteries, displays and other nanoelectronic components

  • Department: Department of Microelectronics
  • Annotation:
    Grafen is due to its electrical and mechanical properties destined for wide applications from amplifiers to the sensors. Some possible applications are expected to develop significant

Microelectronics v Czech Republic

  • Department: Department of Microelectronics
  • Annotation:
    Department of Microelectronics organized workshop "Microelectronics 2012 in the cooperation with CzechInvest company. The six companies participated in the workshop. Progressive trends in electronics have been shown. The latest technology and products have been shown at the workshop. The products of these companies can be included to the best in the world.

Microsensor technologies for intelligent sensor networks

  • Department: Department of Microelectronics
  • Annotation:
    Multisensor systems and sensor networks are new concepts. The terms have expanded with the development of sensor technology, especially with the development of second generation sensors. The second generation ones use new materials for sensors, integration (reducing size and weight), the development of technology transfer and processing of sensor data, minimize power, etc.

Modeling and simulation of surface acoustic wave chemical sensors

  • Department: Department of Microelectronics
  • Annotation:
    In this paper, we present the design and modeling considerations of SAW (Surface Acoustic Wave) chemical sensors based on various structures. These sensors can be used for identifying environmental contaminants in large applications scale. Various finite element models of a Surface Acoustic Wave sensors are developed using CoventorWare and 3D analysis is performed on the devices to study the acoustic wave propagation and characterize the device. The effects of the various interdigital transducer (IDT) design, intermediate layer on the propagation characteristics is also investigated. Also, we present some results obtained from the device. Results indicate that with increasing the gas concentration the wave velocity decreases and the attenuation of the wave is reduced.

Monitoring of breathing by bioacoustic method

  • Department: Department of Microelectronics
  • Annotation:
    This paper describes a method of the breathing detection based on the sensing of acoustic signals in trachea. Parameters of the breathing, detection inspiration and expiration and apnoea pause are possible to determine from these signals. This method is simple and easy to use, portable and provides an accurate measurement and seems to be well suited for use as a modern breathing monitor. Monitoring of Respiration is important for monitoring respiration towards observation quality sleeping or The Sudden Infant Death Syndrome (SIDS).

Monitoring of breathing by bioacoustic method

  • Department: Department of Microelectronics
  • Annotation:
    This paper describes a method of the breathing detection based on the sensing of acoustic signals in trachea. Parameters of the breathing, detection inspiration and expiration and apnoea pause are possible to determine from these signals. This method is simple and easy to use, portable and provides an accurate measurement and seems to be well suited for use as a modern breathing monitor. Monitoring of Respiration is important for monitoring respiration towards observation quality sleeping or The Sudden Infant Death Syndrome (SIDS).

Mysterious and Useful Microcosm

  • Department: Department of Microelectronics
  • Annotation:
    Fashion hit the media (in the technical field) are nanotechnology.A little larger (micro) world does not inspire so much attention. Probably because that is not new, for microscope helps scientists since 17th stoleơ. Even microscopic examination is continually improving and earlierunsuspected details show tech electronic devices. We invite you to show micro labs in CTU.

Nanofiber sensors

  • Department: Department of Microelectronics
  • Annotation:
    Nanosensors are of increasing importance. The need for monitoring and measuring chemical and physical properties increases. The utilization is often difficult to access biological and industrial applications. Sensors are known as nanosensors, if at least one geometric dimension of less than 100 nm.

Structure of AlGaN / GaN sensors for biochemical use

  • Department: Department of Microelectronics
  • Annotation:
    Semiconductor Materials Group III-V (GaAs, AlxGa1-xAs, AlAs) provide, in some cases much better intrinsic material and technological properties compared to silicon. Properties are useful in the design of new advanced MEMS devices and sensors.

Technological View of the Opportunities and Prospects for Sensor Networks

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Radiokomunikace 2012 - sborník přednášek. Pardubice: UNIT, 2012. pp. 149-162. ISBN 978-80-905345-0-6.
  • Year: 2012
  • Department: Department of Microelectronics
  • Annotation:
    This paper describes the field of intelligent sensor networks. It shows also the technological view of the opportunities and usage possibilities of sensor networks.

The biochemical sensors based on the MOS structure

  • Department: Department of Microelectronics
  • Annotation:
    Physical interpretation of the existence of an MOS transistor is of great importance for the development of a range of sensors, which are designed to measure the physical and chemical parameters of the environment. The sensors are formed by modifying the original structure of the FET, sensors are designed to measure biochemical and chemical parameters. Typical structures shall be marked GASFET, OGFET, ADFET, SAFET, CFT, PRESSFET, ISFET, CHEMFET, REFET, ENFET, IMFET, BIOFET etc.

Access Control System Applications

Analog correction of the transfer characteristic using the current-mode circuit

  • Department: Department of Microelectronics
  • Annotation:
    The paper deals with correction of the transfer characteristic using the current-mode circuit. The circuit is realizing the invers function to the transfer characteristic of the sensor and thus performes the correction. The circuit consists of CMOS transistors in the subthreshold conduction region.

Communication and Powering scheme for wireless and battery-less measurement

  • Department: Department of Microelectronics
  • Annotation:
    The paper presents solution for wireless and battery-less measurement in the enclosed areas. The principle is based on previous work, while this paper is focused on high power-demanding applications such as MEMS accelerometers, gas sensors, piezoresistive strain gauges [2], etc. Standard FRID communication scheme (sensing the input current change on the primary side) can not be used in this case, because the communication channel is overloaded by the high power load. Paper presents possible solution which is based on the dual frequency scheme - one frequency for powering and other for the communication. This is ensuring capability for measurement up to several centimeters on the frequency bands 125 kHz and 375 kHz. It can be suitable for continuous wireless and battery-less measurement in isolated systems such as the rotating objects, concrete walls, enclosed plastic barrels, high temperature chambers etc.

Dual frequency system for power-demanding measurement in the isolated areas

  • Department: Department of Microelectronics
  • Annotation:
    The paper presents solution for wireless and battery-less measurement in the enclosed areas. The principle is based on previous work, while this paper is focused on high power-demanding applications such as MEMS accelerometers, gas sensors, piezoresistive strain gauges, etc. It can be suitable for continuous wireless and battery-less measurement in isolated systems such as the rotating objects, concrete walls, enclosed barrels, high temperature chambers etc. It is based on near magnetic field coupling in radiofrequency band. The principle is similar to the RFID, while it is more powerful and the powering and signal transfer is separated by the different frequencies. The antennas are designed for surface mounting. The system is desired to be used in long-term monitoring of the environment.

Electric Energy Sources for Microsystems

  • Department: Department of Microelectronics
  • Annotation:
    This article presents an overview of several types of electric energy power sources for microsystem field applications. The increasing trend to use integrated generators is visible in addition to classic primary or secondary battery principles. The final application depends on the application environment area and availability of desired energy type for conversion. Further the article deals with non-traditional types of energy storage.

Fabrication of Scalable Energy Harvester

  • Department: Department of Microelectronics
  • Annotation:
    It's a simple fact, that energy sources which should stay dimensionally small do not supply sufficient power. One good most space-efficient solution is a hybrid structure consisting of harvester, AC-DC or DC-DC converter, battery, DC-DC voltage regulator and wireless sensor. The energy harvester on the input works here as an energy-to-energy converter. The secondary battery reaches higher output power but stores less energy so it works as a power cache, supplying power when required but otherwise constantly receiving charge from the harvester. Voltage regulator supplies the power to the external wireless sensor. This paper provides the information on design of piezoelectric energy harvesting module, covering various aspects such as modeling, layout design and optimization, selection of materials, simulated fabrication process steps and description of MWP production.

Grafen and other perspective materials for radiocomunications

  • Department: Department of Microelectronics
  • Annotation:
    This invited lecture describes the application field of Grafen and other perspective materials for radiocomunications

Impact of ZnO gate interfacial layer on piezoelectric response of AlGaN/GaN C-HEMT based ring gate capacitor

  • DOI: 10.1016/j.sna.2011.09.028
  • Link: https://doi.org/10.1016/j.sna.2011.09.028
  • Department: Department of Microelectronics
  • Annotation:
    We report on a piezoelectric response investigation of AlGaN/GaN circular high electron mobility transistor (C-HEMT) based ring gate capacitor as a new stress sensor device to be potentially applied for dynamic high-pressure sensing. A ring gate capacitor of C-HEMT with an additional ZnO gate interfacial layer was used to measure the changes in the piezoelectric charge induced directly by the variation of piezoelectric polarization of both gate piezoelectric layers (AlGaN, ZnO) for harmonic loading at different excitation frequences. Our experimental results show that about 10 nm thick piezoelectric ZnO layer grown on ring gate/AlGaN interface of C-HEMT can yield almost a 60% increase in the piezoelectric detection sensitivity of the device due to its higher piezoelectric coefficient.

Integrated USB based readout interface for silicon strip detectors of the ATLAS SCT module

  • Authors: Mašek, P., Linhart, V., Granja, C., Pospíšil, S., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Journal of Instrumentation. 2011, 6(C12016), 1-5. ISSN 1748-0221.
  • Year: 2011
  • DOI: 10.1088/1748-0221/6/12/C12016
  • Link: https://doi.org/10.1088/1748-0221/6/12/C12016
  • Department: Department of Microelectronics
  • Annotation:
    An integrated portable USB based readout interface for the ATLAS semiconductor trackers (SCT) is presented. The ATLAS SCT modules are large area silicon strip detectors designed for tracking of high-energy charged particles resulting in collisions on Large Hadron Collider (LHC) in CERN. A custom made PC-host software tool was written for Windows platform for control and DAQ with build-in online visualization. The interface provides integrated power, control and DAQ and configurable communication between the detector module and the controlling PC. The interface is based on the Field Programmable Gate Array (FPGA) and the high speed USB 2.0 standard. Utilization of the programmable device simplifies the operation and permits future expansion of the functionality without any hardware changes. The device includes the high voltage source for detector bias and it is equipped with number of devices for monitoring the operation and conditions of measurement (temperature, humidity, voltage).

Intelligent Sensor Network for Physical Quantities Measurement

  • DOI: 10.1007/978-3-642-25905-0_67
  • Link: https://doi.org/10.1007/978-3-642-25905-0_67
  • Department: Department of Microelectronics
  • Annotation:
    The article solves the design and implementation of a simple intelligent sensor network for physical quantities measurement. The system uses wireless data transmission. Sensor network is designed as a basic element of the ZigBee network. Each unit has a sensor attached to a microcontroller. The system is controlled by PC, the variable arrangement can be used. The different type of the sensor can be used. The system can be extended to other types of sensors for measuring the chemical variables. The data transfer from PC can be transmitted by internet.

MEMS Devices for Radioelectronics

  • Department: Department of Microelectronics
  • Annotation:
    The article describes new RF components realized by MEMS microelectronic technologies. The attention is paid to the basic principles used by the control of the RF elements. The paper deals with RF switches and coils realized in MEMS technology. There are described principles, structures and typical parameters in the paper.

MEMS structures for high temperature measurement of gas concentrations of CO, H2, NOx and hydrocarbons

  • Department: Department of Microelectronics
  • Annotation:
    The main aim of presented work is design, modeling and characterization of novel Micro-Electro-Mechanical Structures (MEMS) based on GaAs and GaN, which are designed for high concentrations of gas detectors.

Microelectronics aims to nanoelectronics - Part 3

  • Department: Department of Microelectronics
  • Annotation:
    Realizace mikro (nano) součástí a mikro (nano) systémů se zmenšujícími se rozměry využitelné v průmyslu, spotřební elektronice, lékařských aplikacích nebo v komunikacích a informatice umožnil výrazný rozvoj mikrotechnologií. Technologie umožňují použití různých typů mikrostruktur a materiálů včetně polymerů nebo kovů pro realizaci akcelerometrů, gyroskopů, mikromanipulátorů nebo optických přepínačů nebo např. tryskových hlav pro tiskárny. Tlakové senzory, tiskové hlavy, optické přepínače, křemíkové piezoodporové tlakové senzory, kapacitní tlakové senzory a další lze zahrnout mezi hlavní komerčně využitelné aplikace. Mezi širokou nabídku aplikací mikrosystémových výrobků lze zařadit senzory chemických veličin, senzory plynů, IR senzory a řady, aplikace pro vesmírný výzkum, aplikace pro realizace pikosatelitů, magnetická záznamová média pro vývoj superkompaktních magnetických disků s ultra vysokou záznamovou hustotou apod.

Microelectronics aims to nanoelectronics - Part 4

Microelectronics aims to nanoelectronics - Part 7

  • Department: Department of Microelectronics
  • Annotation:
    Realizace mikro (nano) součástí a mikro (nano) systémů se zmenšujícími se rozměry využitelné v průmyslu, spotřební elektronice, lékařských aplikacích nebo v komunikacích a informatice umožnil výrazný rozvoj mikrotechnologií. Technologie umožňují použití různých typů mikrostruktur a materiálů včetně polymerů nebo kovů pro realizaci akcelerometrů, gyroskopů, mikromanipulátorů nebo optických přepínačů nebo např. tryskových hlav pro tiskárny. Tlakové senzory, tiskové hlavy, optické přepínače, křemíkové piezoodporové tlakové senzory, kapacitní tlakové senzory a další lze zahrnout mezi hlavní komerčně využitelné aplikace. Mezi širokou nabídku aplikací mikrosystémových výrobků lze zařadit senzory chemických veličin, senzory plynů, IR senzory a řady, aplikace pro vesmírný výzkum, aplikace pro realizace pikosatelitů, magnetická záznamová média pro vývoj superkompaktních magnetických disků s ultra vysokou záznamovou hustotou apod.

Microelectronics go to nanoelectronics - part 2

  • Department: Department of Microelectronics
  • Annotation:
    Realizace mikro (nano) součástí a mikro (nano) systémů se zmenšujícími se rozměry využitelné v průmyslu, spotřební elektronice, lékařských aplikacích nebo v komunikacích a informatice umožnil výrazný rozvoj mikrotechnologií. Technologie umožňují použití různých typů mikrostruktur a materiálů včetně polymerů nebo kovů pro realizaci akcelerometrů, gyroskopů, mikromanipulátorů nebo optických přepínačů nebo např. tryskových hlav pro tiskárny. Tlakové senzory, tiskové hlavy, optické přepínače, křemíkové piezoodporové tlakové senzory, kapacitní tlakové senzory a další lze zahrnout mezi hlavní komerčně využitelné aplikace. Mezi širokou nabídku aplikací mikrosystémových výrobků lze zařadit senzory chemických veličin, senzory plynů, IR senzory a řady, aplikace pro vesmírný výzkum, aplikace pro realizace pikosatelitů, magnetická záznamová média pro vývoj superkompaktních magnetických disků s ultra vysokou záznamovou hustotou apod.

Microelectronics head towards nanoelectronics - part 5

  • Department: Department of Microelectronics
  • Annotation:
    Research in millimeter and micrometric -wave has focused on consumer applications from traditional products to security applications in the last two decades........

Microsystems, Microsensors, Nanoelectronics and Photonics

Monitoring of Breathing

  • Department: Department of Microelectronics
  • Annotation:
    The respiration belongs among basic vital functions and the knowledge of their parameters and quality is necessary in medicine. The research is leading to the methods, which minimize patients' inconvenience. These methods are important for monitoring the respiration throughout the quality sleeping observation or the SIDS (Sudden Infant Death Syndrome). This paper contains an overview of the methods for the respiration monitoring used not only in practical medicine but also the methods which are under development.

Monitoring of Respiration by Bioacoustic Method

  • Department: Department of Microelectronics
  • Annotation:
    This paper describes a method of the breathing detection based on the sensing of acoustic signals in trachea. Parameters of the breathing, detection inspiration and expiration and apnoea pause are possible to determine from these signals. This method is simple and easy to use, portable and provides an accurate measurement and therefore this approach is promising to be well suited for use as a modern breathing monitor. The respiration belongs among basic vital functions and the knowledge of their parameters and quality is necessary in medicine. The research is leading to the methods, which are inconvenienced patients. Monitoring of Respiration is important for monitoring respiration towards observation quality sleeping or The Sudden Infant Death Syndrome (SIDS).

Optimization of piezoresistive element position on substrate using FEM

  • Department: Department of Microelectronics
  • Annotation:
    Modeling and simulation of mechanical stresses and deformations are virtually essential for any design of MEMS structures. The modern simulation tools make the design easier and enable optimization of many different parameters before fabrication of new structure. This paper presents an example of optimization of piezoresistive element placement on substrates for different types of deformation transducers (single side fixed cantilever beam and membrane). The modeling of structures was performed by a simulator utilizing finite the element method (FEM). The designed structures were then fabricated and tested.

Piezoelectric response of AlGaN/GaN-based circular-HEMT structures

  • DOI: 10.1016/j.mee.2010.12.013
  • Link: https://doi.org/10.1016/j.mee.2010.12.013
  • Department: Department of Microelectronics
  • Annotation:
    This papers reports, for the first time, on a piezoelectric response investigation of AlGaN/GaN-based circular high electron mobility transistor (C-HEMT) structures, which can be potentially applied in new devices for dynamic pressure and stress sensing. We present the processing technology and a piezoelectric performance analysis of the C-HEMT devices. The analysis obtained experimentally is compared with the results of electro-mechanical simulation. The measurements and simulations revealed a good linearity in the piezoelectric response and excellent stress detection sensitivity that is independent from the frequency range measured.

Piezoresistive sensor for strain measurement on turbine blade with wireless telemetry data acquisition

  • Department: Department of Microelectronics
  • Annotation:
    In this paper, novel strain-gauge sensor design and its application for wireless measurement of blade deformations and strains are presented. The strain sensor was designed using FEM (Finite Element Modelling) and uses piezoresistive strain sensitive boron doped nanocrystalline layers. Nanocrystalline Diamond (NCD) is a very promising material for fabrication of harsh-environment devices because of its unique mechanical and electrical properties. The prospective of using diamond is not only in sensors (MEMS) but in RF and power electronic as well. Selection of method for data transfer is the key problem in rotating mechanisms. Telemetry can be related to transfer a data over any media, but is typically applied on wireless communications. A basic telemetry system consists of a measuring element or sensor, a device for sending the transmission, a receiver, and an output controller that records and displays data.

Respiration Monitoring during Sleeping

  • DOI: 10.1145/2093698.2093731
  • Link: https://doi.org/10.1145/2093698.2093731
  • Department: Department of Microelectronics
  • Annotation:
    The respiration belongs among basic vital functions and the knowledge of their parameters and quality is necessary in medicine. The research is leading to the methods, which are inconvenienced patients. These methods are important for monitoring respiration towards observation quality sleeping or The Sudden Infant Death Syndrome (SIDS). This paper contains an overview of the methods for the respiration monitoring used not only in practice of medicine but till now developed.

RF MEMS components: inductance, capacitors, and tunable filters

Application of Microsystem Technologies in Sensor Networks

Design and Fabrication of Piezoresistive Strain-Gauges for Harsh Environment Applications

  • Department: Department of Microelectronics
  • Annotation:
    Maximum operating temperature is usually one of the limiting factors for using of conventional sensors and other electronic devices. High-temperature sensors and electronics are required in some special applications e.g. measurement of deformations, stresses and pressures inside power generators. The design methodology of the some piezoresistive sensors utilizing FEM simulations is presented. Piezoresistive sensors based on thin-film metal sputtered layers, silicon-on-insulator (SOI) and nanocrystalline diamond layers (NCD) were successfully designed, fabricated and measured. The fabricated sensors are able to operate at temperatures up to 250 °C. Extensive study of sensor parameters e.g. deformation sensitivity, edge and contact resistances, temperature dependences gauge factor, bridge output voltage was performed. The measured values and investigated findings can be used for calibration of simulation software and in prospective design of more complex sensor structures.

Intelligent Wireless Sensor Unit for Overhead Line Ampacity Assessment

  • Authors: Frolec, J., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Electronic Devices and Systems, IMAPS CS International Conference 2010 Proceedings. Brno: VUT v Brně, FEI, 2010. p. 94-99. ISSN 1862-6351. ISBN 978-80-214-4138-5.
  • Year: 2010
  • Department: Department of Microelectronics
  • Annotation:
    In this paper we present a combined current and temperature measurement system for real time high voltage overhead line ampacity rating. The system comprises of a sensor unit mounted directly on the high voltage conductor which acquires the current and temperature data and transmits it to a ground interfacing unit. A Rogowski coil sensor equipped with a precision integrator is utilized for current measurement. The temperature is measured using an intelligent digital sensor affixed directly to the conductor. The wireless data communication between the sensor unit and the ground unit is implemented using ZigBee networking in the 2.4 GHz ISM band. The sensor unit is supplied directly from the measured conductor using a split-core current transformer. Due to the relatively wide operational current range of a high voltage transmission line, a switched mode supply circuit is used at the secondary side of the current transformer.

Microelelectronics go to nanoelectronics

  • Department: Department of Microelectronics
  • Annotation:
    Elektronika prožívala ve 20. století snad nejbouřlivější rozvoj ze všech odvětví od vzniku jednoduchých elektronek, přes vynález polovodičového tranzistoru na konci 40. let až po rozvoj integrovaných obvodů včetně pamětí s ultravysokou hustotou integrace. V 90. letech se objevil pojem mikrosystémy nebo mikrosystémové inženýrství, které se od klasických integrovaných obvodů odlišovalo tím, že to již nebyla pouze "čistá" elektronika, ale mezioborové propojení různých energetických domén, tj. tento nově vznikající obor začal komplexně integrovat mikroelektroniku, mikromechaniku, mikrooptiku, chemii, biochemii, atd.. Začal tak vývoj nových kvantitativně i kvalitativně odlišných součástí s možnostmi aplikace do té doby nereálných. Dalším zmenšováním fyzikálních rozměrů struktur se dostáváme do oblasti tzv. nanotechnologií, kterým bude patřit 21. století.

One-chip MOS Structure for Temperature Flow Sensor

  • Department: Department of Microelectronics
  • Annotation:
    There is described a MOS structure in the use of flow sensor system in the paper. MOS structure as a temperature sensor allows measurement of temperature gradient. One allows computation of direction of air flow over the structure chip. Four MOS structure of temperature sensors has been used for the design of sensitivity flow sensor. Different arrangements of MOS structure have been designed. Software standard tools have been used for simulation and modeling of structure properties. Maximum values of structure sensitivity in dependence on operating temperature have been computed. The parameters have been used for the design. Suitable structure temperature was found during simulations. Circuit connection of sensor temperature matrix was designed. New results of sensitivity and resolution of MOS sensor systems were obtained. The working efforts were focused on the sensitivity, angle resolution and small power consumption.

Perspective electronic components and systems

  • Department: Department of Microelectronics
  • Annotation:
    The paper shows the possibility that currently provide microelectronic technology to implement electronic microdevices available in various areas of electronics.

Piezoelectric response of AlGaN/GaN based circular-HEMT structures

  • Department: Department of Microelectronics
  • Annotation:
    In this work we have proposed for the first time a circular-HEMT (C-HEMT) device for external pressure and stress sensing. There are some advantages of this structure comparing to that of the conventional rectangular HEMT. First of all there is no ""MESA""- etching step needed to define C-HEMT, so the continuity of the top AlGaN barrier layer is not broken and therefore, no partial relaxation of the applied bending stress is there observed.

Polymer Based Piezoelectric Energy Microgenerator

  • DOI: 10.24084/repqj08.528
  • Link: https://doi.org/10.24084/repqj08.528
  • Department: Department of Microelectronics
  • Annotation:
    This paper describes a concept of self-powered microsystem which can be used for applications totally isolated from the outside world. It is obvious that the supply energy needs to be generated inside the system.

Polymer Based Piezolectric Microgenerator

  • Department: Department of Microelectronics
  • Annotation:
    This paper describes a concept of self-powered microsystem which can be used for applications totally isolated from the outside world. It is obvious that the supply energy needs to be generated inside the system.

Potentiality of the Inductive Powering for Measurement in the Enclosed Systems

  • Department: Department of Microelectronics
  • Annotation:
    Paper presents wireless powering and signal transfer solution using the inductive coupling. It can be suitable for enclosed systems that are isolated from the surroundings and where the batteries cannot be used. It can be used for biomedical probes, probes bricked in to the wall for long-term monitoring, extreme temperature environment measurement etc. The powering is provided by the near magnetic field. The serial and parallel resonances are considered in the design in order to increase the voltage transfer. Voltage levels, power transfer efficiency and signal modulation effects are studied up to distance of 30 cm. Presented principle of powering and communication is similar to the RFID systems (Radio Frequency Identification). The main contribution of this paper is powering potentialities and distance limits prediction of this powering strategy. The simple coils are considered. Special converter is presented for this purpose.

Powering for Long Term Monitoring in the Enclosed Areas

  • Department: Department of Microelectronics
  • Annotation:
    Paper presents possible solution and practical examples for wireless powering and signal transfer using the inductive coupling. It can be suitable for long term monitoring in enclosed areas and systems that are isolated form the surroundings. This solution allows avoiding the batteries. It can be used for probes bricked in to the wall, extreme temperature environment measurement, the barrels internal shells health monitoring etc. Main advantage of this kind of powering is nearly unlimited lifetime, no toxic pollutions (such as Cd, Li, H2SO4,… contained in the batteries) and universal applicability. The main contribution of this paper is prediction of the powering potentialities and distance limits of this strategy. Voltage levels, power transfer efficiency and signal modulation effects are studied up to distance of 30 cm. Special converter principle is presented for this purpose.

Simple Vertical Velocity Measurement System for Different Use

  • Department: Department of Microelectronics
  • Annotation:
    The measurement of vertical velocity is based on principle of evaluating the change of an atmospheric pressure. The dependence which evaluates the vertical velocity is derived from the exponential form of the barometric equation which relates the air pressure versus the altitude. This relatively simple method has some drawbacks. First of all it is a nonlinearity of the exponential dependency of the pressure versus altitude. Also the air temperature plays a significant role in this method. Compensated methods for measuring the vertical velocity embrace the vertical velocity correction. The correction is calculated from the horizontal velocity change which induces another vertical velocity change. The acceleration is evaluated in the horizontal direction using the information about the dynamic pressure. The solution is based on the altitude equation, including the effects of temperature. The possibility of nonlinearity compensation and temperature compensation are used.

Temperature Dependence of the Pyroelectric Behaviour in GaN/AlGaN

  • Department: Department of Microelectronics
  • Annotation:
    So far the dependence of the spontaneous polarization coefficient for GaN and AlN on temperature has been measured to be minimal, which corresponds with expectation that the spontaneous polarization is reduced at the elevated temperatures of interest. There are also no reports on the piezoelectric polarization at higher temperature. This paper is initial study on the influence of temperature related behaviour in GaN/AlGaN. Summarize recent findings and consideration.

Universal Test Bench for Characterization of Distance-measuring and Strain Sensors

  • Department: Department of Microelectronics
  • Annotation:
    Following text describes a universal test bench that can be used for characterization of the sensors. It offers sufficient distance and force ability to characterize a wide sort of the sensors. It is suitable for precise distance setting. It is able to set the distance in the range of 10 cm with the resolution up to 10 μm. The mechanical tolerance is negligible. It is less than five micrometers for unloaded viper. Possible relevant tolerance can be caused only by the structure frame bending when the high mechanical stress is applied. The test bench was developed as a research instrument for characterization of new sensor structures and it is also used as a teaching facilitation in the sensor systems tutorial. The test bench functionality is illustrated on five types of the sensors - the capacitive sensor, the optic sensor GP2D120, the Hall sensor A1301, the magneto resistive sensor HMC1501 and for the compression measurement was used the cantilever beam LC501-100.

UNIVERSAL TEST BENCH FOR SENSOR CHARACTERIZATION

  • Department: Department of Microelectronics
  • Annotation:
    The paper describes a universal test bench that can be used for distance characterization of the sensors. It is suitable for precise distance setting - it is able to set the distance in the range of 10 cm with the resolution up to 10 μm. The mechanical hysteresis is negligible - it is less than five micrometers. The test bench was developed as a teaching facilitation for sensor systems lecturers and also as the tool for the scientific characterization. The test bench functionality is performed on four types of the sensors - the capacitive sensor, the optic sensor GP2D120, the Hall sensor A1301 and the magneto resistive sensor HMC1501.

Use of Barometric Sensor for Vertical Velocity Measurement.

  • Department: Department of Microelectronics
  • Annotation:
    The measure system is based on the principle of evaluating the change of an atmospheric pressure. The vertical velocity is derived from the exponential form of the barometric equation which relates the air pressure versus the altitude. The relatively simple method has some drawbacks (a nonlinearity of the exponential dependency of the pressure versus altitude, the air temperature plays a significant role). There are used the compensated methods for measuring the vertical velocity. The correction is calculated from the horizontal velocity change which induces another vertical velocity change. The solution is based on the altitude equation, including the effects of temperature. The acceleration is evaluated in the horizontal direction using the information about the dynamic pressure. The possibility of nonlinearity compensation and temperature compensation are used.

Wide Range Layout Optimization of Energy Microgenerator

  • Department: Department of Microelectronics
  • Annotation:
    Trend of producing still smaller wireless sensors brought a problem with power source integration. The volume occupied by the power source is a limiting factor for further miniaturization. Therefore the layout optimization and higher fill factor of generators is required. MEMS based energy microgenerators are becoming a key enabler for further miniaturization and deployment of energy autonomous microsystems. Vibration harvesting can be employed to transform mechanical to electrical energy. In this paper we show a layout optimization and electro-mechanical behaviour of piezoelectric vibrational energy harvester on which depends the whole system efficiency. The main focus is given on broad range of resonant frequency of the structure.This device is designed to be integrated into a self-powered microsystem together with a energy storage circuit, a sensor chain and a data processing unit.

Wireless Sensor Network Control System

  • Department: Department of Microelectronics
  • Annotation:
    The core of the paper is the control system with a few electronic blocks (control, actuator, software, and RF wireless communication). The control block drives operations in the system, the wireless block ensures communication, and data transfer, the actuator part is drived by control block. The software drives all operations in the system. Sensors ensure basic information about environment. The number of sensor can be variable. The control block cooperates with wireless sensors, and wireless actuators. The heart of the system is the control microprocessor. The system communicates with PC, mobile phone etc. There was used a new architecture of a multisensor system for physical measurement using wireless data transfer in the paper. Different control software was designed for wireless parts.

Wireless Sensor System for Overhead Line Ampacity Monitoring

  • Authors: Frolec, J., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Conference Proceedings of the Eighth International Conference on Advanced Semiconductor Devices and Microsystems. Bratislava: IEEE, 2010. pp. 211-214. ISBN 978-1-4244-8572-7.
  • Year: 2010
  • Department: Department of Microelectronics
  • Annotation:
    Due to the economic pressures of internationalized energy market together with rising demand for electrical power, a growing need has been observed in recent years to increase ampere capacity (ampacity) of high voltage overhead transmission line infrastructure. Long construction time, difficult legal procedures and cost considerations encourage the line operators to exploit the wide margins of the traditional worst-case condition oriented overhead line design. To operate the transmission lines closer to the limits of their instantaneous weather dependent ampacity, live monitoring of line state must be employed. In this paper we propose an extensible sensor system for overhead conductor temperature and current measurement. The system comprises of sensor units mounted directly on the high voltage conductors, which acquire the current and temperature data and transmit it to a ground interfacing unit connected to line operator's control system computer network.

Wireless Sensor System with Bidirectional Communications

  • Department: Department of Microelectronics
  • Annotation:
    The system contains units: wireless, control, actuator, software equipment. RF wireless unit ensures wireless communication between control unit and sensors as well as wireless switch unit. The control unit controls system operation, i.e. communication transfer, sensor data processing as well as switching of actuator unit. Actuator switch unit is wireless controlled by control unit. There were hardware and software realized and tested in the designed system. The system was designed to operate with different type of physical sensors. The system can used PC, PDA or mobile phone to communication as well as signal processing. The control unit communicates with wireless temperature sensors and wireless switch units. The wireless temperature sensors measure temperature periodically and convey the measured data to the control unit. The actuator units communicate with the control unit. The main part is the control microprocessor. The run of the system is supported by the control programs.

AlGaN/GaN HEMT based micro-hotplate for high temperature gas sensors

  • Department: Department of Microelectronics
  • Annotation:
    In this work we present a new approach in design and fabrication of MEMS micro-hotplate to be applied for high temperature metal oxide gas sensors. The micro-hotplate design concept uses high power and high temperature capability of AlGaN HEMT device.

Applicability of the Inductive Powering for Enclosed Systems and Data Transfer

  • Department: Department of Microelectronics
  • Annotation:
    Paper presents theory and practical examples of inductive coupling for the powering and communication with devices in isolated systems. It can be suitable for biomedical probes, encased systems such as tubes or sensors in the cement concrete, extreme temperature environments etc. The powering is realized using the near magnetic field.

Assistive Technologies: New Challenges for Education

  • DOI: 10.1007/978-3-540-89208-3_654
  • Link: https://doi.org/10.1007/978-3-540-89208-3_654
  • Department: Department of Microelectronics, Department of Radioelectronics
  • Annotation:
    At present the need for interdisciplinary education supporting development and practical application of assistive technologies (AT) is continuously growing. It is given by the development of demographic and age structure of the population and the need to ensure support and safety of elderly and handicapped people with increased health and other risks.

Design and Characterization of NCD Piezoresistive Strain Sensor

  • Department: Department of Microelectronics
  • Annotation:
    Nanocrystalline Diamond (NCD) is a very promising material for fabrication of high-temperature devices because of its unique mechanical and electrical properties. The prospective of using diamond is not only in sensors (MEMS) but in RF and power electronic as well. The strain gauges based on nanocrystalline diamond layers have been successfully designed and fabricated using mainly domestic technological background.

Electronic Devices and Systems for Radioelectronics

  • Department: Department of Microelectronics
  • Annotation:
    Paper describes the basic principles, construction, working of MEMS devices. MEMS devices are described by the using in the area of RF. The different actuation principles are using, electrostatic, electromagnetic, temperature etc. There are described different types of RF switches in the paper.

Fabrication of SOI Strain-gauges for High-Temperature Applications

  • Department: Department of Microelectronics
  • Annotation:
    V současné době se kladou stále větší nároky na elektroniku pro přístrojové a řídící systémy, kdy jedním z požadavků je také provozuschopnost při vyšších teplotách. Elektronické prvky schopné pracovat při teplotách vyšších než 200 °C jsou potřeba zejména v průmyslových aplikacích, např. v řízení a diagnostice turbínových generátorů v elektrárnách. Technologie SOI (Silicon-on-Insulator) je vhodná pro realizaci elektronických prvků a senzorů nejen pro vysokoteplotní, ale i RF (Radio Frequency) aplikace. Tento článek představuje proces výroby a charakterizace piezorezistivních senzorů deformace (tenzometrů) v SOI technologii pro průmyslové aplikace.

GaN MICRO-HOTPLATES FOR HIGH TEMPERATURE MEMS GAS SENSOR APPLICATIONS

  • Department: Department of Microelectronics
  • Annotation:
    In this work we present a new approach in design and fabrication of MEMS micro-hotplate to be applied for high temperature metal oxide gas sensors.

GaN, GaAs and Silicon based Micromechanical Free Standing Hot Plates for Gas Sensors

  • DOI: 10.1016/j.proche.2009.07.200
  • Link: https://doi.org/10.1016/j.proche.2009.07.200
  • Department: Department of Microelectronics
  • Annotation:
    Main objective of the presented work deals with design, modelling and characterization of new micro machined GaAs and GaN based hot plate thermal converters which are considered to operate with high temperature metal oxide gas sensors, that can analyse various gases, such as CO, H2, NOx and hydrocarbons.

High-Temperature Strain-Gauges Based on Nanocrystalline Diamond Layers

  • Department: Department of Microelectronics
  • Annotation:
    Strain gauges are broadly used in sensors that detect and measure force and force-related quantities, such as deflection, torque, acceleration, pressure, and vibration. The piezoresistor is a basic building block for strain sensors that often use multiple strain gauges (piezoresistors) in their construction. A strain gauge is usually exposed to a small mechanical deformation which results in a small change in gauge resistance proportional to the applied strain (force, or other strain related quantity). Nanocrystalline Diamond (NCD) is a very promising material for fabrication of high-temperature devices because of its unique mechanical and electrical properties.

IMPROVED METHOD FOR TID ESTIMATION

  • Department: Department of Microelectronics
  • Annotation:
    The paper presents improved method for estimation of the total ionizing dose (TID). Radiation environment can significantly affect the electronic devices performance. In order to avoid the problems the electronics must be designed with respect to the radiation environment. This is essential especially in situations where the radiation environments can be expected - nuclear power stations, satellites, medical devices, etc. The paper is based on analysis that was made for satellite operating at near polar orbit between 530 km (BOL) and 300 km (EOL) altitudes for at least four years.

Microsystem Elements and Circuits for Interdisciplinary Applications

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Moderní elektronické součástky - od fotonu k elektronu 2009. Praha: Sdělovací technika, 2009, Available from: http://www.stech.cz
  • Year: 2009
  • Department: Department of Microelectronics
  • Annotation:
    The paper offers survey of microsystems in interdisciplinary applications. In the lecture is showed: the survey of microsystem technologies, the survey of integration single components, the description of special structures like as microflow sensor with the optical analysis, the use of microsystems in the medicine, for lab-on-chip, one describes microfluid passive structures and elements, ceramic microstructures, one describes principle and behaviour of the integrated chromatograph, optical spectrometer etc. There are described principles of heat microactuators, heat microturbines, steam micromotor etc. in the paper.

Microsystems, Microsensors and Microactuators: Research and Education

  • DOI: 10.1109/MSE.2009.5270814
  • Link: https://doi.org/10.1109/MSE.2009.5270814
  • Department: Department of Microelectronics
  • Annotation:
    The education involves nanomaterials and smart materials for sensor and smart micro and nanosystems. System of different interconnected laboratories is necessary for high quality education. Laboratories represent design flow (design, simulation, models and modelling, verifications, testing and corrected outputs). Direct research connection as well as development together with education and direct student participation in research is desirable. Student individual projects serve as a part of research. Several workplaces are used where students work on defined tasks. The use of special instrumentation, microscope and other nanotechnology workplaces in the different institutes is necessary. There have been established direct links to technological companies. Employment of students enables to increase cooperation with companies. Students participate in research projects as well. Individual student projects contribute to student professional shaping.

Modeling and Fabrication of Piezoresistive Strain Sensor Based on Diamond Layers

  • Department: Department of Microelectronics
  • Annotation:
    High-temperature sensors and electronics are required for harsh environments where the application of conventional electronics is impossible or impractical, such as in industrial, automotive, aircraft and aerospace applications [1]. The design methodology utilizing FEM simulations is presented. Piezoresistive sensors based on thin-film metal sputtered layers, silicon-on-insulator and nanocrystalline diamond layers were successfully designed, fabricated and measured. The fabricated sensors are able to operate at temperatures up to 250 °C. Extensive study of sensor parameters e.g. deformation sensitivity, edge and contact resistances, temperature dependences gauge factor, bridge output voltage was performed. The measured values and investigated findings can be used for calibration of simulation software and in prospective design of more complex sensor structures.

Nanocrystalline Diamond Piezoresistive Sensor

  • DOI: 10.1016/j.vacuum.2009.04.023
  • Link: https://doi.org/10.1016/j.vacuum.2009.04.023
  • Department: Department of Microelectronics
  • Annotation:
    The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) films are reported. The CoventorWare FEM calculations of the mechanical stress and geometrical deformations of a 3-D structure are used for a proper localization of the piezoresistor on the carrying substrate. The boron-doped piezoresistive sensing element was realized using a directed patterned growth of NCD film on SiO2/Si by microwave plasma-enhanced chemical vapour deposition (CVD).

New Micromechanical Free Standing Hot Plates with HEMT Heater

  • Department: Department of Microelectronics
  • Annotation:
    Main objective of the presented work deals with design, modelling and characterization of new micro machined GaAs and GaN based hot plate thermal converters. A new GaN based suspended membrane-type hot plate MEMS processing technology was developed for working temperature range up to 1000°C.

Resonant Energy Generator for Self-Powered Microsystem

  • Department: Department of Microelectronics
  • Annotation:
    This paper describes a concept of self-powered microsystem which can be used for applications totally isolated from the outside world.Serpentine cantilever has been designed to achieve a low resonant frequency structure as well as a low damping effect when it resonates.

Resonant Structures for Energy Microgenerator

  • Department: Department of Microelectronics
  • Annotation:
    As last year presented on EDS - there is a concept of self-powered devices using micro generator for energy production. These small power sources can be implemented into physical isolated devices like remote sensors chains etc. One part of this complex system is a resonant structure working on piezoelectric principle. It's the main harvesting device on which depends the whole system efficiency. This paper shows a different layouts [Fig.1] and its electro-mechanical behavior during vibrations. The main focus is given on the lowest achievable resonant frequency of the structure. For practical measurement was build a energy harvesting module with storage electronics which uses Advanced Linear Devices EH300 module. They include the energy conditioning and storage blocks in Fig. 2.These modules can extract energy from any environmental energy source (ac or dc signals ranging from 0 V to +-500 V and from 200 nA to 400 mA).

Resonant Structures For Energy Microgenerator

  • Department: Department of Microelectronics
  • Annotation:
    This paper shows different layouts and its electro-mechanical behavior during vibrations. The main focus is given on the lowest achievable resonant frequency of the structure.

Simple Wireless A/D Converter for Isolated Systems

  • DOI: 10.1109/ISIE.2009.5219059
  • Link: https://doi.org/10.1109/ISIE.2009.5219059
  • Department: Department of Microelectronics
  • Annotation:
    Motivation for this paper is to present possible solution for measuring analog values in isolated systems with out batteries. It can be suitable for biomedical probes, enclosed systems such as tubes, extreme temperature environments etc. The system is considering no batteries because of their finite lifetime, toxicity or an extreme temperatures environment that is improper for the batteries. System thus must be powered wirelessly and also the information must be transmitted without any wires. It is not necessary a long distance for this powering. Usually it is enough to transfer up to 20 cm. Paper presents basic theory needed for a design of the powering, communication and also the analog to digital converter. The converter is presented consisting of discrete devices and also it is presented scheme for chip realization using the 500 nm CMOS technology.

WIRELESS INDUCTIVE POWERING

  • Department: Department of Microelectronics
  • Annotation:
    Paper deals with possibilities of wireless powering of the electronic circuits using the inductive coupling. Derivation of basic equations for imperfectly coupled inductors is presented with respect to the optimal frequency, voltage level and maximal power. Three real configurations are described and measurements are compared to simulation results using the program SPICE.

Autonomous Polymer Pressure Sensor

  • Department: Department of Microelectronics
  • Annotation:
    Embedded sensor measurement systems with data logging showed in the last decade rapid progress in the efforts of miniaturizing sensors and actuators parts of the system. This paper describes microsystem with integrated power source on piezoelectric principle with pressure sensor. It's meant to be implemented without any physical contact to the outside world. It is energy sufficient and easy to produce with printing technology. It uses the PVDF polymer material which can perfectly substitute the common used PZT ceramics. In addition to existing thin-film capacitive and piezoelectric pressure-pulsation sensors the use of polymer electret-dielectrics, which remain in an electrified state for a long time, may become promising in the future. The layout of the piezoelectric pressure sensor is built on interdigital structure with piezoelectric layer made from PVDF. The output voltage of the piezolayer is dependent on the deformation caused by the interdigital structure.

Autonomous sensor microsystem with microgenerator

  • Department: Department of Microelectronics
  • Annotation:
    Embedded sensor measurement systems with data logging showed in the last decade rapid progress in the efforts of miniaturizing sensors and actuators parts of the system. One specific aspect is the problem of supplying required electrical power to such a device. This paper describes pressure sensor with integrated power source. It's meant to be implemented without any physical contact to the outside world. It's energy sufficient and easy to produce with printing technology. It also uses the PVDF polymer material.

Current-Mode Preamplifier with Digitally Tunable Transfer Characteristic

  • Department: Department of Microelectronics
  • Annotation:
    The paper describes an analog circuit system which processes an analog current mode signals. This circuit serves as a preamplifier and also it is able to correct a transfer characteristic of some input device or sensor. The circuit is based on the sub-threshold CMOS multiplying cells. The cells are interconnected in order to form powering stages and thus the output signal from the circuit is not linear dependent but there is some multinomial dependency on the input signal. It can be used directly or it can be encircled by a negative feedback in order to realize the inverse function. The transfer characteristic is tunable aid four ten-bit digital to analog converters. The program CADENCE and the CMOS 180 nm technology were used for simulations.

Design and Fabrication of High-Temperature SOI Strain-Gauges

  • Department: Department of Microelectronics
  • Annotation:
    The following paper introduces the CoventorWare design environment for SOI based piezoresistive sensor design. Fabrication process and characterization of designed sensors is also presented. The software package CoventorWare has been used for design of mechanical and electrical characteristics of the structure. The tools enable design, modelling and successive modification of designed MEMS structures.

Design of Piezoresistive Strain Sensor based on SOI technology

  • Department: Department of Microelectronics
  • Annotation:
    Electronics for instrumentation and control systems are required to operate at ever increasing temperatures. Device operation at temperatures greater than 200 °C is required for a variety of present and next-generation control applications including e.g. turbine engine control and other industrial applications. SOI technology is suitable technology for fabrication of hi-temperature devices as well as devices for RF applications. The following paper introduces the CoventorWare design environment for SOI based piezoresistive sensor design. It uses a hybrid approach that is a unique combination of diaphragm FEM analysis using Analyzer and piezoresistive sensor modelling using Architect's circuit simulation environment.

Design of Pressure Sensor based on Silicon-on-Insulator Technology

  • Department: Department of Microelectronics
  • Annotation:
    The paper decribes design methodology of a presure sensor using software package Coventorware.

Detection of Breathing

  • DOI: 10.1109/ASDAM.2008.4743307
  • Link: https://doi.org/10.1109/ASDAM.2008.4743307
  • Department: Department of Microelectronics
  • Annotation:
    Acoustic signals originate by the flow of air through the trachea during breathing. These signals are possible to pick-up by microphone. This paper describes a method of the breathing detection based on the sensing of acoustic signals in trachea. Parameters of the breathing, detection inspiration and expiration and apnoea pause are possible to determine from these signals. This method is simple and easy to use, portable and provides an accurate measurement and seems to be well suited for use as a modern breathing monitor.

Electronic equipment of intelligent buildings

  • Department: Department of Microelectronics
  • Annotation:
    SYSTÉMOVÁ INTEGRACE TECHNOLOGIÍ, Nové trendy, materiály, technologie, komunikace, informační technologie apod. - umožnění zcela nových funkcí často vzájemně provázaných, Integrace systémů, Interdisciplinarita, mezioborovost. Dokonalé a efektivní provázání technologií - realizace na několika úrovních Specifické nároky na projekty - dosažení souladu mezi architektonickým konceptem budovy a technickými systémy IB. Bezpečnost (např. propojení požárního poplachového systému s nouzovým a provozním osvětlením apod.).

Electronics and Microelectronics

  • Department: Department of Microelectronics
  • Annotation:
    Elektronika a mikroelektronika, zmenšování rozměrů, integrace, miniaturizace, senzory, aktuátory, mikrosenzory, mikroaktuátory, nanoelektronika, MEMS, NEMS, příklady aplikací.

Embedded Microsystem with Polymer Pressure Sensor

  • Department: Department of Microelectronics
  • Annotation:
    The interest in application of all kinds of electronic devices and everyday's demand on implementation of microelectromechanical systems in the last decade has produced rapid progress in the efforts of miniaturizing sensors and actuators. This paper describes microsystem with integrated power source on piezoelectric principle with pressure sensor. It's meant to be implemented without any physical contact to the outside world. It is energy sufficient and easy to produce with printing technology. It uses the PVDF polymer material.

Fabrication od Devices and Sensors Based on Silicon-on-Insulator Technology

  • Department: Department of Microelectronics
  • Annotation:
    This paper introduces the fabrication process of the sensors and other passive elements based on SOI technology. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates. Planar inductors and capacitors were fabricated on standard Si/SiO2 substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed.

GaAs based micromachined thermal converter for gas sensors

  • DOI: 10.1016/j.sna.2007.05.014
  • Link: https://doi.org/10.1016/j.sna.2007.05.014
  • Department: Department of Microelectronics
  • Annotation:
    The micromachining technology and an electro-thermo-mechanical performance analysis of GaAs based micromachined thermal converter (MTC) device to be designed for metal oxide gas sensors are presented. MTC device introduced exhibits a low power consumption due to by high thermal resistance values (Rth = 15-21 K/mW), uniform temperature distribution, a fast temperature time response (τ ~ 1.5-1.8 ms), and good mechanical integrity and thermal stability. It is also fully compatible with the GaAs HEMT based signal-processing and controlling electronics to be monolithically integrated with the gas sensors. The both a simple analytical and three-dimensional thermal modeling of the MTC device was performed. It supported the high electro-thermal conversion efficiency and fast temperature time response of the MEMS device as evaluated by the experiments.

GaN and GaAs Micromechanical Thermal Converter for Gas Sensors

  • Department: Department of Microelectronics
  • Annotation:
    simulation fabrication and characterization of new GaN and GaAs Micromechanical Hotplate Gas Sensor (MHGSs). GaAs and GaN MHGSs seem to be very attractive for design of thermally based MEMS sensor devices

Inductance Powering for Electronic Systems

  • Department: Department of Microelectronics
  • Annotation:
    The paper presents possible solutions for wireless powering of the electronic systems. The goal of this paper is to describe methods for simple implementation of such powering using the inductance coupling. This kind of powering is usually used for RFID or for the system that can not be powered using the wires (biomedical probes, encased monitoring systems, etc.). The powering system should provide the energy for the electronics across the distance of several centimeters and the powered electronics is desired to not being enclosed by the magnetic loop.

MEMS and microsystem technologies

  • Department: Department of Microelectronics
  • Annotation:
    The paper gives information about the MEMS concept. The information flow is shown from the common definition to the particular one. MEMS are described as a part of microsystems. MEMS represent the merger of electronics as with the mechanics. Microminiaturisation as well as a support of different microsystem technologies are used for MEMS production. The micron size is typical for MEMS. Different technology procedures are used for MEMS realisation. Some typical technologies are shown in the paper, like HEXSIL, HARPSS, LIGA etc. Typical MEMS examples are shown in the paper.

MEMS and NEMS research for education

  • Department: Department of Microelectronics
  • Annotation:
    The paper describes methods of active involvement of students in research work and application of research work results in educational process. Individual tasks are parts of solutions of large research projects. Individual work contributes to their professional forming. The research in the area of nanoelectronics (MEMS and NEMS) is discussed. A new method for education in the area of nanotechnology, narrow connection research and education, use of the nanotechnology equipment (AFM, nanolitography, etc.). The effort is targeted at the connection of the research an education, connection different workplaces from the different institutes.

MEMS in Industry

  • Department: Department of Microelectronics
  • Annotation:
    The paper gives information about selected principles of MEMs applications. Applications are concentrated to sensor systems, actuator systems as well as RF components. There are introduced typically MEMS structures in the paper, structures provide sensor functions as well as actuator functions. Global considerations are added to the introduction. Considerations are focused on microsystem products design, used in different branches, especially in industry.

Microelectronic and Microsystem Elements in Intelligent Buildings

  • Department: Department of Microelectronics
  • Annotation:
    Nové trendy, materiály, technologie, komunikace, informační technologie apod. - umožnění zcela nových funkcí často vzájemně provázaných. Integrace systémů, interdisciplinarita, mezioborovost. Dokonalé a efektivní provázání technologií - realizace na několika úrovních. Interakce mezi okolím, provozem, pláštěm a systémy budov. Projekční proces - inteligentní, promyšlený a komplexní. Soulad a interakce mezi stavebně-architektonickým a energetickým konceptem s maximálním využitím přirozených fyzikálních jevů (stínění, osvětlení, aktivní a pasivní využití slunečního záření, fotovoltaika apod.). Bezpečnost (např. propojení požárního poplachového systému s nouzovým a provozním osvětlením apod.). Neexistuje universální projektant - koordinovaná spolupráce specialistů.

Microsensors and Microactuators

  • Department: Department of Microelectronics
  • Annotation:
    Předložená kniha představuje první českou publikaci, která komplexním způsobem popisuje problematiku mikrosenzorů, mikroaktuátorů a mikrosystémové techniky včetně velmi rozšířených struktur MEMS. Kniha představuje přehledné uspořádání principů, struktur a aplikací doplněných o některé dosažené výsledky při řešení vědeckovýzkumných projektů autora a jeho spolupracovníků v oblasti mikrosenzorů, mikroaktuátorů a mikrosystémů v uplynulých letech. Publikace si klade za cíl seznámit čtenáře s oblastí nových mikrosoučástí a mikrosystémů, které jsou využívány ve všech oblastech reálného světa, lidských potřeb, jejich měření a regulace. Publikace je určena zejména pro studenty a absolventy vysokých, ale i středních škol technického a přírodovědního zaměření, ale i pro ostatní odborníky a zájemce o nové poznatky z progresivního technického rozvoje této oblasti. Pro odborníky z výzkumu, vývoje a praxe může být užitečnou pomůckou pro seznámení se s velmi perspektivní oblastí mikrosystémů.

NMOS and PMOS Translinear Multiplying Cell for Current-Mode Signal Processing

  • Department: Department of Microelectronics
  • Annotation:
    Paper describes NMOS and PMOS translinear cell which multiplies the current signals and which can be used for the current-mode signal processing. The translinear cell consists of NMOS or PMOS transistors that are treated in the sub-threshold conduction region. In this region the transistors exhibit an exponential dependency of the drain current versus the gate voltage and thus the translinear principle can be used for description of the functionality. Operation region of the cell is limited by the validity of the exponential dependency and also by the transistors leakage currents. Significant error is also induced by the auxiliary current mirrors which are biasing the cells. Channel length modulation effect causes error of the input signals and thus the output signal is affected by the multiplicative error. Paper presents basic idea of the multiplying cell, presents results of simulations in CADENCE and also presents results of measurements on real structure composed using dis. tran.

Pressure sensor data processing for vertical velocity measurement

Sensors and microsystems for control and security applications

Solution of Vertical Velocity Measurement Using Pressure Sensor

  • Department: Department of Microelectronics
  • Annotation:
    The core of the paper describes a sensor system for vertical velocity measurement using pressure sensor. Problem of nonlinearity due to the exponential function of air pressure versus altitude is discussed in detail. The paper also deals with the possibility of nonlinearity compensation using a complementary function (electronic logarithm). The system solution must also include temperature compensation. The problem of increasing sensitivity is treated in the paper. The transient analysis of the electronic circuit connection was used for vertical velocity simulation.

Suspended Island MEMS Structure for High Temperature Gas Sensor

  • Department: Department of Microelectronics
  • Annotation:
    simulation and fabrication of new GaN and GaAs Micromechanical Thermal Converters (MTCs) developed for Gas sensors. GaAs and GaN MTCs seem to be very attractive for design of thermally based MEMS sensor devices. To achieve low power consumption in the sensor operation range of 200 to 500 oC we need to ensure high thermal isolation of sensing layers.

Temperature Wireless Control Using Sensor Network

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: WMSCI/IMSCI/IMETI 2008 Proceedings. Orlando: International Institute of Informatics and Systemics (IIIS), 2008, pp. 1-7. ISBN 978-1-934272-49-7.
  • Year: 2008
  • Department: Department of Microelectronics
  • Annotation:
    The system is used as a support for wireless transfer of sensor data. The system was designed as modular with possibilities of number components extending. The system was designed for measurement and control use. There is described a new architecture of a multisensor system for remote temperature measurement using wireless communications in the paper. There are used sensors with digital outputs in the system. The number of sensor can be variable.

Temperature Wireless Sensor Network

Vertical Velocity Measurement - Processing of Sensor Data Using Altitude Corrections

A Bioacoustic Method for Monitoring of Breathing

  • Department: Department of Microelectronics
  • Annotation:
    Acoustic signals originate by the flow of air through the trachea during breathing. These signals are possible to pick-up by microphone. This paper describes a method of the breathing detection based on the sensing of acoustic signals in trachea. Parameters of the breathing, detection inspiration and expiration and apnoea pause are possible to determine from these signals. This method is simple and easy to use, portable and provides an accurate measurement and seems to be well suited for use as a modern breathing monitor.

Actuators

Autonomous power supply for smart sensors

  • Department: Department of Microelectronics
  • Annotation:
    Many applications today needs to be totally isolated from the outside world .It is obvious that the supply energy needs to be generated inside the system. This makes a self-powered microsystem concept [3] possible. With integration of power supply unit on the same chip there are several advantages associated. The main part builds the microgenerator based on PVDF. The polymer - silicon free technology - makes it easy to produce. The whole system is intended to be used in polymer based sensor RFID tags [4] to power up the sensor part.

Cardio-Respiration Monitoring

  • Authors: Frýd, K., prof. Ing. Miroslav Husák, CSc., Ing. Jiří Kroutil, Ph.D.,
  • Publication: Výzkum, vývoj a optimalizace měřicích systémů a vyhodnocování nejistot měření při jejich použití v praxi. Praha: České vysoké učení technické v Praze, 2007. pp. 4.
  • Year: 2007
  • Department: Department of Microelectronics
  • Annotation:
    Základem zařízení je senzorová část, která snímá kardio-respirační činnost. Snímaná informace o dýchání se převede do elektrické podoby, dojde k úpravě elektrického signálu a ten se následně digitalizuje. Digitalizovaný signál se vyšle vysílačem k přijímací jednotce umístěné mino pacienta. Zde je provedeno zpracování signálu a následné vyhodnocení stavu dýchání pacienta.

Chemical sensors with SAW structure

CMOS Sensor of the Temperature Difference with Analog Compensation

  • Authors: Ing. Adam Bouřa, Ph.D., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Moderní metody řešení, návrhu a aplikace elektronických obvodů. Brno: VUT v Brně, Fakulta elektrotechniky a komunikačních technologií, 2007. pp. 31-34. ISBN 978-80-214-3535-3.
  • Year: 2007
  • Department: Department of Microelectronics
  • Annotation:
    Paper describes the circuit structure, which is able to evaluate the temperature difference. It can be used for sensing temperature difference on the surface of the chip. Output signal from this sensor can drive the temperature compensation of the whole chip or it can be used for evaluating internal and external condition around and inside the chip. Circuit structure is based on CMOS technology which guarantees compatibility with other circuits on the chip. Paper describes the sensing circuit structure and also the circuit for compensation of the channel length modulation effect of the transistors in the sensing current mirrors. The programs Cadence and WinSpice were used for simulations.

Design and Characterization of MEMS Thermal Converter

  • Department: Department of Microelectronics
  • Annotation:
    This paper presents design and characterization of a new GaAs based RF Microwave Power Sensor (RFMPS) microsystem. The main criteria for the RFMPS optimization are to keep the stable thermal distribution and minimize the thermal stress. The concept of absorbed power measurement is based on thermal conversion, where absorbed RF power is transformed into thermal power, inside a thermally isolated system.

Design and Characterization of new GaAs Micromechanical Thermal Converter developed for Microwave Power Sensor

  • Department: Department of Microelectronics
  • Annotation:
    In this report we demonstrate the design of new GaAs based Micromechanical thermal converter (MTC) that creates heart of the RF power sensor microsystem. Transmitted power is the main quantity measured in RF systems. The classical approach to transmitted power measurement is based on the measurement of absorbed power waves (incident and reflected) that requires sophisticated multiple power meter structures and need complex calibration. A better technique of absorbed power measurement is based on thermal conversion, where absorbed RF power is transformed into thermal power, inside a thermally isolated system.

Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC.

Design of Strain Sensor Using CoventorWare

  • Authors: Ing. Pavel Kulha, Ph.D., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Moderní metody řešení, návrhu a aplikace elektronických obvodů. Brno: VUT v Brně, Fakulta elektrotechniky a komunikačních technologií, 2007. pp. 71-75. ISBN 978-80-214-3535-3.
  • Year: 2007
  • Department: Department of Microelectronics
  • Annotation:
    The following paper introduces the CoventorWare design environment for piezoresistive sensor design. It uses a hybrid approach that is a unique combination of diaphragm FEM analysis using Analyzer and piezoresistive sensor modeling using Architect's circuit simulation environment.

Design of the Air Flow Sensor Based on Heating the CMOS Chip

  • Department: Department of Microelectronics
  • Annotation:
    Paper presents the basic principles and problems which must be considered in the design of the wind sensor. First it is described the basic principle of the wind flow sensor which is based on the heating CMOS chip. Paper presents possibilities of the chip layout and crucial parameters of the CMOS sensing elements. Sensor is intended to be used for wireless applications, so the power consumption of the sensor is one of the most important parameter. Programs CovenorWare, Cadence and 180 nm CMOS technology were used for simulations.

Digitally Tunable Section for an Analog Current-Mode Predistortion

  • Department: Department of Microelectronics
  • Annotation:
    The paper describes a circuit system which is able to process an analog current mode signals. It is intended to use it as a preamplifier and corrector of the transfer characteristic of some kind of sensor. The circuit is based on the sub-threshold CMOS multiplying cells. Those cells are interconnected by the current mirrors to form a circuit with desired transfer characteristic. There are two ways how to use this circuit. It can be used for direct linearization (pre-distortion) of the signal from the sensor or it can be encircled by a negative feedback in order to realize the inverse function. The circuit is dedicated for slow signals and for extremely low power applications. The transfer characteristic is tunable aid four ten-bit digital to analog converters. The program CADENCE and the CMOS 180 nm technology were used for simulations.

Dynamic Femur Prolongator Control Unit

  • Authors: Vítek, T., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Moderní metody řešení, návrhu a aplikace elektronických obvodů. Brno: VUT v Brně, Fakulta elektrotechniky a komunikačních technologií, 2007. pp. 40-47. ISBN 978-80-214-3535-3.
  • Year: 2007
  • Department: Department of Microelectronics
  • Annotation:
    The main aim of this work was design a realiziation of control unit for automatic prolongator (extensor) of femur bone based on Iliazar method supplemented with dynamic stimulation of concretion point.

Integration of intersectional systems (microsystems)

MEMS Based Humidity Sensors

Micromechanical GaAs Hot Plates for Gas Sensors

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses the design, simulation and fabrication of new Micromachined Thermal Hot Plates (MTHPs) based on GaAs, which were designed for Gas sensors. High sensitivity and low power are expected for present metal oxide Gas sensors, which generally work in high temperature mode (which is essential for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material). Because low power consumption is required, even for operation temperatures in the range of 200 to 500 oC, high thermal isolation of these devices are necessary.

Micromechanical GaAs Thermal Convertor for Gas Sensors

  • Department: Department of Microelectronics
  • Annotation:
    This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. High thermal isolation of these devices can be done by implementing of free micromechanical hot plates which is designed as thin as possible.

Microsystems technologies and new materials in the Czech Republic

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Česko-německé sympozium špičkových technologií: spolupráce v oblasti technologií, mikrosystémová technika, nanotechnologie. Praha: Německá obchodní komora, 2007.
  • Year: 2007
  • Department: Department of Microelectronics
  • Annotation:
    This paper describes microsystems technologies and new materials development in the Czech Republic

Modelling of Sensor for Strain Related Measurement Based on SOI Technology for High Temperature Applications

  • Department: Department of Microelectronics
  • Annotation:
    Electronics for instrumentation and control systems are required to operate at ever increasing temperatures. Device operation at temperatures greater than 200 °C is required for a variety of present and next-generation control applications including e.g. turbine engine control and other industrial applications. SOI technology is suitable technology for fabrication of hi-temperature devices as well as devices for RF applications.

Multisensor Network for Distance Data Pick-Up

MUMPs Optical Switch

  • Authors: Vrchota, P., Burian, Z., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Výzkum, vývoj a optimalizace měřicích systémů a vyhodnocování nejistot měření při jejich použití v praxi. Praha: České vysoké učení technické v Praze, 2007, pp. 5.
  • Year: 2007
  • Department: Department of Microelectronics
  • Annotation:
    Článek se zabývá technologiemi MEMS a MUMPs systémů. Použitelností těchto technologií při výrobě optických mikromechanických součástek, především přepínačů. Shrnuje jejich výhody a nevýhody a naznačuje možné způsoby využití.

PVDF Self Powered Microsystem

  • Department: Department of Microelectronics
  • Annotation:
    This paper describes concept of self powered microsystem. The main problem is how to supply the energy to the system. Nowadays, there is rising demand on wireless sensor systems where no direct connection to the outside world exists. Application of integrated battery all kinds is not appropriate because of determined service life and not suitable dimensions. Autonomous micro generator based on piezoelectric polymer material with ability to change the ambient mechanical energy to the electrical energy will be appropriate. Used material shows better properties then conventional ceramic materials (PZT). Several layouts of such micro generators were designed. The device is not optimized yet and significant improvements are envisaged in the future.

Self-powered microsystem with PVDF based microgenerator

  • Department: Department of Microelectronics
  • Annotation:
    Many applications today needs to be totally isolated from the outside world. It is obvious that the supply energy needs to be generated inside the system. This makes a self-powered microsystem concept possible. With integration of power supply unit on the same chip there are several advantages associated. The main part builds the microgenerator based on PVDF. The polymer - silicon free technology - makes it easy to produce. The whole system is intended to be used in polymer based sensor RFID tags [3] to power up the sensor part (PolyApply Integrated EC Project results).

Self-powered microsystem with PVDF based microgenerator

  • Department: Department of Microelectronics
  • Annotation:
    Many applications today totally isolated from the outside world need to generate the power inside. This makes a self-powered micro-system concept possible. The whole system is intended to be used in e.g. polymer based sensor RFID tags to power up the sensor part. It has 3 main units: power supply unit with energy generator, energy storage block and signal data processing and transmission unit. An unconventional low cost solution is to design a micro generator based on printable piezoelectric polymer PVDF that's easy to produce.

Sensor System with Wireless Data Transfer

  • Authors: prof. Ing. Miroslav Husák, CSc., Oberreiter, O.P., Foit, J.
  • Publication: 6th Electronic Circuit and Systems Conference Proceedings. Bratislava: STU v Bratislave, 2007. pp. 29-32. ISBN 978-80-227-2697-9.
  • Year: 2007

Smart Sensors for Biomedical Application

Wireless temperature sensor network: Wireless sensor data transfer as well as processing

  • Authors: prof. Ing. Miroslav Husák, CSc., Oberreitner, O.P., Foit, J.
  • Publication: Proceedings of the International Conference on e-Bussiness and Telecommunications - ICETE'07. Setúbal: INSTICC Press, 2007. p. 39-44. ISBN 978-89-8111-159-5.
  • Year: 2007
  • Department: Department of Microelectronics
  • Annotation:
    Wireless temperature sensor network describes a wireless sensor data transfer as well as processing steps

Wireless temperature sensor network: Wireless sensor data transfer as well processing

  • Authors: prof. Ing. Miroslav Husák, CSc., Oberreiter, O.P., Foit, J.
  • Publication: Proceedings of ICETE'07-WINSYS2007. Setúbal: INSTICC Press, 2007. p. 39-44. ISBN 978-989-8111-14-2.
  • Year: 2007
  • Department: Department of Microelectronics
  • Annotation:
    This paper describes the wireless temperature sensor network: Wireless sensor data transfer as well processing

Characterization of MEMS sensor for RF Transmitted Power Measurement

  • Department: Department of Microelectronics
  • Annotation:
    Thermo mechanical design and analysis of thermal GaAs-based MEMS devices. It will provide the procedure how thermal analysis should be made and model equations used to describe conduction, convection, radiation and mechanical effects caused by nonhomogenous temperature distribution. This is demonstrated on the design of Micromechanical thermal converter (MTC) that creates heart of the RF power sensor microsystem.

Characterization of MEMS sensor for RF Transmitted Power Measurement

  • Department: Department of Microelectronics
  • Annotation:
    In this report we introduce the procedure for performing a thermo mechanical design and analysis of thermal GaAs-based MEMS devices. It will provide the procedure how thermal analysis should be made and model equations used to describe conduction, convection, radiation and mechanical effects caused by nonhomogenous temperature distribution.

Concept of Surface Acoustic Wave Chemical Sensors

  • Department: Department of Microelectronics
  • Annotation:
    The article describes basic concept of chemical sensors based on surface acoustic wave (SAW). The aim is to depict basic physical concept and simulation rough draft for this type of sensors.

Design and Simulation of Humidity Microsensors Structure Based on Polymers

  • Authors: Suchánek, P., prof. Ing. Miroslav Husák, CSc.,
  • Publication: The Sixth International Conference on Advanced Semiconductor Devices and Microsystems. Bratislava: Slovak University of Technology, 2006. p. 189-192. ISBN 978-1-4244-0396-7.
  • Year: 2006
  • DOI: 10.1109/ASDAM.2006.331186
  • Link: https://doi.org/10.1109/ASDAM.2006.331186
  • Department: Department of Microelectronics
  • Annotation:
    The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezo-rezistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend and surface strain on micro-cantilever which forms sensing part of sensor.

Direction sensitivity matrix with PLL temperature sensor

  • DOI: 10.1109/ASDAM.2006.331183
  • Link: https://doi.org/10.1109/ASDAM.2006.331183
  • Department: Department of Microelectronics
  • Annotation:
    In the paper there is presented temperature transducer with PLL signal processing of sensor data. The principle of temperature sensor is based on the MOS structure behaviour in the temperature range. The strong and weak inversion modes are used. There is used matrix of temperature sensors in the design of air flow sensor. Various arrangements of temperature structure are designed. The new circuits design is used.

Electric energy harvesting inside self powered microsystem

  • DOI: 10.1109/ASDAM.2006.331206
  • Link: https://doi.org/10.1109/ASDAM.2006.331206
  • Department: Department of Microelectronics
  • Annotation:
    Integration of the power supply unit into today's electronic devices gives the possibility to build autonomous electronic devices structure totally separated from the outside world. As the storage of generated energy conventional batteries or polymer capacitors can be used. A vibration-powered micro-generator, based on a polymer piezoelectric material, is proposed to be used as an energy generator for this purpose.

First Teaching Experience of Young Assistents

  • Department: Department of Microelectronics
  • Annotation:
    The paper is about first experiences in my teaching the subjects Electronic device, Electronic and Sensor systems in medicine.

GaAs based micromachined thermal converter for gas sensors

  • Authors: prof. Ing. Jiří Jakovenko, Ph.D., prof. Ing. Miroslav Husák, CSc., Lalinsky, T.L., Drzik, M.D., Vanko, G.V., Mozolova, Z.M., Hascik, S., Chlpik, J.C., Hotovy, I.H., Rehacek, V.R., Kostic, I.K., Matay, L.M.
  • Publication: MicroMechanics Europe Workshop. Southampton: University of Southampton, 2006. pp. 113-116. ISBN 0-85432-848-3.
  • Year: 2006
  • Department: Department of Microelectronics
  • Annotation:
    Design, micromachining technology and an electro-thermo-mechanical performance analysis of GaAs based micromachined thermal converter (MTC) device as the heart of metal oxide gas sensors are presented. MTC device introduced exhibits a low power consumption (Rth~21 K/mW), uniform temperature distribution, a fast thermal response (τ~1.44 ms), and good mechanical integrity and thermal stability.

GaAs Thermally Based MEMS Devices - Fabrication Techniques, Characterization and Modeling

  • Department: Department of Microelectronics
  • Annotation:
    Silicon based MicroElectroMechanical Systems are now well understood and widely used in various integrated micromachined microsensors and microactuators. In relation to this, gallium arsenide (GaAs) offers a number of material-related properties and technological advantages over Si. These include well know properties, such as direct band gap transition and high electron mobility. A very important feature of GaAs is the possibility of forming compatible ternary and quaternary compounds by alloying. Using GaAs as a substrate material, formation of AlxGa1-xAs is especially attractive, since their lattice constants are nearly equal, and aluminum and gallium atoms are easily substituted in the lattice without causing too much strain in the film. Thanks to this prominent feature, a number of interesting properties and phenomena, such as high-mobility two-dimensional carrier gases, resonant tunneling, and fractional quantum Hall effect, have been found in the GaAs heterostructure system

Intelligent Security System with GSM Using

  • Department: Department of Microelectronics
  • Annotation:
    This work describes the design and realization of the security system with using of GSM that it makes possible a security against unauthorized intrusion and against fire. The whole device is constructed of modern and easy available parts. The whole system is based on the modular conception thereby it is flexible. The advantage of this system is possibility localization of the emergence of the invasion at using standard sensors.

Log-Domain CMOS Biquad Section for Current Mode Filters

  • Authors: Ing. Adam Bouřa, Ph.D., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Moderní metody řešení, návrhu a aplikace elektronických obvodů. Brno: VUT v Brně, Fakulta elektrotechniky a komunikačních technologií, 2006. pp. 21-25. ISBN 80-214-3328-0.
  • Year: 2006
  • Department: Department of Microelectronics
  • Annotation:
    The work describes a design of the biquad section using log-domain CMOS technology. Low-pass, band-pass and high-pass filter can be realized using this biquad section. The transfer function of the filter is determined by the feedback around the input and output of the biquad. My design is based on demand to have a universal building block which is able to filter the frequency band from DC to radio frequencies. The frequency band and the transfer function of the filter is determined only aid few devices connected to this building block. It is intended to use these current-mode filters in the design of the wireless sensor systems. In these applications the low-pass filters are usually used as an anti-aliasing filter before the signal is sampled. Also the radio frequency part of the circuit uses the filters.

Log-Domain CMOS Multiplier for an Analog Current Mode Linearization

  • Department: Department of Microelectronics
  • Annotation:
    Work describes a circuit system which is able to process analog current mode signals. The circuit is based on the sub-threshold CMOS multiplication cells. Those cells are interconnected by current mirrors to form the circuit with desired transfer characteristic. There are two ways how to use this circuit. It can be used for direct linearization (pre-distortion) of the signal or it can be encircled by a negative feedback in order to realize the inversion function. The circuit is dedicated for slow signals and for extremely low power applications. The program CADENCE and the MOSFET 180nm technology were used for simulations.

MEMS based humidity sensors

  • Department: Department of Microelectronics
  • Annotation:
    The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezo-rezistive simulation in CoventorWare. Also this paper report about various type of the structure in the area of mems based humidity sensors.

MEMS microactuators

  • Authors: Vítek, T., prof. Ing. Miroslav Husák, CSc.,
  • Publication: 19th International uworkshop 2006 sborník. Brno: Vysoké učení technické v Brně, 2006. pp. 56-61. ISBN 80-214-3343-4.
  • Year: 2006

Microsensors Based on Tensometric Layers Sputtered on Silicon Substrates

Modification Leffingwell-Kerzencev design

  • Department: Department of Microelectronics
  • Annotation:
    The aim of this paper is report the scheme of location working things on the table depending up worker performance.

Piezoelectric Polymerous Materials for Inteligent Sensors

  • Department: Department of Microelectronics
  • Annotation:
    This article mentions the using of piezoelectric materials for the design of sensors. These materials are applied in intelligent sensors. Sensors on the bases of polymerous materials are promising nowadays.

Polymeric Piezoelectric Materials in Sensors

  • Department: Department of Microelectronics
  • Annotation:
    The article describes overview of piezoelectric materials using in sensors and is aimed at polymeric materials. Further, the article observes applications of piezoelectric materials and comparison of ceramic and polymeric sensors.

SAW-based Chemical Sensors

  • Department: Department of Microelectronics
  • Annotation:
    In this article are taken into consideration main advantages and disadvantages of sensors with surface acoustic wave. Provides a survey of used piezoelectric materials and chemical sensitive layers and characteristics.

Self Powered Microsystem with Electromechanical Generator

  • Department: Department of Microelectronics
  • Annotation:
    Growing interest in the field of micro and wireless electronic devices brings the requirement to integrate the power supply into a sensor chain and separate whole structure from the outside world. Use of alternative electrical energy sources instead of batteries has particular importance to remote sensor systems. A vibration-powered micro-generator, based on a polymer piezoelectric material, is proposed for this purpose.

Self powered microsystem with electromechanical generator

  • Department: Department of Microelectronics
  • Annotation:
    Growing interest in the field of micro and wireless electronic devices brings the requirement to integrate the power supply into a sensor chain and separate whole structure from the outside world. Use of alternative electrical energy sources instead of batteries has particular importance to remote sensor systems. A vibration-powered micro-generator, based on a polymer piezoelectric material, is proposed for this purpose.

Sensor System Using Internet Communication

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the International Conference on Wireless Information Networks and Systems. Setúbal: INSTICC Press, 2006. p. 304-309. ISBN 972-8865-65-1.
  • Year: 2006
  • Department: Department of Microelectronics
  • Annotation:
    The paper describes a sensor system for measurement and transfer of data via internet. Sensor data are measured at different locations. The concept of read up sensor data, data transfer and data display is presented in the paper. The realized system for measurement of air temperature, pressure and humidity is described. Hardware and software of the measuring device have been realized. Eight physical quantities can be measured by basic sensor system.

Software Tools for Design and Simulation of Sensor Structures Utilised at Depatrtment of Microelectronics

Sputtered Tensometric Layers for Microsensor Applications

  • Department: Department of Microelectronics
  • Annotation:
    Design and technology of some types of micromechanical sensors based on tensometric layers sputtered on silicon substrates is described. The aim is to prepare sensors suitable for higher operational temperatures utilizing both available high-quality insulating layers and local reduction of substrate thickness by anisotropic etching. To achieve long-term temperature stability the layers of NiCr, Ta2N and CrSi have been studied. Several variants of active layers combined with multilayer electrical contacts were evaluated to prepare successfully the samples Sensors of both one-dimensional type (cantilevers for deformation sensing) and two-dimensional one (membranes) have been studied. Simulations using Coventor-Ware software were performed for modelling of properties of the microstructures under study.

Sputtered Tensometric Layers for Microsensor Applications

  • Authors: Ing. Pavel Kulha, Ph.D., prof. Ing. Miroslav Husák, CSc., Výborný, Z., Jurka, V., Vanek, F., Pospíšil, K.
  • Publication: Proceedings of the WSEAS International Conference: 5th WSEAS Int.Conf. on MICROELECTRONICS, NANOELECTRONICS, OPTOELECTRONICS (MINO'06). Athens: WSEAS Press, 2006. p. 162-167. ISSN 1790-5117. ISBN 960-8457-42-4.
  • Year: 2006

Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix

  • Department: Department of Microelectronics
  • Annotation:
    In the article there is presented a new arrangement of a temperature sensor system for air velocity and direction measurement. The system utilizes temperature dependence of the current through the channel of MOS structure. The geometric arrangement of temperature sensors allows measurement of temperature gradient. Temperature gradient allows to compute direction of air flow over the chip. Optimal operating modes of weak and strong inversion of MOS structure operation have been selected for the design of integrated temperature matrix. The matrix has been used for the design of a probe for measurement. Various arrangements of MOS sensor structures have been designed. CoventorWare and CADENCE software tools have been used for simulation and modeling of sensor properties.

Temperature CMOS Transducer

  • Department: Department of Microelectronics
  • Annotation:
    The paper describes design of a temperature sensor with a CMOS temperature transducer and a circuit with phase lock determined for signal processing with PWM output. Two types of the CMOS temperature sensor operating in the weak and strong inversion region were designed.

Temperature CMOS Transducer

  • Department: Department of Microelectronics
  • Annotation:
    The paper describes design of a temperature sensor with a CMOS temperature transducer and a circuit with phase lock determined for signal processing with PWM output. Two types of the CMOS temperature sensor operating in the weak and strong inversion region were designed.

Translinear Subthreshold MOS Filter for the Wireless Sensors Applications

  • Department: Department of Microelectronics
  • Annotation:
    The work describes a design of the filter using log-domain CMOS technology. Filter only consists of capacitances and CMOS transistors in the week inversion mode and they are treated in the subthreshold conduction region. Low-pass, band-pass and high-pass filter is considered in the design. The transfer function of the filter is determined by the feedback around its input and output. My design is based on demand to have a universal building block which is able to filter the frequency band from DC to radio frequencies. This building block is represented by the log-domain differentiator. The frequency band and the transfer function of the filter is determined only aid few devices connected to this building block. It is intended to use these current-mode filters in the design of the wireless sensor systems. In these applications the low-pass filters are usually used as an anti-aliasing filter before the signal is sampled. Also the radio frequency part of the circuit uses the filters.

Application in Polymer Electronics

  • Department: Department of Microelectronics
  • Annotation:
    The Article Describes Informations about Polymer Materials Utilization in Electronic Application Especially for Polymer Displays.

Approach to Microsystem Design

Basic MEMS Principles and Structures

Design and Realization of Sensor System for Flow Measurement

Design of MEMS and Microsystems - Models and Simulation

Design of Temperature Matrix with Direction Sensitivity

Design of Temperature Matrix with Direction Sensitivity

Design of Temperature Matrix with Direction Sensitivity

Design of the Electronic Evaluation Circuits for the Pressure Sensors

  • Department: Department of Microelectronics
  • Annotation:
    Work summarize the principles of the measuring the pressure with the special accent on the possibility of representing the measured pressure by the electric signal. Main purpose of my work is the design of an analog to digital converter, suitable for the cooperation with the pressure sensor MPX4115A and with some kind of a transmitter.

Flow Measure Using of Anemometric Sensor Principle and Oscillator Probe Fluidic

Material used in polymers electronics

Micromechanical Structures for Low Level Power Measurement in Medical Systems

  • Department: Department of Microelectronics
  • Annotation:
    This paper presents the thermal and thermo-mechanical modelling carried on with the aim to find out the optimal temperature distribution of the RF Microwave Power Sensor (RFMPS) microsystem. The sensor can be used in medical wireless data transfer systems to measure and optimise the transmitted power from human body implemented sensors to the data evaluation unit. The main criteria of the RFMPS optimisation are bouth, keep the stable thermal distribution and minimise the thermal stress.

Micromechanical Thermal Converters Compatible with HEMT Technology

  • Department: Department of Microelectronics
  • Annotation:
    This work discusses the thermo mechanical modelling performed with the aim to optimise the temperature distribution of the Microwave Power Sensor microsystem keeping the thermal stress as low as possible

Microsystem Research Work at the University

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 7th WSEAS International Conference: Automatic Control, Modelling and Simullation (ACMOS '05). Athens: WSEAS Press, 2005. pp. 141-146. ISBN 960-8457-12-2.
  • Year: 2005

Model Flow in the Design of Microsensors and Microsystems

Modeling of GaAs MEMS for RF Power Measurement in Telecommunications

  • Department: Department of Microelectronics
  • Annotation:
    This report discusses the design of Thermo-mechanical converter that creates heart of the RF power sensor microsystem which can be used for transmitted power measurement in telecommunications.

Optimalization of the Efficiency of the RF Power Stage of the Amplifier in Class A

  • Department: Department of Microelectronics
  • Annotation:
    The article describes the way how to improve the efficiency of the power stage of the RF amplifier operating in the class A, using the adaptive bias technique. Power stage is designed to operate at the frequency of 100 MHz and the maximal wattage of 2W at supply voltage of 20V. The output of the amplifier is adjusted for load of 50Ω and the voltage gain is 18. Designed circuit exhibits very good linearity and the power dissipation can be reduced down to 30 per cent compared to normal power stage in class A.

Optimization of GaAs MEMS Structures for Microwave Power Sensor

  • Department: Department of Microelectronics
  • Annotation:
    The paper discusses an improved technique of the absorbed power measurement which is based on thermal conversion principle where absorbed radio frequency (RF) power is transformed into thermal power inside of a thermally isolated Micromechanical Thermal Converter.

Optimization of GaAs MEMS Structures for Microwave Power Sensor

  • Department: Department of Microelectronics
  • Annotation:
    The paper discusses an improved technique of the absorbed power measurement which is based on thermal conversion principle where absorbed radio frequency (RF) power is transformed into thermal power inside of a thermally isolated Micromechanical Thermal Converter.

Optimization of GaAs MEMS Structures for Microwave Power Sensor

  • Department: Department of Microelectronics
  • Annotation:
    The paper discusses an improved technique of the absorbed power measurement which is based on thermal conversion principle where absorbed radio frequency (RF) power is transformed into thermal power inside of a thermally isolated Micromechanical Thermal Converter.

Piesoresistive Pressure Sensors in MEMS Structures

Polymers Devices

  • Authors: Suchánek, P., prof. Ing. Miroslav Husák, CSc., Třebický, T., Ing. Jiří Kroutil, Ph.D., Vítek, T.
  • Publication: Modern Methods of Solutions, Designs and Applications of Electronic Devices. Brno: Vysoké učení technické v Brně, 2005. pp. 128-137. ISBN 80-214-3089-3.
  • Year: 2005
  • Department: Department of Microelectronics
  • Annotation:
    The article describes function, manufacturing and electronics characteristics of the primery polymers electronics devices.

Sensor System with Differential Arrangement of Temperature MOS Sensor

  • DOI: 10.1109/ICIT.2005.1600678
  • Link: https://doi.org/10.1109/ICIT.2005.1600678
  • Department: Department of Microelectronics
  • Annotation:
    In this article, an arrangement of a temperature sensor system is presented. The system utilizes temperature dependence of the current through the channel of MOS structure. Differential arrangement of the temperature sensor is designed. The arrangement allows measurement of temperature gradient. Using suitable geometric arrangement it is possible to compute direction from the temperature gradient, i.e. for example angle of air flow over the chip. Integrated structure of temperature sensors on the chip has orthogonal arrangement. Optimal operating modes have been selected for the design. There have been performed simulations of dependence of temperature sensitivity of the transistors as temperature sensor on changes of its basic parameters. Modes of weak and strong inversion of MOS structure operation have been simulated in the design. Optimal setup of operating mode has been selected for the design of integrated temperature matrix. The matrix has been used for the design of a probe for measurement of velocity and direction of the gas (air) flow over the chip. Various arrangements of MOS sensor structures have been designed. CoventorWare and CADENCE software tools have been used for simulation and modeling of sensor properties

Sensor System with Differential Arrangement of Temperature MOS Sensor

Sensors and Microsystems with Thin-Film Piezoresistive Layers for Measurement of Mechanical Values at High Temperatures

Systems of Models for MEMS Design and Realization

Technology of Production Polymers Devices

Thermo-Mechanical Optimization of Micromechanical Hot Plate for RF Power to Temperature Conversion

  • Department: Department of Microelectronics
  • Annotation:
    This report discusses the optimization of micromechanical hot plate thermo converter that creates heart of the RF power sensor microsystem. The conception of absorbed power measurement is based on thermal conversion, where absorbed RF power is transformed into thermal power, inside a thermally isolated system.

V/F Converter for the Pressure Sensors and Wireless Applications

  • Department: Department of Microelectronics
  • Annotation:
    Work describes a simple circuit structure which is designed to cooperate with the intelligent pressure sensor and RF transmitter.

Design and simulation of micromechanical thermal converter for RF power sensor microsystem

Design of Integrated Si Pressure Sensor using Methodology of Microsystem Model Development

Design of Integrated Si Pressure Sensor using Methodology of Microsystem Model Development

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 2004 WSEAS International Multiconference CSCC. Athens: WSEAS Press, 2004. ISBN 960-8052-99-8.
  • Year: 2004

Integrated Pressure Sensor - Use of Microsystems Model Flow

Intelligent Sensor Structure for Tilt Measure

Low Voltage Differential Signaling (LVDS) Driver and Receiver Design

  • Authors: Švorc, J., prof. Ing. Miroslav Husák, CSc., Seidenglanz, M.
  • Publication: The 11th Electronic Devices and Systems Conference. Brno: VUT v Brně, 2004. pp. 323-326. ISBN 80-214-2701-9.
  • Year: 2004

Macromodel of Intelligent Sensor Structure with Accelerometer

Macromodel of Intelligent Sensor Structure with Accelerometer

Microsystem Models in Integrated Pressure Sensor Design

Microsystem Models in Integrated Pressure Sensor Design

Microsystems in Student Technical Work

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: The 11th Electronic Devices and Systems Conference. Brno: VUT v Brně, 2004. pp. 214-217. ISBN 80-214-2701-9.
  • Year: 2004

Properties of Strain Sensor with Piezoresistive Layers

Research activities in relation to microsystems education

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: 18th International Microworkshop 2004. Brno: VUT v Brně, 2004. p. 110-121. ISBN 80-214-2818-X.
  • Year: 2004

Sensors with Implanted Layers for Using in Microsystems

The Design of Anemometric Sensor System for Measurement of Wind Velocity and Direction with Integrated Measure Probe

  • Department: Department of Microelectronics
  • Annotation:
    This paper describes the Design of Anemometric Sensor System for Measurement of Wind Velocity and Direction with Integrated Measure Probe

The Design of Anemometric Sensor System for Measurement of Wind Velocity and Direction with Integrated Measure Probe

  • Department: Department of Microelectronics
  • Annotation:
    The Design of Anemometric Sensor System for Measurement of Wind Velocity and Direction with Integrated Measure Probe

The Design of Anemometric Sensor System Usin Microsystems Models

Thermally Isolated MEMS Thermo Converter for RF Power Sensor

  • Department: Department of Microelectronics
  • Annotation:
    Work discusses the thermo mechanical simulations performed with the aim to optimise the temperature distribution of the Microwave Power Sensor (MPS) microsystem keeping the thermal stress as low as possible.

Application of Research results Reached in Microsytems in Student Education

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: 14th EAEEIE International Conference on Innovations in Education for Electrical and Information Engineering. Gdańsk: PTETiS, 2003, ISBN 83-918622-0-8.
  • Year: 2003

Approach to Design and Modelling of Microsystems for Communication Use

Complex Access to Modelling of Microsystems

Design and Simulation of the GaAs Micromechanical Thermal Converter for Microwave Transmitted Power Sensor

  • Department: Department of Microelectronics
  • Annotation:
    Thermo mechanical simulations performed with the aim of optimising the temperature distribution of the Micromechanical Thermal Converter (MTC), designed for a Microwave Power Sensor Microsystem

Design and simulation of the GaAs Micromechanical Thermal Converter for Microwave Transmitted Power Sensor

  • Department: Department of Microelectronics
  • Annotation:
    In this project we discuss the thermomechanical simulations performed in the aim of optimising the GaAs based Micromechanical Thermal Converter that creates heart of Microwave Transmitted power sensor. Conception of the absorbed power measurement is based on thermal conversion where absorbed RF power is transformed into thermal power inside a thermally isolated system. By means of thermal simulations we propose a GaAs Micromechanical Thermal Converter design and layout of the HFET heater and temperature sensor placed on thermally isolated cantilever beam or bridge. Spatial temperature dependences, thermal time constant and power to temperature dependences at different ambient atmospheres are calculated from the heat distribution. The 3D thermal and thermo-mechanical simulations of the sensor structures were performed using CoventorWare from Microcosm Technologies. Thermo-mechanical numerical modelling and simulation have significant influence on optimal topology design of the thermo converter. The main thermo converter characteristics have been optimised and evaluated. The most important ones are the temperature distribution over the sensing area, thermal time response, sensitivity analysis and evaluation of the mechanical stresses caused by deposition (initial stress) and by temperature changes in thermo converter structure. GaAs multilayer cantilever beam creates optimal conditions for both the monolithic integration of GaAs based Heterostructure Field Effect Transistors (HFETs) and thermal isolation of the microwave sensor elements.

Design of Microsystems using Equivalent Models Between Energy Domains

Design of Microsystems Using Models on Different System Levels

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Twelfth IASTED International Conference on Applied Simulation and Modelling. Anaheim: Acta Press, 2003, pp. 478-483. ISSN 1021-8181. ISBN 0-88986-384-9.
  • Year: 2003

Design of Tilt Meter with Accelerometer

Education in Microelectronics in Czech Republic

Hierarchy of models in microsystems design

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Computational Methods in Circuits and Systems Applications. Danvers: WSEAS Press, 2003. p. 101-104. ISBN 960-8052-88-2.
  • Year: 2003

Mechanical, Thermal and Electrical Behaviour od Si Strain Guge

Mechanical, Thermal and Electrical Behaviour of Si Strain Gauge

Micromechanical Thermal Converter Device Based on Polyimide-Fixed Island Structure

Micromechanical Thermal Converter device Based on Polymide Fixed island Structure

Microsystem design for RF power measurement

  • Department: Department of Microelectronics
  • Annotation:
    Design and measurement of absorbed power sensor microsystem based on thermal conversion, where absorbed RF power is transformed into thermal power, inside a thermally isolated system.

Microsystem Modeling - from Macromodels to Microsystem Design

Microsystem modeling - from macromodels to microsystem design

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show. Cambridge, MA: Computationg Publications, 2003. p. 272-275. ISBN 0-9728422-0-9.
  • Year: 2003

Microsystem modeling - from macromodels to microsystem design

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show. Cambridge, MA: Computationg Publications, 2003. p. 272-275. ISBN 0-9728422-0-9.
  • Year: 2003

Modeling and Simulation of Mechanical, Thermal and Electrical behaviour of Si Cantilever with Implanted Strain Gauge

Modeling of Thermally Isolated Micromechanical Thermo Converter

  • Department: Department of Microelectronics
  • Annotation:
    Design, simulation and measurement of absorbed power sensor microsystem based on thermal conversion, where absorbed RF power is transformed into thermal power, inside a thermally isolated system.

Modeling of Thermally Isolated Micromechanical Thermo Converter. Conference Proceedings

  • Department: Department of Microelectronics
  • Annotation:
    Design, simulation and measurement of absorbed power sensor microsystem based on thermal conversion, where absorbed RF power is transformed into thermal power, inside a thermally isolated system.

Modelling and simulation of mechanical, thermal and electrical behaviour of Si cantilever with implanted strain gauge

  • Department: Department of Microelectronics
  • Annotation:
    In the paper there is characterized physical model of implanted strain gauges; various girder topologies are designed and basic technological steps during realization of cantilever are described. Simulation using CoventorWare (MEMCAD) program is used for verification of mechanical properties and temperature distribution in cantilever structures. At realized structures of cantilever with strain gauges, there have been measured basic parameters, as dependence of electric parameters of strain gauges on mechanical deformation, temperature dependence at different mechanical load, temperature stability of output parameters, temperature dependence of pn junctions in the structure. From measured data there have been calculated piezoresistive coefficients, coefficients of deformation sensitivity, linearity, hysteresis, temperature coefficients of resistance, etc. Based on measured data, there has been designed connection of a simple electric equivalent model of the structure.

Modelling and simulation of mechanical, thermal and electrical behaviour of Si cantilever with implanted strain gauge

Perspective microelectronic elements for industry use

Piezoresistive Microsensors with Implanted and Thin-Film Layers

Possible Approaches to Development of Microsystem Models

Study of Piezoresistive Implanted and Thin-Film Layers for using in Microsensors

Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space

Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space

Design and Characterization of Levitated Suspended RF Inductors

  • Authors: Palán, B., Torki, K., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of SPIE Vol. 4755, 2002. Washington: SPIE, 2002. pp. 97-104. ISSN 0277-786X. ISBN 0-8194-4518-5.
  • Year: 2002

Design of Strain Gauge Structure

Irradiation Effects on ISFET-Based pH Microsensors

  • Authors: Palán, B., dos Santos, F., Roubík, K., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Eurosensors XVI - Proceedings. Praha: Czech Technical University in Prague, 2002. pp. 1117-1120.
  • Year: 2002

Macro" Models of Microsystems

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 4th European Workshop on Microelectronics Education. Vigo: Universidad de Vigo, 2002.
  • Year: 2002

Model of Tilt Sensor System

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: The 9th IEEE International Conference on Electronics, Circuits and Systems. Piscataway: IEEE, 2002. p. 227-230. ISBN 0-7803-7596-3.
  • Year: 2002

Modeling of Micromechanical Structure of the Microwave Power Sensor

Radiation Effects on pH-ISFET Microsensors

  • Authors: Palán, B., dos Santos, F., Roubík, K., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Eurosensors XVI - Book of Abstracts. Praha: Czech Technical University in Prague, 2002. pp. 655-656. ISBN 80-01-02576-4.
  • Year: 2002

Research Work and Research Centre

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of Sokrates Workshop 2002. Brno: VUT v Brně, 2002. pp. 193-199. ISBN 80-214-2217-3.
  • Year: 2002

Sensor System with Accelerometer for Tilt Measurement

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Advances in Simulation, Systems Theory and Systems Engineering. Danvers: WSEAS Press, 2002. p. 394-397. ISBN 960-8052-70-X.
  • Year: 2002

Structured Study in the Area of Microsystems

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: 4th European Workshop on Microelectronics Education. ???: Marcombo, S.A, 2002, pp. 249-252. ISBN 84-267-1325-4.
  • Year: 2002

Structures of Cantilever with Implanted Strain Gauge

Structures of Cantilever with Implanted Strain Gauge

Student Research Work and Research Centre

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Book of Abstracts - 13th EAEEIE International Conference on Innovations in Education for Electrical and Information Engineering. York: University of York, 2002, pp. 10. ISBN 1-85911-009-6.
  • Year: 2002

Student Research Work and Research Centre

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 13th EAEEIE Annual Conference on Innovations in Education for Electrical and Information Engineering. York: University of York, 2002, ISBN 1-85911-008-8.
  • Year: 2002

Thermal and Thermo-mechanical Modeling of GaAs Micromechanical Thermal Converter

Thermal and Thermo-mechanical Modelling of GaAs Micromechanical Thermal Converter

Thermo-mechanical Simulation and Modeling of RF Power Sensor Microsystem

Thermo-mechanical Simulation of GaAs Based Microwave Power Sensor Microsystem

Thermo-mechanical Simulations of GaAs Based Microwave Power Sensor Microsystem

Use of Macromodels for Student Devices Design

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of Sokrates Workshop 2002. Brno: VUT v Brně, 2002. pp. 189-192. ISBN 80-214-2217-3.
  • Year: 2002

MEMCAD Thermal Simulation of GaAs Based Membrane Bridge

  • Department: Department of Microelectronics
  • Annotation:
    Thermo-mechanical simulations performed in the aim of optimising the temperature distribution of microwave power sensor microsytems.

Microsystem Education in Structure Study

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: 17th International Microworkshop 2001. Brno: VUT v Brně, 2001. pp. 43-46. ISBN 80-214-2034-0.
  • Year: 2001

Model of Temperature Microsystem with Wireless Communication

Model of Temperature Microsystem with Wireless Communication

Pressure Microsensor for Wireless Measurement

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the International MEMS Workshop 2001. Singapore: National University of Singapore, 2001, pp. 633-642. ISBN 981-04-4165-7.
  • Year: 2001

Research Work and Research Programs

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: 17th International Microworkshop 2001. Brno: VUT v Brně, 2001. pp. 40-43. ISBN 80-214-2034-0.
  • Year: 2001

Sensor Systems with Wireless Data Communication

Structured Study at CTU FEE Prague

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: 17th International Microworkshop 2001. Brno: VUT v Brně, 2001. pp. 29-39. ISBN 80-214-2034-0.
  • Year: 2001

Student Education in Microsystems

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the International MEMS Workshop 2001. Singapore: National University of Singapore, 2001, pp. 549-558. ISBN 981-04-4165-7.
  • Year: 2001

Thermal Microactuators for Optical Purpose

  • Authors: Huja, M., prof. Ing. Miroslav Husák, CSc.,
  • Publication: International Conference on Information technology: Coding and Computing 2001. Piscataway: IEEE, 2001. p. 137-142. ISBN 0-7695-1062-0.
  • Year: 2001

Thermo-Mechanical Simulation of GaAs power Sensor Microsystem

CMOS ISFET-Based Structures for Biomedical Applications

  • Authors: Palán, B., Roubík, K., prof. Ing. Miroslav Husák, CSc., Courtois, B.
  • Publication: 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings. Piscataway: IEEE, 2000. p. 502-506. ISBN 0-7803-6603-4.
  • Year: 2000
  • DOI: 10.1109/MMB.2000.893835
  • Link: https://doi.org/10.1109/MMB.2000.893835
  • Department: Department of Microelectronics
  • Annotation:
    The miniaturization and integration of biomedical sensors is of key importance for improved diagnosis and therapy in the future. These devices integrated monolithically on the same chip together with low-power electronics are suitable for implantable "in vivo" monitoring of arterial blood pH, pCO/sub 2/ or pO/sub 2/ changes. This paper deals with the design, fabrication and experimental evaluation of ISFET-based structures realized in an unmodified commercial submicron 0.6 /spl square/m CMOS technology. The compatibility study of pH ISFET chemical devices with CMOS circuits is described. Some technology-driven problems associated with using this submicron process for the chemical microsensors are reported. Comparison of the authors' fabricated structures with previously published ISFETs using unmodified standard CMOS technology is given. Research goals are to develop fully integrated CMOS compatible ion-sensitive ISFET devices for implantable biomedical microsystems.

From Microelectronics to Nanoelectronics

  • Authors: prof. Ing. Miroslav Husák, CSc., Kodeš, J., Schröfel, J.
  • Publication: HN. Hospodářské noviny. 2000, 44(12.12.2000), 2. ISSN 0862-9587.
  • Year: 2000

Hybrid Integrated System for Living Cells Bio-Potentials Measurement

  • Authors: Tesař, P., prof. Ing. Miroslav Husák, CSc.,
  • Publication: U.R.S.I. - Electromagnetic Aspects of Selforganization in Biology. Praha: AV ČR, Ústav radiotechniky a elektroniky, 2000, pp. 64. ISBN 80-86269-04-3.
  • Year: 2000

Information Technology Research

MEMS Structure - Micromirror Array

  • Authors: Huja, M., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Design, Test, Integration, and Packaging of MEMS/MOEMS. Bellingham: SPIE, 2000. p. 556-567. ISSN 0277-786X. ISBN 0-8194-3645-3.
  • Year: 2000

Microsystem Project-Oriented Education

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 3rd European Workshop on Microelectronics Education. Dordrecht: Kluwer Academic Publishers, 2000. p. 269-272. ISBN 0-7923-6456-2.
  • Year: 2000

Microsystems for Space Applications

  • Authors: Palán, B., Santos, F.V., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Acta Polytechnica. 2000, 40(3), 53-57. ISSN 1210-2709.
  • Year: 2000

Packaging of Biomedical Microsensors

  • Authors: Palán, B., Roubík, K., prof. Ing. Miroslav Husák, CSc., Courtois, B.
  • Publication: Proceedings of Workshop 2000. Praha: České vysoké učení technické v Praze, 2000, pp. 550. ISBN 80-01-02229-3.
  • Year: 2000

pH Microsensors for Biomedical Applications

  • Authors: Palán, B., prof. Ing. Miroslav Husák, CSc., Courtois, B.
  • Publication: Proceedings of Workshop 2000. Praha: České vysoké učení technické v Praze, 2000, pp. 554. ISBN 80-01-02229-3.
  • Year: 2000

The Electrostatic Micromirror Fabricated Using the Multi-User MEMS Processes

  • Authors: Huja, M., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 11th Workshop Micro Mechanics Europe. Uppsala: Uppsala University, 2000, pp. A9-1-A9-4.
  • Year: 2000

The Use of Micromirror Array in Telecommunications

  • Authors: Huja, M., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings ICT-2000 International Conference on Telecommunications. Mexico City: UNAM, 2000, pp. 820-823. ISBN 968-36-7762-2.
  • Year: 2000

Application of Flip-Chip Technology for Design of Chemical Microsystems

  • Authors: Tesař, P., Vít, R., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Microdevices at the beginning of the next century. Budapest: Department of Aircraft and Ships, Technical University of Budapest, 1999, pp. 53-58. ISBN 963-420-627-1.
  • Year: 1999

Fundamental Noise Limits of ISFET-Based Microsystems

  • Authors: Palán, B., Santos, F., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Eurosensors XIII. Delft: Technical University of Delft, 1999, pp. 169-172. ISBN 90-76699-02-X.
  • Year: 1999

High Frequency Bio-Signals Detection System

  • Authors: Palán, B., prof. Ing. Miroslav Husák, CSc., Pokorný, J., Šrobár, F., Jelínek, F., Trkal, V., Šaroch, J.
  • Publication: Microdevices at the beginning of the next century. Budapest: Department of Aircraft and Ships, Technical University of Budapest, 1999, pp. 31-36. ISBN 963-420-627-1.
  • Year: 1999

Integrated Capacitive Pressure Sensor in a Contactless Measurement System

  • Authors: prof. Ing. Miroslav Husák, CSc., Palán, B.
  • Publication: Microdevices at the beginning of the next century. Budapest: Department of Aircraft and Ships, Technical University of Budapest, 1999, pp. 37-44. ISBN 963-420-627-1.
  • Year: 1999

Microelectronic Sensors for Electromagnetic Signals Detection

  • Authors: Palán, B., prof. Ing. Miroslav Husák, CSc., Pokorny, J., Srobar, F., Jelinek, F., Trkal, V., Saroch, J.
  • Publication: Proceedings of Workshop 99. Praha: České vysoké učení technické v Praze, 1999, pp. 341.
  • Year: 1999

Microsystems for Space Applications

  • Authors: Palán, B., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: First International Conference on Advanced Engineering Design. Glasgow: University of Glasgow, 1999, pp. 133-135.
  • Year: 1999
  • Department: Department of Microelectronics
  • Annotation:
    Bezdrátový přenos, zpracování analogového signálu mikrosystémů pro aplikace v kosmu.

Microsystems for Space Applications

  • Authors: Palán, B., Santos, F., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: First International Conference on Advanced Engineering Design - Proceedings. Praha: České vysoké učení technické v Praze, 1999. pp. 117. ISBN 80-01-02055-X.
  • Year: 1999

Microsystems in Space

  • Authors: Palan, B., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of Workshop 99. Praha: České vysoké učení technické v Praze, 1999. pp. 202.
  • Year: 1999

Microsystems-Centre for Research and Education

New ISFET Sensor Interface Circuit for Biomedical Applications

  • Authors: Palán, B., Santos, F., Karam, J., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Sensors and Actuators. 1999, 57(1), 63-68. ISSN 0924-4247.
  • Year: 1999
  • DOI: 10.1016/S0925-4005(99)00136-7
  • Link: https://doi.org/10.1016/S0925-4005(99)00136-7
  • Department: Department of Microelectronics
  • Annotation:
    This article presents a novel architecture of an ISFET sensor interface circuit, monolithically integrated on a 3D MCM, part of a biomedical microsystem. It is a differential configuration with two ISFET devices (one with Si3N4 ion sensitive layer, the other with SiO2 sensitive layer) and realized in a 2.5 μm CMOS technology. The sensor interface is simple, has a current output signal and low silicon area requirements. The circuit architecture provides digital facilities, which makes possible the performance of the configuration been optimized during a calibration step of the system.

Noise Analysis of ISFET Based Sensors

  • Authors: Palán, B., Santos, F., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Poster 1999. Praha: České vysoké učení technické v Praze, Fakulta elektrotechnická, 1999, pp. 17.
  • Year: 1999

Sensor Interface Circuit for ISFET Based Sensors

  • Authors: Palán, B., Santos, F., Karam, J., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Journal of Solid-State Devices and Circuits. 1999, 7(1), 17-23. ISSN 0104-9631.
  • Year: 1999

Sensor System with One-Chip Microsystem

  • Authors: prof. Ing. Miroslav Husák, CSc., Palán, B.
  • Publication: Proceedings of ICECS'99. Patras: Typorama, 1999. p. 1775-1778. ISBN 0-7803-5682-9.
  • Year: 1999
  • DOI: 10.1109/ICECS.1999.814543
  • Link: https://doi.org/10.1109/ICECS.1999.814543
  • Department: Department of Microelectronics
  • Annotation:
    The paper describes design, construction of and results obtained with a contactless measuring system using a passive integrated resonance circuit. The system is intended for measurement of small pressure variations and contactless information transmission. It is based on the principle of variation of the resonance frequency of a single-chip integrated tuned circuit with measuring capacitance. The one-chip resonant circuit has been realised as a monolith integrated sensor in CMOS technology. The dimension is approximately 10 mm*. The active part has the form of an absorption resonance frequency meter. Measurement, control, approximation, computation and result processing are performed on a PC. The paper proper deals with the theory of system design, electronic circuit connections, parasitic capacitances effects calculation, fabrication technology of the integrated passive resonant circuit, result evaluation and techniques of PC-controlled absorption meter.

Student Projects Integration to University Microsystem Centre

  • DOI: 10.1109/MSE.1999.787039
  • Link: https://doi.org/10.1109/MSE.1999.787039
  • Department: Department of Microelectronics
  • Annotation:
    Improvement of the teaching process efficiency and the study attraction is at present one of the most important problems of technical universities. This article states the possible solutions of the problem as a close contact between the scientific activity and teaching at universities. Undergraduate and postgraduate students take part in the scientific activity of the departments. The students have possibility to make use of the departments' contacts with other universities and institutes, including foreign ones. Centre of Microsystems (CEMIS) established at CTU Prague corresponds with these trends.

The Contactless Measuring System with Capacitive Pressure Sensor

The University Centre for Development and Education in Microsystems

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: 10th EAEEIE Annual Conference - Educational Innovations in EIE. Nancy: European Association EAEEIE, 1999, pp. 97-100.
  • Year: 1999

Use of Absorption Resonance Frequency Meter in Measure Sensor System

A New ISFET Sensor Interface Circuit

  • Authors: Palán, B., Vinci dos Santos, F., Karam, J.M., Curtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications. Bristol: Institute of Physics Publishing, 1998, pp. 171-172. ISBN 0-7503-0536-3.
  • Year: 1998

Design, Realization and Diagnostics of Electronic Components, Sensors, Integrated Circuits, Microsystems, and Equipments

Education in Microsystem Design and Realization

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Microelectronics Education. Dordrecht: Kluwer Academic Publishers, 1998. p. 61-64. ISBN 0-7923-5107-X.
  • Year: 1998
  • Department: Department of Microelectronics
  • Annotation:
    In the paper there is presented information about ways and results of both education as well as research in the area of Microsystems at the Czech Technical University in Prague. Laboratory equipment, hardware and software tools utilized for microsystem design and testing are described. The CAD laboratory offers a variety of approaches to education of advanced undergraduate and postgraduate students. The laboratory can serve as a training center for engineers from the industry as well. The main results of research carried out at the department are presented. The research work is oriented towards the areas of design, realization and testing of microsystems, sensor systems and microelectronic elements and circuits. In educational process, the services of EUROPRACTICE are utilized, especially technological realization, software and participation in specialized courses.

Fluidic Oscillator for Flowmeter

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: The Ninth Micromechanics Europe Workshop - Proceedings. Oslo: SINTEF Forum, 1998, pp. 147-150.
  • Year: 1998

Fluidic oscillator for flowmeter

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Informal Proceedings of 5th NEXUSPAN Workshop on Thermal Aspects in Microsystem Technology. Budapest: Technical University, 1998. p. 773-774. ISBN 0-7503-0536-3.
  • Year: 1998

Fluidic Oscillator for Flowmeter

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications. Bristol: Institute of Physics Publishing, 1998, pp. 773-774. ISBN 0-7503-0536-3.
  • Year: 1998

Integrated Microsystem for Biomedical Applications

  • Authors: Palán, B., Santos, V., Karam, J., Courtois, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Workshop 98. Praha: České vysoké učení technické v Praze, 1998, pp. 307-308.
  • Year: 1998

Phase-Locked-Loop Signal Processing in Temperature Transducer

  • Authors: prof. Ing. Miroslav Husák, CSc., Vaníček, F.
  • Publication: Advances in Systems, Signals, Control and Computers. Durban: IAAMSAD, 1998. pp. 444-447. ISBN 0-620-23136-X.
  • Year: 1998

Semiconductor Flow and Direction Monitoring Sensor Systems

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Second International Conference on Advanced Semiconductor Devices and Microsystems. Piscataway: IEEE, 1998. p. 343-346. ISBN 0-7803-4909-1.
  • Year: 1998

Sensor Chip for Experimental Measurements of Biopotentials Generated by Living Cells

  • Authors: Palán, B., prof. Ing. Miroslav Husák, CSc.,
  • Publication: Workshop 98. Praha: České vysoké učení technické v Praze, 1998, pp. 863-864.
  • Year: 1998

Sensor-System for Wind Velocity and Direction Masurement

Temperature Transducer

  • Authors: prof. Ing. Miroslav Husák, CSc., Vaníček, F.
  • Publication: 5th Electronic Devices and Systems Conference 1998 Proceedings. Brno: PC-DIR, 1998, pp. 35-38. ISBN 80-214-1198-8.
  • Year: 1998

The Use of Fluidic Oscillator Probe with Temperature Sensor for Liquid Flow Measurement

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Advances in Systems, Signals, Control and Computers. Durban: IAAMSAD, 1998. pp. 436-439. ISBN 0-620-23136-X.
  • Year: 1998

Educational Centre of Microsystems

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Innovations and Quality in Education for Electrical and Information Engineering. Edinburgh: Napier University, 1997. pp. 21-26.
  • Year: 1997

One-Chip Integrated Resonance Circuit with a Capacitive Pressure Sensor

The PLL Transducer for CMOS Temperature Sensor

  • Authors: prof. Ing. Miroslav Husák, CSc., Vaníček, F.
  • Publication: MIPRO'97 20th International Convention. Rijeka: LINIJA, 1997. pp. 22-24. ISBN 953-6042-40-1.
  • Year: 1997

Application of Flip-flops for Very Low Signals Detection

  • Authors: prof. Ing. Miroslav Husák, CSc., Burian, Z., Vaníček, F.
  • Publication: Electronic Devices and Systems 1996 - Proceedings. Brno: VUT v Brně, 1996. pp. 5-8. ISBN 80-214-0767-8.
  • Year: 1996

On-Chip Integrated Resonance Circuit with the Capacitive Pressure Sensor

Sensor System for Biomedical Laboratory

Sensor System for Pressure Masurement of Liver Perfusion

  • Authors: prof. Ing. Miroslav Husák, CSc., Šebesta, P., Vaníček, F.
  • Publication: Electronic Devices and Systems 1996 - Proceedings. Brno: VUT v Brně, 1996. pp. 161-163. ISBN 80-214-0767-8.
  • Year: 1996

The Resonance Circuit Microsystem

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the 7th Micromechanics Europe Workshop. Barcelona: Universitat de Barcelona, 1996. pp. 125-132.
  • Year: 1996

The Temperature Sensor with Flip-Flop Transducer

  • Authors: prof. Ing. Miroslav Husák, CSc., Vaníček, F.
  • Publication: Proceedings of the Symposium Microelectronics, Electronics, and Electronic Technologies. Rijeka: LINIJA, 1996. pp. 271-274. ISBN 953-6042-30-4.
  • Year: 1996

Dynamic Calibration in Sensor System

  • Authors: prof. Ing. Miroslav Husák, CSc., Vaníček, F.
  • Publication: MIPRO 95 - PROCEEDINGS OF MEET 95. Rijeka: HD, 1995, pp. 2142-2145. ISBN 953-6042-14-2.
  • Year: 1995

Eye Pressure Measurement with Capacite Pressure Sensor

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Sborník příspěvků na pracovním setkání "Výuka a výzkum v oblasti biomedicínského inženýrství a biotechnologií na FEL ČVUT v Praze". Praha: České vysoké učení technické v Praze, Fakulta elektrotechnická, 1995, pp. 64.
  • Year: 1995

Sensor Systems with Calibration

  • Authors: prof. Ing. Miroslav Husák, CSc., Vaníček, F.
  • Publication: Proceedings of Electronic Devices and Systems Conference 1995. Brno: VUT v Brně, 1995, pp. 171-174.
  • Year: 1995

Temperature Transducer with Switched-Capacitor Converter

  • Authors: prof. Ing. Miroslav Husák, CSc., Vaníček, F.
  • Publication: MIPRO 95 - PROCEEDINGS OF MEET 95. Rijeka: HD, 1995, pp. 2165-2168. ISBN 953-6042-14-2.
  • Year: 1995

The Pressure Monitoring on the Human Body Surface

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Sborník příspěvků na pracovním setkání "Výuka a výzkum v oblasti biomedicínského inženýrství a biotechnologií na FEL ČVUT v Praze". Praha: České vysoké učení technické v Praze, Fakulta elektrotechnická, 1995, pp. 63.
  • Year: 1995

Application of Temperature Sensor in a Flowmeter with Fluidic Oscillator

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: XVII. International Conference MIPRO 94. Rijeka: Croatian Society for Microprocessor Systems, 1994, pp. 281-285.
  • Year: 1994

Design and Realization of Flowmeter with a Temperature Sensor

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: XVII. International Conference MIPRO 94. Rijeka: Croatian Society for Microprocessor Systems, 1994, pp. 275-280.
  • Year: 1994

Flowmeter Sensor System with a Thermistor as Temperature Sensor

Temperature Sensor with Frequency Output

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: EDS 94 (Proceedings of Electronic Devices and Systems Conference 1994). Vol. II. Brno: VUT v Brně, FEI, Ústav mikroelektroniky, 1994, pp. 185-188.
  • Year: 1994

The Use of Thermistor as a Temperature Sensor for Flowmeter

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: EDS 94 (Proceedings of Electronic Devices and Systems Conference 1994). Vol. II. Brno: VUT v Brně, FEI, Ústav mikroelektroniky, 1994, pp. 56-59.
  • Year: 1994

Temperature Resistive Senzor for Fluidic Probe

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Proceedings of the Seminar Electronic Devices and Systems EDS 93. Brno: VUT v Brně, 1993, pp. 120-122.
  • Year: 1993

Fluidic Oscillator Structure for Flowmeter

  • Authors: prof. Ing. Miroslav Husák, CSc.,
  • Publication: Informal Proceedings of 5th NEXUSPAN Workshop on Thermal Aspects in Microsystem technology. Budapest: Technical University, 1989, pp. 121-124.
  • Year: 1989

Microsystem Devices and Circuits for Interdisciplinary Applications

  • Department: Department of Microelectronics
  • Annotation:
    The paper offers survey of microsystems in interdisciplinary applications. In the lecture is showed: the survey of microsystem technologies, the survey of integration single components, the description of special structures like as microflow sensor with the optical analysis, the use of microsystems in the medicine, for lab-on-chip, one describes microfluid passive structures and elements, ceramic microstructures, one describes principle and behaviour of the integrated chromatograph, optical spectrometer etc. There are described principles of heat microactuators, heat microturbines, steam micromotor etc. in the paper.

Responsible person Ing. Mgr. Radovan Suk